JP5719648B2 - エッチング方法、およびエッチング装置 - Google Patents
エッチング方法、およびエッチング装置 Download PDFInfo
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- JP5719648B2 JP5719648B2 JP2011055516A JP2011055516A JP5719648B2 JP 5719648 B2 JP5719648 B2 JP 5719648B2 JP 2011055516 A JP2011055516 A JP 2011055516A JP 2011055516 A JP2011055516 A JP 2011055516A JP 5719648 B2 JP5719648 B2 JP 5719648B2
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- 238000005530 etching Methods 0.000 title claims description 149
- 238000000034 method Methods 0.000 title claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 53
- 229910052710 silicon Inorganic materials 0.000 claims description 53
- 239000010703 silicon Substances 0.000 claims description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 52
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 51
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 25
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 18
- 238000007599 discharging Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 84
- 239000004065 semiconductor Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 6
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 5
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- -1 hydrogen trifluoride Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Semiconductor Memories (AREA)
Description
Ar 流量:300sccm
N2 流量:200sccm
処 理 圧 力:5.32Pa(0.04Torr)
上部電極と下部電極とのギャップ:35mm
上部電極電力:2400W
下部電極電力:1000W
図3Aに示すように、レジスト(PR)膜6のエッチングレートは、−15.3nm/minであった。これは、レジスト膜6上に堆積物が堆積されて膜厚が増していることを示している。
Ar 流量:200sccm
N2 流量:200sccm
処 理 圧 力:6.65Pa(0.05Torr)
上部電極と下部電極とのギャップ:35mm
上部電極電力: 500W
下部電極電力: 500W
図4Aに示すように、レジスト(PR)膜6のエッチングレートは、−1.4nm/minであった。これは、図3Aに示す結果よりも小さい値となっているが、レジスト膜6上に堆積物が堆積されて膜厚が増していることを示している。
Claims (7)
- シリコン酸化物膜、及びこのシリコン酸化物膜上に形成されたシリコン膜を含む多層構造体をエッチングするエッチング方法であって、
レジスト膜又は有機膜が形成された前記多層構造体を含む基板を、エッチング装置の処理室内に搬入し、
前記基板を搬入した後、前記処理室内に、CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスを供給し、
前記レジスト膜又は有機膜をエッチングのマスクに用いつつ、前記CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスをエッチングガスとして、前記シリコン膜及び前記シリコン酸化物膜を含む前記多層構造体を、この多層構造体の下地に達するまで一括してエッチングすることを特徴とするエッチング方法。 - シリコン酸化物膜、このシリコン酸化物膜上に形成されたシリコン膜、及びこのシリコン膜上に形成されたシリコン窒化物膜を含む多層構造体をエッチングするエッチング方法であって、
レジスト膜又は有機膜が形成された前記多層構造体を含む基板を、エッチング装置の処理室内に搬入し、
前記基板を搬入した後、前記処理室内に、CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスを供給し、
前記レジスト膜又は有機膜をエッチングのマスクに用いつつ、前記CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスをエッチングガスとして、前記シリコン窒化物膜、前記シリコン膜及び前記シリコン酸化物膜を含む前記多層構造体を、この多層構造体の下地に達するまで一括してエッチングすることを特徴とするエッチング方法。 - 第1のシリコン酸化物膜、この第1のシリコン酸化物膜上に形成されたシリコン膜、このシリコン膜上に形成されたシリコン窒化物膜、及びこのシリコン窒化物膜上に形成された第2のシリコン酸化物膜を含む多層構造体をエッチングするエッチング方法であって、
レジスト膜又は有機膜が形成された前記多層構造体を含む基板を、エッチング装置の処理室内に搬入し、
前記基板を搬入した後、前記処理室内に、CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスを供給し、
前記レジスト膜又は有機膜をエッチングのマスクに用いつつ、前記CH 2 F 2 ガスにN 2 ガス及びArガスを混合させたガスをエッチングガスとして、前記第2のシリコン酸化物膜、前記シリコン窒化物膜、前記シリコン膜及び前記第1のシリコン酸化物膜を含む前記多層構造体を、この多層構造体の下地に達するまで一括してエッチングすることを特徴とするエッチング方法。 - 前記多層構造体をエッチングするとき、前記処理室内にプラズマを発生させることを特徴とする請求項1から請求項3のいずれか一項に記載のエッチング方法。
- 前記処理室内には、下部電極を構成する載置台と、この載置台に対向して配置され、上部電極を構成するガス吐出部とが配置され、
前記レジスト膜又は有機膜が形成された前記多層構造体を含む基板を、エッチング装置の処理室内に搬入し、前記処理室内に配置された前記載置台に載置し、
前記エッチングガスを前記ガス吐出部から吐出させ、前記上部電極と前記下部電極との間に電界を印加して、前記多層構造体を、この多層構造体の下地に達するまで一括してエッチングすることを特徴とする請求項4に記載のエッチング方法。 - 前記多層構造体に含まれた前記シリコン膜をエッチングするとき、前記上部電極に印加する電力を、前記下部電極に印加する電力よりも大きくし、
前記多層構造体に含まれた前記シリコン酸化物膜、又は前記シリコン窒化物膜をエッチングするとき、前記上部電極に印加する電力と前記下部電極に印加する電力とを、等しくすることを特徴とする請求項5に記載のエッチング方法。 - 請求項1から請求項3のいずれか一項に記載の多層構造体をエッチングするエッチング装置であって、
処理室と、
前記処理室にエッチングガスを供給するガス供給源と、
前記処理室内に配置され、前記基板を載置する載置台と、
前記処理室内に前記載置台に対向して配置され、前記処理室に前記エッチングガスを吐出するガス吐出部と、
前記載置台に接続された第1の高周波電源と、
前記ガス吐出部に接続された第2の高周波電源と、
前記エッチング装置を制御するコントローラと、を備え、
前記コントローラは、請求項1から請求項6のいずれか一項に記載されたエッチング方法が実行されるように、前記エッチング装置を制御することを特徴とするエッチング装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2011055516A JP5719648B2 (ja) | 2011-03-14 | 2011-03-14 | エッチング方法、およびエッチング装置 |
TW101107000A TWI533373B (zh) | 2011-03-14 | 2012-03-02 | 蝕刻方法、蝕刻裝置及電腦可讀取之記憶媒體 |
KR1020120024941A KR101909107B1 (ko) | 2011-03-14 | 2012-03-12 | 에칭 방법, 에칭 장치 및 컴퓨터 판독 가능한 기억 매체 |
CN201210067556.3A CN102683196B (zh) | 2011-03-14 | 2012-03-14 | 蚀刻方法、蚀刻装置及计算机可读存储介质 |
US13/419,547 US8709952B2 (en) | 2011-03-14 | 2012-03-14 | Etching method, etching apparatus, and computer-readable recording medium |
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JP2011055516A JP5719648B2 (ja) | 2011-03-14 | 2011-03-14 | エッチング方法、およびエッチング装置 |
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JP2012191128A JP2012191128A (ja) | 2012-10-04 |
JP5719648B2 true JP5719648B2 (ja) | 2015-05-20 |
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US (1) | US8709952B2 (ja) |
JP (1) | JP5719648B2 (ja) |
KR (1) | KR101909107B1 (ja) |
CN (1) | CN102683196B (ja) |
TW (1) | TWI533373B (ja) |
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JP6328524B2 (ja) * | 2014-08-29 | 2018-05-23 | 東京エレクトロン株式会社 | エッチング方法 |
JP6498022B2 (ja) * | 2015-04-22 | 2019-04-10 | 東京エレクトロン株式会社 | エッチング処理方法 |
JP7075537B2 (ja) * | 2020-02-10 | 2022-05-25 | 株式会社日立ハイテク | プラズマ処理方法 |
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JPS60115232A (ja) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | ドライエッチング用ガス |
US5880036A (en) * | 1992-06-15 | 1999-03-09 | Micron Technology, Inc. | Method for enhancing oxide to nitride selectivity through the use of independent heat control |
JPH07135198A (ja) * | 1993-11-10 | 1995-05-23 | Sony Corp | エッチング方法 |
US6369423B2 (en) * | 1998-03-03 | 2002-04-09 | Kabushiki Kaisha Toshiba | Semiconductor device with a thin gate stack having a plurality of insulating layers |
US6300251B1 (en) * | 2000-02-10 | 2001-10-09 | Chartered Semiconductor Manufacturing Ltd. | Repeatable end point method for anisotropic etch of inorganic buried anti-reflective coating layer over silicon |
JP2002110644A (ja) * | 2000-09-28 | 2002-04-12 | Nec Corp | エッチング方法 |
JP2002222797A (ja) * | 2001-01-24 | 2002-08-09 | Tokyo Electron Ltd | 窒化膜のエッチング方法およびデュアルダマシンプロセス |
CN1204606C (zh) * | 2001-12-04 | 2005-06-01 | 联华电子股份有限公司 | 形成具有高深宽比的沟槽的蚀刻方法 |
US20040087153A1 (en) * | 2002-10-31 | 2004-05-06 | Yan Du | Method of etching a silicon-containing dielectric material |
US7682985B2 (en) * | 2004-03-17 | 2010-03-23 | Lam Research Corporation | Dual doped polysilicon and silicon germanium etch |
US7794617B2 (en) * | 2006-03-23 | 2010-09-14 | Tokyo Electron Limited | Plasma etching method, plasma processing apparatus, control program and computer readable storage medium |
JP4877747B2 (ja) * | 2006-03-23 | 2012-02-15 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
CN101599419B (zh) * | 2008-06-03 | 2011-10-05 | 中芯国际集成电路制造(北京)有限公司 | 沟槽的形成方法 |
JP2010245101A (ja) | 2009-04-01 | 2010-10-28 | Hitachi High-Technologies Corp | ドライエッチング方法 |
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- 2012-03-14 US US13/419,547 patent/US8709952B2/en active Active
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US20120238100A1 (en) | 2012-09-20 |
KR101909107B1 (ko) | 2018-10-17 |
CN102683196A (zh) | 2012-09-19 |
US8709952B2 (en) | 2014-04-29 |
KR20120104945A (ko) | 2012-09-24 |
TW201250826A (en) | 2012-12-16 |
JP2012191128A (ja) | 2012-10-04 |
CN102683196B (zh) | 2015-07-01 |
TWI533373B (zh) | 2016-05-11 |
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