TWI521179B - Cryogenic pump system, very low temperature system, compressor unit control device and its control method - Google Patents

Cryogenic pump system, very low temperature system, compressor unit control device and its control method Download PDF

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Publication number
TWI521179B
TWI521179B TW101143454A TW101143454A TWI521179B TW I521179 B TWI521179 B TW I521179B TW 101143454 A TW101143454 A TW 101143454A TW 101143454 A TW101143454 A TW 101143454A TW I521179 B TWI521179 B TW I521179B
Authority
TW
Taiwan
Prior art keywords
control
amount
compressor
unit
target
Prior art date
Application number
TW101143454A
Other languages
English (en)
Chinese (zh)
Other versions
TW201344133A (zh
Inventor
Toshiyuki Kimura
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201344133A publication Critical patent/TW201344133A/zh
Application granted granted Critical
Publication of TWI521179B publication Critical patent/TWI521179B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/022—Compressor control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—Component parts or details not otherwise provided for in this subclass
    • F25B2400/07—Details of compressors or related parts
    • F25B2400/075—Details of compressors or related parts with parallel compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW101143454A 2011-12-27 2012-11-21 Cryogenic pump system, very low temperature system, compressor unit control device and its control method TWI521179B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011285356A JP5738174B2 (ja) 2011-12-27 2011-12-27 クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法

Publications (2)

Publication Number Publication Date
TW201344133A TW201344133A (zh) 2013-11-01
TWI521179B true TWI521179B (zh) 2016-02-11

Family

ID=48653237

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101143454A TWI521179B (zh) 2011-12-27 2012-11-21 Cryogenic pump system, very low temperature system, compressor unit control device and its control method

Country Status (5)

Country Link
US (1) US9759467B2 (https=)
JP (1) JP5738174B2 (https=)
KR (1) KR101428315B1 (https=)
CN (1) CN103184996B (https=)
TW (1) TWI521179B (https=)

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JP2015098844A (ja) * 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
JP6180349B2 (ja) * 2014-03-18 2017-08-16 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の制御方法
US9927152B2 (en) * 2014-11-04 2018-03-27 Goodrich Corporation Multi-dewar cooling system
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
US11149992B2 (en) 2015-12-18 2021-10-19 Sumitomo (Shi) Cryogenic Of America, Inc. Dual helium compressors
JP6534358B2 (ja) * 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
KR20180061742A (ko) 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6123041B1 (ja) * 2017-01-04 2017-04-26 株式会社日立製作所 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法
JP2018127929A (ja) * 2017-02-07 2018-08-16 住友重機械工業株式会社 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム
JP6734817B2 (ja) 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP2017214936A (ja) * 2017-09-11 2017-12-07 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
CN111295557B (zh) * 2017-10-29 2022-02-22 住友(Shi)美国低温研究有限公司 用于将需要不同的控制机制的低温装置集成到单个操作平台上的通用控制器
JP6975066B2 (ja) 2018-02-20 2021-12-01 住友重機械工業株式会社 極低温冷凍機
WO2019181595A1 (ja) 2018-03-23 2019-09-26 住友重機械工業株式会社 極低温冷凍機
JP2021063508A (ja) * 2021-01-20 2021-04-22 住友重機械工業株式会社 クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法
US20220397322A1 (en) * 2021-06-15 2022-12-15 Applied Materials, Inc. Cryogenic Cooling System
KR102536332B1 (ko) * 2022-09-23 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프 시스템
WO2024148477A1 (zh) * 2023-01-09 2024-07-18 安徽万瑞冷电科技有限公司 低温泵、控制系统和控制方法
CN116498537B (zh) * 2023-04-25 2024-01-02 德耐尔能源装备有限公司 空压机的智能控制方法及系统

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JP5634323B2 (ja) * 2011-05-13 2014-12-03 住友重機械工業株式会社 クライオポンプシステム、クライオポンプのための再生方法
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Also Published As

Publication number Publication date
US20130160468A1 (en) 2013-06-27
JP2013134020A (ja) 2013-07-08
CN103184996A (zh) 2013-07-03
KR20130075688A (ko) 2013-07-05
JP5738174B2 (ja) 2015-06-17
KR101428315B1 (ko) 2014-08-07
US9759467B2 (en) 2017-09-12
TW201344133A (zh) 2013-11-01
CN103184996B (zh) 2016-05-25

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