JP5738174B2 - クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 - Google Patents

クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 Download PDF

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Publication number
JP5738174B2
JP5738174B2 JP2011285356A JP2011285356A JP5738174B2 JP 5738174 B2 JP5738174 B2 JP 5738174B2 JP 2011285356 A JP2011285356 A JP 2011285356A JP 2011285356 A JP2011285356 A JP 2011285356A JP 5738174 B2 JP5738174 B2 JP 5738174B2
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control
compressor unit
amount
compressor
unit
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Japanese (ja)
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JP2013134020A (ja
JP2013134020A5 (https=
Inventor
敏之 木村
敏之 木村
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication date
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Priority to JP2011285356A priority Critical patent/JP5738174B2/ja
Priority to TW101143454A priority patent/TWI521179B/zh
Priority to US13/724,092 priority patent/US9759467B2/en
Priority to CN201210576016.8A priority patent/CN103184996B/zh
Priority to KR1020120152851A priority patent/KR101428315B1/ko
Publication of JP2013134020A publication Critical patent/JP2013134020A/ja
Publication of JP2013134020A5 publication Critical patent/JP2013134020A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022—Compressor control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—Component parts or details not otherwise provided for in this subclass
    • F25B2400/07—Details of compressors or related parts
    • F25B2400/075—Details of compressors or related parts with parallel compressors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2011285356A 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 Active JP5738174B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法
TW101143454A TWI521179B (zh) 2011-12-27 2012-11-21 Cryogenic pump system, very low temperature system, compressor unit control device and its control method
US13/724,092 US9759467B2 (en) 2011-12-27 2012-12-21 Cryopump system, cryogenic system, and apparatus and method of controlling compressor unit
CN201210576016.8A CN103184996B (zh) 2011-12-27 2012-12-26 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法
KR1020120152851A KR101428315B1 (ko) 2011-12-27 2012-12-26 크라이오펌프시스템, 극저온시스템, 압축기유닛의 제어장치 및 그 제어방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Publications (3)

Publication Number Publication Date
JP2013134020A JP2013134020A (ja) 2013-07-08
JP2013134020A5 JP2013134020A5 (https=) 2013-11-28
JP5738174B2 true JP5738174B2 (ja) 2015-06-17

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JP2011285356A Active JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Country Status (5)

Country Link
US (1) US9759467B2 (https=)
JP (1) JP5738174B2 (https=)
KR (1) KR101428315B1 (https=)
CN (1) CN103184996B (https=)
TW (1) TWI521179B (https=)

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JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6180349B2 (ja) * 2014-03-18 2017-08-16 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の制御方法
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KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6123041B1 (ja) * 2017-01-04 2017-04-26 株式会社日立製作所 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法
JP2018127929A (ja) * 2017-02-07 2018-08-16 住友重機械工業株式会社 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム
JP6734817B2 (ja) 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP2017214936A (ja) * 2017-09-11 2017-12-07 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
CN111295557B (zh) * 2017-10-29 2022-02-22 住友(Shi)美国低温研究有限公司 用于将需要不同的控制机制的低温装置集成到单个操作平台上的通用控制器
JP6975066B2 (ja) 2018-02-20 2021-12-01 住友重機械工業株式会社 極低温冷凍機
WO2019181595A1 (ja) 2018-03-23 2019-09-26 住友重機械工業株式会社 極低温冷凍機
JP2021063508A (ja) * 2021-01-20 2021-04-22 住友重機械工業株式会社 クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法
US20220397322A1 (en) * 2021-06-15 2022-12-15 Applied Materials, Inc. Cryogenic Cooling System
KR102536332B1 (ko) * 2022-09-23 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프 시스템
WO2024148477A1 (zh) * 2023-01-09 2024-07-18 安徽万瑞冷电科技有限公司 低温泵、控制系统和控制方法
CN116498537B (zh) * 2023-04-25 2024-01-02 德耐尔能源装备有限公司 空压机的智能控制方法及系统

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Also Published As

Publication number Publication date
US20130160468A1 (en) 2013-06-27
TWI521179B (zh) 2016-02-11
JP2013134020A (ja) 2013-07-08
CN103184996A (zh) 2013-07-03
KR20130075688A (ko) 2013-07-05
KR101428315B1 (ko) 2014-08-07
US9759467B2 (en) 2017-09-12
TW201344133A (zh) 2013-11-01
CN103184996B (zh) 2016-05-25

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