CN103184996B - 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 - Google Patents
低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 Download PDFInfo
- Publication number
- CN103184996B CN103184996B CN201210576016.8A CN201210576016A CN103184996B CN 103184996 B CN103184996 B CN 103184996B CN 201210576016 A CN201210576016 A CN 201210576016A CN 103184996 B CN103184996 B CN 103184996B
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Links
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000005057 refrigeration Methods 0.000 claims description 93
- 238000001816 cooling Methods 0.000 claims description 49
- 230000008569 process Effects 0.000 claims description 22
- 230000001618 algogenic effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 97
- 239000013256 coordination polymer Substances 0.000 description 39
- 241000196324 Embryophyta Species 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 12
- 238000003860 storage Methods 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 8
- 238000010977 unit operation Methods 0.000 description 7
- 239000006096 absorbing agent Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 239000003463 adsorbent Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- KXLUWEYBZBGJRZ-POEOZHCLSA-N Canin Chemical compound O([C@H]12)[C@]1([C@](CC[C@H]1C(=C)C(=O)O[C@@H]11)(C)O)[C@@H]1[C@@]1(C)[C@@H]2O1 KXLUWEYBZBGJRZ-POEOZHCLSA-N 0.000 description 1
- GPFVKTQSZOQXLY-UHFFFAOYSA-N Chrysartemin A Natural products CC1(O)C2OC2C34OC3(C)CC5C(CC14)OC(=O)C5=C GPFVKTQSZOQXLY-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000007799 cork Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010573 double replacement reaction Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 238000011022 operating instruction Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000306 recurrent effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/022—Compressor control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/07—Details of compressors or related parts
- F25B2400/075—Details of compressors or related parts with parallel compressors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-285356 | 2011-12-27 | ||
| JP2011285356A JP5738174B2 (ja) | 2011-12-27 | 2011-12-27 | クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103184996A CN103184996A (zh) | 2013-07-03 |
| CN103184996B true CN103184996B (zh) | 2016-05-25 |
Family
ID=48653237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210576016.8A Active CN103184996B (zh) | 2011-12-27 | 2012-12-26 | 低温泵系统、超低温系统、压缩机单元的控制装置及其控制方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9759467B2 (https=) |
| JP (1) | JP5738174B2 (https=) |
| KR (1) | KR101428315B1 (https=) |
| CN (1) | CN103184996B (https=) |
| TW (1) | TWI521179B (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6086835B2 (ja) * | 2013-07-23 | 2017-03-01 | 住友重機械工業株式会社 | 圧縮機および冷却システム |
| DE202013010352U1 (de) * | 2013-11-18 | 2015-02-19 | Oerlikon Leybold Vacuum Gmbh | Kaltkopf für Tieftemperatur-Kältemaschine |
| JP2015098844A (ja) | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP6180349B2 (ja) * | 2014-03-18 | 2017-08-16 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の制御方法 |
| US9927152B2 (en) * | 2014-11-04 | 2018-03-27 | Goodrich Corporation | Multi-dewar cooling system |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| US11149992B2 (en) | 2015-12-18 | 2021-10-19 | Sumitomo (Shi) Cryogenic Of America, Inc. | Dual helium compressors |
| JP6534358B2 (ja) * | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法 |
| KR20180061742A (ko) | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
| JP6123041B1 (ja) * | 2017-01-04 | 2017-04-26 | 株式会社日立製作所 | 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法 |
| JP2018127929A (ja) * | 2017-02-07 | 2018-08-16 | 住友重機械工業株式会社 | 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム |
| JP6734817B2 (ja) | 2017-06-23 | 2020-08-05 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ制御方法 |
| JP2017214936A (ja) * | 2017-09-11 | 2017-12-07 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP7073489B2 (ja) | 2017-10-29 | 2022-05-23 | スミトモ （エスエイチアイ） クライオジェニックス オブ アメリカ インコーポレイテッド | 異なる制御機構を必要とする極低温装置を単一の動作プラットフォーム上に統合する為の汎用制御装置 |
| JP6975066B2 (ja) | 2018-02-20 | 2021-12-01 | 住友重機械工業株式会社 | 極低温冷凍機 |
| JP7282077B2 (ja) * | 2018-03-23 | 2023-05-26 | 住友重機械工業株式会社 | 極低温冷凍機 |
| JP2021063508A (ja) * | 2021-01-20 | 2021-04-22 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法 |
| US20220397322A1 (en) * | 2021-06-15 | 2022-12-15 | Applied Materials, Inc. | Cryogenic Cooling System |
| KR102536332B1 (ko) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
| WO2024148477A1 (zh) * | 2023-01-09 | 2024-07-18 | 安徽万瑞冷电科技有限公司 | 低温泵、控制系统和控制方法 |
| CN116498537B (zh) * | 2023-04-25 | 2024-01-02 | 德耐尔能源装备有限公司 | 空压机的智能控制方法及系统 |
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| JP2004100558A (ja) * | 2002-09-09 | 2004-04-02 | Denso Corp | 圧縮機制御装置 |
| CN1837612A (zh) * | 2005-03-24 | 2006-09-27 | 株式会社电装 | 压缩机容量控制系统和制冷循环系统 |
| CN1979058A (zh) * | 2005-12-09 | 2007-06-13 | 谷轮公司 | 并联冷凝单元的控制系统及方法 |
| CN100439819C (zh) * | 2002-08-20 | 2008-12-03 | 住友重机械工业株式会社 | 极低温冷冻机 |
| CN101688529A (zh) * | 2007-06-26 | 2010-03-31 | 三电有限公司 | 可变容量压缩机的容量控制系统 |
| CN101790644A (zh) * | 2007-08-28 | 2010-07-28 | 佳能安内华股份有限公司 | 低温泵系统 |
Family Cites Families (14)
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|---|---|---|---|---|
| JPH11211262A (ja) * | 1998-01-28 | 1999-08-06 | Hitachi Ltd | 吸収式冷凍機システム |
| JP2001074326A (ja) * | 1999-09-07 | 2001-03-23 | Daikin Ind Ltd | 圧縮機ユニット |
| US6647735B2 (en) * | 2000-03-14 | 2003-11-18 | Hussmann Corporation | Distributed intelligence control for commercial refrigeration |
| JP2001263254A (ja) * | 2000-03-17 | 2001-09-26 | Tokimec Inc | 液圧装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| JP4445187B2 (ja) * | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| KR100437806B1 (ko) * | 2002-06-12 | 2004-06-30 | 엘지전자 주식회사 | 멀티형 공기조화기의 운전제어방법 |
| JP4023249B2 (ja) * | 2002-07-25 | 2007-12-19 | ダイキン工業株式会社 | 圧縮機内部状態推定装置及び空気調和装置 |
| JP4151559B2 (ja) * | 2003-10-27 | 2008-09-17 | 株式会社豊田自動織機 | 容量可変型圧縮機の制御装置 |
| JP2005188783A (ja) * | 2003-12-24 | 2005-07-14 | Toshiba Corp | 冷蔵庫 |
| WO2009025208A1 (ja) * | 2007-08-17 | 2009-02-26 | Sanden Corporation | 可変容量圧縮機の容量制御システム及び表示装置 |
| KR101279184B1 (ko) * | 2008-09-30 | 2013-06-26 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
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-
2011
- 2011-12-27 JP JP2011285356A patent/JP5738174B2/ja active Active
-
2012
- 2012-11-21 TW TW101143454A patent/TWI521179B/zh active
- 2012-12-21 US US13/724,092 patent/US9759467B2/en active Active
- 2012-12-26 CN CN201210576016.8A patent/CN103184996B/zh active Active
- 2012-12-26 KR KR1020120152851A patent/KR101428315B1/ko active Active
Patent Citations (6)
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| CN100439819C (zh) * | 2002-08-20 | 2008-12-03 | 住友重机械工业株式会社 | 极低温冷冻机 |
| JP2004100558A (ja) * | 2002-09-09 | 2004-04-02 | Denso Corp | 圧縮機制御装置 |
| CN1837612A (zh) * | 2005-03-24 | 2006-09-27 | 株式会社电装 | 压缩机容量控制系统和制冷循环系统 |
| CN1979058A (zh) * | 2005-12-09 | 2007-06-13 | 谷轮公司 | 并联冷凝单元的控制系统及方法 |
| CN101688529A (zh) * | 2007-06-26 | 2010-03-31 | 三电有限公司 | 可变容量压缩机的容量控制系统 |
| CN101790644A (zh) * | 2007-08-28 | 2010-07-28 | 佳能安内华股份有限公司 | 低温泵系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103184996A (zh) | 2013-07-03 |
| TWI521179B (zh) | 2016-02-11 |
| KR20130075688A (ko) | 2013-07-05 |
| JP2013134020A (ja) | 2013-07-08 |
| TW201344133A (zh) | 2013-11-01 |
| KR101428315B1 (ko) | 2014-08-07 |
| US9759467B2 (en) | 2017-09-12 |
| JP5738174B2 (ja) | 2015-06-17 |
| US20130160468A1 (en) | 2013-06-27 |
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