TWI521179B - Cryogenic pump system, very low temperature system, compressor unit control device and its control method - Google Patents
Cryogenic pump system, very low temperature system, compressor unit control device and its control method Download PDFInfo
- Publication number
- TWI521179B TWI521179B TW101143454A TW101143454A TWI521179B TW I521179 B TWI521179 B TW I521179B TW 101143454 A TW101143454 A TW 101143454A TW 101143454 A TW101143454 A TW 101143454A TW I521179 B TWI521179 B TW I521179B
- Authority
- TW
- Taiwan
- Prior art keywords
- control
- amount
- compressor
- unit
- target
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 16
- 238000001816 cooling Methods 0.000 claims description 64
- 230000008569 process Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 103
- 239000013256 coordination polymer Substances 0.000 description 42
- 238000005259 measurement Methods 0.000 description 22
- 238000012545 processing Methods 0.000 description 21
- 230000008859 change Effects 0.000 description 17
- 238000011156 evaluation Methods 0.000 description 13
- 238000003860 storage Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 238000010977 unit operation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005057 refrigeration Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/022—Compressor control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/07—Details of compressors or related parts
- F25B2400/075—Details of compressors or related parts with parallel compressors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011285356A JP5738174B2 (ja) | 2011-12-27 | 2011-12-27 | クライオポンプシステム、極低温システム、圧縮機ユニットの制御装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201344133A TW201344133A (zh) | 2013-11-01 |
| TWI521179B true TWI521179B (zh) | 2016-02-11 |
Family
ID=48653237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101143454A TWI521179B (zh) | 2011-12-27 | 2012-11-21 | Cryogenic pump system, very low temperature system, compressor unit control device and its control method |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9759467B2 (https=) |
| JP (1) | JP5738174B2 (https=) |
| KR (1) | KR101428315B1 (https=) |
| CN (1) | CN103184996B (https=) |
| TW (1) | TWI521179B (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6086835B2 (ja) * | 2013-07-23 | 2017-03-01 | 住友重機械工業株式会社 | 圧縮機および冷却システム |
| DE202013010352U1 (de) * | 2013-11-18 | 2015-02-19 | Oerlikon Leybold Vacuum Gmbh | Kaltkopf für Tieftemperatur-Kältemaschine |
| JP2015098844A (ja) | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP6180349B2 (ja) * | 2014-03-18 | 2017-08-16 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の制御方法 |
| US9927152B2 (en) * | 2014-11-04 | 2018-03-27 | Goodrich Corporation | Multi-dewar cooling system |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| US11149992B2 (en) | 2015-12-18 | 2021-10-19 | Sumitomo (Shi) Cryogenic Of America, Inc. | Dual helium compressors |
| JP6534358B2 (ja) * | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法 |
| KR20180061742A (ko) | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
| JP6123041B1 (ja) * | 2017-01-04 | 2017-04-26 | 株式会社日立製作所 | 磁気共鳴イメージング装置、クライオシステムの制御装置、および、クライオシステムの制御方法 |
| JP2018127929A (ja) * | 2017-02-07 | 2018-08-16 | 住友重機械工業株式会社 | 極低温冷凍機のための圧縮機ユニット、及びクライオポンプシステム |
| JP6734817B2 (ja) | 2017-06-23 | 2020-08-05 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ制御方法 |
| JP2017214936A (ja) * | 2017-09-11 | 2017-12-07 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| JP7073489B2 (ja) | 2017-10-29 | 2022-05-23 | スミトモ （エスエイチアイ） クライオジェニックス オブ アメリカ インコーポレイテッド | 異なる制御機構を必要とする極低温装置を単一の動作プラットフォーム上に統合する為の汎用制御装置 |
| JP6975066B2 (ja) | 2018-02-20 | 2021-12-01 | 住友重機械工業株式会社 | 極低温冷凍機 |
| JP7282077B2 (ja) * | 2018-03-23 | 2023-05-26 | 住友重機械工業株式会社 | 極低温冷凍機 |
| JP2021063508A (ja) * | 2021-01-20 | 2021-04-22 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプシステムの運転方法、冷凍機システム、および冷凍機システムの運転方法 |
| US20220397322A1 (en) * | 2021-06-15 | 2022-12-15 | Applied Materials, Inc. | Cryogenic Cooling System |
| KR102536332B1 (ko) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
| WO2024148477A1 (zh) * | 2023-01-09 | 2024-07-18 | 安徽万瑞冷电科技有限公司 | 低温泵、控制系统和控制方法 |
| CN116498537B (zh) * | 2023-04-25 | 2024-01-02 | 德耐尔能源装备有限公司 | 空压机的智能控制方法及系统 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211262A (ja) * | 1998-01-28 | 1999-08-06 | Hitachi Ltd | 吸収式冷凍機システム |
| JP2001074326A (ja) * | 1999-09-07 | 2001-03-23 | Daikin Ind Ltd | 圧縮機ユニット |
| US6647735B2 (en) * | 2000-03-14 | 2003-11-18 | Hussmann Corporation | Distributed intelligence control for commercial refrigeration |
| JP2001263254A (ja) * | 2000-03-17 | 2001-09-26 | Tokimec Inc | 液圧装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| JP4445187B2 (ja) * | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| KR100437806B1 (ko) * | 2002-06-12 | 2004-06-30 | 엘지전자 주식회사 | 멀티형 공기조화기의 운전제어방법 |
| JP4023249B2 (ja) * | 2002-07-25 | 2007-12-19 | ダイキン工業株式会社 | 圧縮機内部状態推定装置及び空気調和装置 |
| KR20050058363A (ko) * | 2002-08-20 | 2005-06-16 | 스미도모쥬기가이고교 가부시키가이샤 | 극저온 냉동기 |
| JP4275374B2 (ja) * | 2002-09-09 | 2009-06-10 | 株式会社デンソー | 圧縮機制御装置 |
| JP4151559B2 (ja) * | 2003-10-27 | 2008-09-17 | 株式会社豊田自動織機 | 容量可変型圧縮機の制御装置 |
| JP2005188783A (ja) * | 2003-12-24 | 2005-07-14 | Toshiba Corp | 冷蔵庫 |
| JP2006266172A (ja) * | 2005-03-24 | 2006-10-05 | Denso Corp | 圧縮機容量制御装置および冷凍サイクル装置 |
| US7878014B2 (en) * | 2005-12-09 | 2011-02-01 | Emerson Climate Technologies, Inc. | Parallel condensing unit control system and method |
| JP4861914B2 (ja) * | 2007-06-26 | 2012-01-25 | サンデン株式会社 | 可変容量圧縮機の容量制御システム |
| WO2009025208A1 (ja) * | 2007-08-17 | 2009-02-26 | Sanden Corporation | 可変容量圧縮機の容量制御システム及び表示装置 |
| JPWO2009028450A1 (ja) * | 2007-08-28 | 2010-12-02 | キヤノンアネルバ株式会社 | クライオポンプシステム |
| KR101279184B1 (ko) * | 2008-09-30 | 2013-06-26 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
| JP5634323B2 (ja) * | 2011-05-13 | 2014-12-03 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプのための再生方法 |
| US8991198B2 (en) * | 2012-04-10 | 2015-03-31 | International Business Machines Corporation | Cooling system control and servicing based on time-based variation of an operational variable |
-
2011
- 2011-12-27 JP JP2011285356A patent/JP5738174B2/ja active Active
-
2012
- 2012-11-21 TW TW101143454A patent/TWI521179B/zh active
- 2012-12-21 US US13/724,092 patent/US9759467B2/en active Active
- 2012-12-26 CN CN201210576016.8A patent/CN103184996B/zh active Active
- 2012-12-26 KR KR1020120152851A patent/KR101428315B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103184996A (zh) | 2013-07-03 |
| KR20130075688A (ko) | 2013-07-05 |
| JP2013134020A (ja) | 2013-07-08 |
| TW201344133A (zh) | 2013-11-01 |
| KR101428315B1 (ko) | 2014-08-07 |
| US9759467B2 (en) | 2017-09-12 |
| JP5738174B2 (ja) | 2015-06-17 |
| US20130160468A1 (en) | 2013-06-27 |
| CN103184996B (zh) | 2016-05-25 |
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