CN103184996B - 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 - Google Patents

低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 Download PDF

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Publication number
CN103184996B
CN103184996B CN201210576016.8A CN201210576016A CN103184996B CN 103184996 B CN103184996 B CN 103184996B CN 201210576016 A CN201210576016 A CN 201210576016A CN 103184996 B CN103184996 B CN 103184996B
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control
controlled
compressor unit
compressor
value
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Chinese (zh)
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CN103184996A (zh
Inventor
木村敏之
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022—Compressor control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—Component parts or details not otherwise provided for in this subclass
    • F25B2400/07—Details of compressors or related parts
    • F25B2400/075—Details of compressors or related parts with parallel compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201210576016.8A 2011-12-27 2012-12-26 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 Active CN103184996B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-285356 2011-12-27
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Publications (2)

Publication Number Publication Date
CN103184996A CN103184996A (zh) 2013-07-03
CN103184996B true CN103184996B (zh) 2016-05-25

Family

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Family Applications (1)

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CN201210576016.8A Active CN103184996B (zh) 2011-12-27 2012-12-26 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法

Country Status (5)

Country Link
US (1) US9759467B2 (https=)
JP (1) JP5738174B2 (https=)
KR (1) KR101428315B1 (https=)
CN (1) CN103184996B (https=)
TW (1) TWI521179B (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6086835B2 (ja) * 2013-07-23 2017-03-01 住友重機械工業株式会社 圧縮機および冷却システム
DE202013010352U1 (de) * 2013-11-18 2015-02-19 Oerlikon Leybold Vacuum Gmbh Kaltkopf für Tieftemperatur-Kältemaschine
JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6180349B2 (ja) * 2014-03-18 2017-08-16 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の制御方法
US9927152B2 (en) * 2014-11-04 2018-03-27 Goodrich Corporation Multi-dewar cooling system
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
US11149992B2 (en) 2015-12-18 2021-10-19 Sumitomo (Shi) Cryogenic Of America, Inc. Dual helium compressors
JP6534358B2 (ja) * 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6123041B1 (ja) * 2017-01-04 2017-04-26 株式会社日立製作所 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法
JP2018127929A (ja) * 2017-02-07 2018-08-16 住友重機械工業株式会社 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム
JP6734817B2 (ja) 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP2017214936A (ja) * 2017-09-11 2017-12-07 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
CN111295557B (zh) * 2017-10-29 2022-02-22 住友(Shi)美国低温研究有限公司 用于将需要不同的控制机制的低温装置集成到单个操作平台上的通用控制器
JP6975066B2 (ja) 2018-02-20 2021-12-01 住友重機械工業株式会社 極低温冷凍機
WO2019181595A1 (ja) 2018-03-23 2019-09-26 住友重機械工業株式会社 極低温冷凍機
JP2021063508A (ja) * 2021-01-20 2021-04-22 住友重機械工業株式会社 クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法
US20220397322A1 (en) * 2021-06-15 2022-12-15 Applied Materials, Inc. Cryogenic Cooling System
KR102536332B1 (ko) * 2022-09-23 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프 시스템
WO2024148477A1 (zh) * 2023-01-09 2024-07-18 安徽万瑞冷电科技有限公司 低温泵、控制系统和控制方法
CN116498537B (zh) * 2023-04-25 2024-01-02 德耐尔能源装备有限公司 空压机的智能控制方法及系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004100558A (ja) * 2002-09-09 2004-04-02 Denso Corp 圧縮機制御装置
CN1837612A (zh) * 2005-03-24 2006-09-27 株式会社电装 压缩机容量控制系统和制冷循环系统
CN1979058A (zh) * 2005-12-09 2007-06-13 谷轮公司 并联冷凝单元的控制系统及方法
CN100439819C (zh) * 2002-08-20 2008-12-03 住友重机械工业株式会社 极低温冷冻机
CN101688529A (zh) * 2007-06-26 2010-03-31 三电有限公司 可变容量压缩机的容量控制系统
CN101790644A (zh) * 2007-08-28 2010-07-28 佳能安内华股份有限公司 低温泵系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11211262A (ja) * 1998-01-28 1999-08-06 Hitachi Ltd 吸収式冷凍機システム
JP2001074326A (ja) * 1999-09-07 2001-03-23 Daikin Ind Ltd 圧縮機ユニット
US6647735B2 (en) * 2000-03-14 2003-11-18 Hussmann Corporation Distributed intelligence control for commercial refrigeration
JP2001263254A (ja) * 2000-03-17 2001-09-26 Tokimec Inc 液圧装置
US6530237B2 (en) * 2001-04-02 2003-03-11 Helix Technology Corporation Refrigeration system pressure control using a gas volume
JP4445187B2 (ja) * 2002-04-18 2010-04-07 住友重機械工業株式会社 極低温冷凍機
KR100437806B1 (ko) * 2002-06-12 2004-06-30 엘지전자 주식회사 멀티형 공기조화기의 운전제어방법
JP4023249B2 (ja) * 2002-07-25 2007-12-19 ダイキン工業株式会社 圧縮機内部状態推定装置及び空気調和装置
JP4151559B2 (ja) * 2003-10-27 2008-09-17 株式会社豊田自動織機 容量可変型圧縮機の制御装置
JP2005188783A (ja) * 2003-12-24 2005-07-14 Toshiba Corp 冷蔵庫
DE112008002219B4 (de) * 2007-08-17 2018-10-25 Sanden Holdings Corporation Kapazitätssteuerungssystem für einen Kompressor mit variabler Kapazität und Anzeigevorrichtung für das System
KR101279184B1 (ko) * 2008-09-30 2013-06-26 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
JP5634323B2 (ja) * 2011-05-13 2014-12-03 住友重機械工業株式会社 クライオポンプシステム、クライオポンプのための再生方法
US8991198B2 (en) * 2012-04-10 2015-03-31 International Business Machines Corporation Cooling system control and servicing based on time-based variation of an operational variable

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100439819C (zh) * 2002-08-20 2008-12-03 住友重机械工业株式会社 极低温冷冻机
JP2004100558A (ja) * 2002-09-09 2004-04-02 Denso Corp 圧縮機制御装置
CN1837612A (zh) * 2005-03-24 2006-09-27 株式会社电装 压缩机容量控制系统和制冷循环系统
CN1979058A (zh) * 2005-12-09 2007-06-13 谷轮公司 并联冷凝单元的控制系统及方法
CN101688529A (zh) * 2007-06-26 2010-03-31 三电有限公司 可变容量压缩机的容量控制系统
CN101790644A (zh) * 2007-08-28 2010-07-28 佳能安内华股份有限公司 低温泵系统

Also Published As

Publication number Publication date
US20130160468A1 (en) 2013-06-27
TWI521179B (zh) 2016-02-11
JP2013134020A (ja) 2013-07-08
CN103184996A (zh) 2013-07-03
KR20130075688A (ko) 2013-07-05
JP5738174B2 (ja) 2015-06-17
KR101428315B1 (ko) 2014-08-07
US9759467B2 (en) 2017-09-12
TW201344133A (zh) 2013-11-01

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