JP5734158B2 - レーザ加工機用電源装置 - Google Patents

レーザ加工機用電源装置 Download PDF

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Publication number
JP5734158B2
JP5734158B2 JP2011229419A JP2011229419A JP5734158B2 JP 5734158 B2 JP5734158 B2 JP 5734158B2 JP 2011229419 A JP2011229419 A JP 2011229419A JP 2011229419 A JP2011229419 A JP 2011229419A JP 5734158 B2 JP5734158 B2 JP 5734158B2
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Prior art keywords
pulse
inverter
laser
frequency
frequency modulation
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Japanese (ja)
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JP2013089788A (ja
JP2013089788A5 (enExample
Inventor
真吾 津田
真吾 津田
民田　太一郎
太一郎 民田
孝佳 永井
孝佳 永井
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2011229419A priority Critical patent/JP5734158B2/ja
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Publication of JP2013089788A5 publication Critical patent/JP2013089788A5/ja
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  • Laser Beam Processing (AREA)
JP2011229419A 2011-10-19 2011-10-19 レーザ加工機用電源装置 Active JP5734158B2 (ja)

Priority Applications (1)

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JP2011229419A JP5734158B2 (ja) 2011-10-19 2011-10-19 レーザ加工機用電源装置

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JP2011229419A JP5734158B2 (ja) 2011-10-19 2011-10-19 レーザ加工機用電源装置

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JP2013089788A JP2013089788A (ja) 2013-05-13
JP2013089788A5 JP2013089788A5 (enExample) 2013-11-21
JP5734158B2 true JP5734158B2 (ja) 2015-06-10

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016002001A1 (ja) * 2014-07-01 2016-01-07 ギガフォトン株式会社 レーザ装置、ｅｕｖ光生成システム及びレーザ装置の制御方法
JP7084759B2 (ja) * 2018-03-29 2022-06-15 住友重機械工業株式会社 レーザ加工装置
JP7189674B2 (ja) * 2018-04-20 2022-12-14 住友重機械工業株式会社 レーザ加工機およびその電源装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3782486B2 (ja) * 1995-06-21 2006-06-07 キヤノン株式会社 レーザ出力制御装置、露光装置およびデバイス製造方法
JPH09223836A (ja) * 1996-02-14 1997-08-26 Amada Eng Center:Kk レーザー電源装置
JPH09232658A (ja) * 1996-02-21 1997-09-05 Amada Eng Center:Kk レーザー電源装置
JPH10135554A (ja) * 1996-10-25 1998-05-22 Matsushita Electric Ind Co Ltd ガスレーザ発振装置
JP3991450B2 (ja) * 1998-06-16 2007-10-17 三菱電機株式会社 高周波交流電源装置
JP2003243749A (ja) * 2002-02-15 2003-08-29 Mitsubishi Electric Corp レーザ電源装置
JP3846573B2 (ja) * 2002-06-14 2006-11-15 三菱電機株式会社 レーザ加工装置及び該加工装置の制御方法
JP4135417B2 (ja) * 2002-07-09 2008-08-20 三菱電機株式会社 レーザ電源装置及びレーザ装置
JP2007335900A (ja) * 2007-09-07 2007-12-27 Mitsubishi Electric Corp レーザ装置、レーザ装置の給電制御方法、レーザ装置用の給電制御回路、レーザ装置用の給電制御回路の調整方法
US8369373B2 (en) * 2009-10-13 2013-02-05 Coherent, Inc. Pre-ionization method for CO2 gas-discharge laser

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JP2013089788A (ja) 2013-05-13

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