JP5718907B2 - 軸方向力均衡手段を有する再生式真空ポンプ - Google Patents
軸方向力均衡手段を有する再生式真空ポンプ Download PDFInfo
- Publication number
- JP5718907B2 JP5718907B2 JP2012511349A JP2012511349A JP5718907B2 JP 5718907 B2 JP5718907 B2 JP 5718907B2 JP 2012511349 A JP2012511349 A JP 2012511349A JP 2012511349 A JP2012511349 A JP 2012511349A JP 5718907 B2 JP5718907 B2 JP 5718907B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- gas
- stator
- pump
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/051—Axial thrust balancing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/051—Axial thrust balancing
- F04D29/0513—Axial thrust balancing hydrostatic; hydrodynamic thrust bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D5/00—Pumps with circumferential or transverse flow
- F04D5/002—Regenerative pumps
- F04D5/003—Regenerative pumps of multistage type
- F04D5/005—Regenerative pumps of multistage type the stages being radially offset
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D5/00—Pumps with circumferential or transverse flow
- F04D5/002—Regenerative pumps
- F04D5/003—Regenerative pumps of multistage type
- F04D5/006—Regenerative pumps of multistage type the stages being axially offset
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D5/00—Pumps with circumferential or transverse flow
- F04D5/002—Regenerative pumps
- F04D5/008—Details of the stator, e.g. channel shape
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
Claims (6)
- 再生式ポンプ輸送機構体を有する真空ポンプであって、
全体として円板状の形態を有し、真空ポンプのステータに対して回転可能に軸方向シャフトに取り付け可能なロータを備え、前記ロータは、反対側の平坦な第1及び第2の表面を有し、各ロータ表面は、同心円状に配置された、複数列の異形凹部を有し、
真空ポンプは、さらに、
平坦な第1及び第2のステータ表面を有し、各ステータ表面は、ロータの対応する同心円に対向し、かつ整列する複数のチャネルを有し、ロータの各側に、ロータの各側においてポンプ機構体の入口から出口まで同一の径方向に気体をポンプ輸送するための複数のポンプ段を形成し、
ロータの各側の少なくとも排出ポンプ段を互いに連結し、少なくとも排出ポンプ段内の圧力を均衡化するためにガスを通過させる導管を備える、真空ポンプ。 - 前記導管は、前記ロータを貫通している、請求項1記載の真空ポンプ。
- 前記ロータは、ステータ内に設けられている、請求項1記載の真空ポンプ。
- ロータの各側にある、整合したポンプ段を相互に連結する導管を備え、整合したポンプ段内の圧力を均衡化するためにガスを通過させる、請求項1乃至3の何れか1項に記載の真空ポンプ。
- 前記導管又は各導管は、前記ポンプ段の前記複数の部分を互いに連結するよう構成された複数本の別々の気体通路を有する、請求項1〜4のうちいずれか一に記載の真空ポンプ。
- 前記ポンプ段の間からの気体の漏れを減少させるために、少なくとも1つの気体シールが前記ロータと前記ステータとの間に形成され、前記気体シールは、向かい合った前記ステータ表面及び前記ロータ表面の平坦部分から成る、請求項5記載の真空ポンプ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0908664.6 | 2009-05-20 | ||
GB0908665A GB0908665D0 (en) | 2009-05-20 | 2009-05-20 | A pump |
GB0908665.3 | 2009-05-20 | ||
GB0908664A GB0908664D0 (en) | 2009-05-20 | 2009-05-20 | A pump |
PCT/GB2010/050803 WO2010133868A1 (en) | 2009-05-20 | 2010-05-18 | Regenerative vacuum pump with axial thrust balancing means |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012527570A JP2012527570A (ja) | 2012-11-08 |
JP5718907B2 true JP5718907B2 (ja) | 2015-05-13 |
Family
ID=42492948
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012511348A Expired - Fee Related JP5718906B2 (ja) | 2009-05-20 | 2010-05-18 | 並行して圧送する対称なロータディスクを備えたサイドチャネル型ポンプ |
JP2012511349A Expired - Fee Related JP5718907B2 (ja) | 2009-05-20 | 2010-05-18 | 軸方向力均衡手段を有する再生式真空ポンプ |
JP2012511347A Expired - Fee Related JP5775513B2 (ja) | 2009-05-20 | 2010-05-18 | 軸方向気体ベアリングを備えたサイドチャネル型ポンプ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012511348A Expired - Fee Related JP5718906B2 (ja) | 2009-05-20 | 2010-05-18 | 並行して圧送する対称なロータディスクを備えたサイドチャネル型ポンプ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012511347A Expired - Fee Related JP5775513B2 (ja) | 2009-05-20 | 2010-05-18 | 軸方向気体ベアリングを備えたサイドチャネル型ポンプ |
Country Status (6)
Country | Link |
---|---|
US (3) | US9127685B2 (ja) |
EP (3) | EP2433012B1 (ja) |
JP (3) | JP5718906B2 (ja) |
CN (3) | CN102428281A (ja) |
TW (3) | TW201109531A (ja) |
WO (3) | WO2010133866A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5718906B2 (ja) | 2009-05-20 | 2015-05-13 | エドワーズ リミテッド | 並行して圧送する対称なロータディスクを備えたサイドチャネル型ポンプ |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
DE102012023347B3 (de) * | 2012-11-29 | 2014-01-30 | Tni Medical Ag | Kleiner, geräuscharmer Seitenkanalverdichter, insbesondere für Geräte in der Beatmungstherapie |
WO2014125238A1 (en) | 2013-02-15 | 2014-08-21 | Edwards Limited | Vacuum pump |
US9695835B2 (en) | 2013-08-08 | 2017-07-04 | Woodward, Inc. | Side channel liquid ring pump and impeller for side channel liquid ring pump |
WO2019204833A1 (en) * | 2018-04-20 | 2019-10-24 | Victori, Llc | Regenerative blowers-compressors with shaft bypass fluid re-vents |
EP3795836A1 (de) * | 2019-09-18 | 2021-03-24 | Levitronix GmbH | Zentrifugalpumpe und pumpengehäuse |
EP4085520A4 (en) * | 2020-01-03 | 2024-02-28 | C-Motive Technologies Inc. | ELECTROSTATIC MOTOR |
CN113982985B (zh) * | 2021-11-17 | 2024-05-17 | 东南大学 | 一种车载燃料电池用空气压缩机的微气道轴承 |
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-
2010
- 2010-05-18 JP JP2012511348A patent/JP5718906B2/ja not_active Expired - Fee Related
- 2010-05-18 EP EP10720667.4A patent/EP2433012B1/en not_active Not-in-force
- 2010-05-18 US US13/318,977 patent/US9127685B2/en not_active Expired - Fee Related
- 2010-05-18 JP JP2012511349A patent/JP5718907B2/ja not_active Expired - Fee Related
- 2010-05-18 WO PCT/GB2010/050801 patent/WO2010133866A1/en active Application Filing
- 2010-05-18 WO PCT/GB2010/050802 patent/WO2010133867A1/en active Application Filing
- 2010-05-18 US US13/318,974 patent/US9334873B2/en active Active
- 2010-05-18 WO PCT/GB2010/050803 patent/WO2010133868A1/en active Application Filing
- 2010-05-18 CN CN2010800218849A patent/CN102428281A/zh active Pending
- 2010-05-18 EP EP10720668A patent/EP2433009A1/en not_active Withdrawn
- 2010-05-18 CN CN2010800218872A patent/CN102428280A/zh active Pending
- 2010-05-18 JP JP2012511347A patent/JP5775513B2/ja not_active Expired - Fee Related
- 2010-05-18 CN CN2010800218980A patent/CN102428279A/zh active Pending
- 2010-05-18 US US13/318,966 patent/US9086071B2/en not_active Expired - Fee Related
- 2010-05-18 EP EP10720669A patent/EP2433011A1/en not_active Withdrawn
- 2010-05-20 TW TW099116192A patent/TW201109531A/zh unknown
- 2010-05-20 TW TW099116196A patent/TW201111638A/zh unknown
- 2010-05-20 TW TW099116184A patent/TW201111637A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN102428280A (zh) | 2012-04-25 |
WO2010133866A1 (en) | 2010-11-25 |
TW201111638A (en) | 2011-04-01 |
EP2433012B1 (en) | 2015-11-04 |
US20120057995A1 (en) | 2012-03-08 |
EP2433009A1 (en) | 2012-03-28 |
CN102428281A (zh) | 2012-04-25 |
JP2012527570A (ja) | 2012-11-08 |
CN102428279A (zh) | 2012-04-25 |
TW201111637A (en) | 2011-04-01 |
JP5775513B2 (ja) | 2015-09-09 |
US9086071B2 (en) | 2015-07-21 |
US20120051887A1 (en) | 2012-03-01 |
TW201109531A (en) | 2011-03-16 |
JP2012527568A (ja) | 2012-11-08 |
US9334873B2 (en) | 2016-05-10 |
WO2010133868A1 (en) | 2010-11-25 |
US9127685B2 (en) | 2015-09-08 |
JP5718906B2 (ja) | 2015-05-13 |
EP2433012A1 (en) | 2012-03-28 |
JP2012527569A (ja) | 2012-11-08 |
EP2433011A1 (en) | 2012-03-28 |
US20120051893A1 (en) | 2012-03-01 |
WO2010133867A1 (en) | 2010-11-25 |
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