JP5715898B2 - 基板収納容器 - Google Patents

基板収納容器 Download PDF

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Publication number
JP5715898B2
JP5715898B2 JP2011150284A JP2011150284A JP5715898B2 JP 5715898 B2 JP5715898 B2 JP 5715898B2 JP 2011150284 A JP2011150284 A JP 2011150284A JP 2011150284 A JP2011150284 A JP 2011150284A JP 5715898 B2 JP5715898 B2 JP 5715898B2
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JP
Japan
Prior art keywords
locking
lid
cam
locking bar
cam surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011150284A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013016743A5 (https=
JP2013016743A (ja
Inventor
剛 永島
剛 永島
井上　修一
修一 井上
貴立 小山
貴立 小山
千明 松鳥
千明 松鳥
和正 大貫
和正 大貫
啓之 志田
啓之 志田
裕樹 山岸
裕樹 山岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Miraial Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Miraial Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP2011150284A priority Critical patent/JP5715898B2/ja
Priority to PCT/JP2012/066989 priority patent/WO2013005740A1/ja
Priority to KR1020137034467A priority patent/KR101594235B1/ko
Priority to US14/131,120 priority patent/US9387960B2/en
Priority to TW101124268A priority patent/TWI599526B/zh
Publication of JP2013016743A publication Critical patent/JP2013016743A/ja
Publication of JP2013016743A5 publication Critical patent/JP2013016743A5/ja
Application granted granted Critical
Publication of JP5715898B2 publication Critical patent/JP5715898B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Closures For Containers (AREA)
JP2011150284A 2011-07-06 2011-07-06 基板収納容器 Active JP5715898B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011150284A JP5715898B2 (ja) 2011-07-06 2011-07-06 基板収納容器
PCT/JP2012/066989 WO2013005740A1 (ja) 2011-07-06 2012-07-03 基板収納容器
KR1020137034467A KR101594235B1 (ko) 2011-07-06 2012-07-03 기판 수납 용기
US14/131,120 US9387960B2 (en) 2011-07-06 2012-07-03 Substrate storing container
TW101124268A TWI599526B (zh) 2011-07-06 2012-07-05 Substrate storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011150284A JP5715898B2 (ja) 2011-07-06 2011-07-06 基板収納容器

Publications (3)

Publication Number Publication Date
JP2013016743A JP2013016743A (ja) 2013-01-24
JP2013016743A5 JP2013016743A5 (https=) 2014-11-06
JP5715898B2 true JP5715898B2 (ja) 2015-05-13

Family

ID=47437088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011150284A Active JP5715898B2 (ja) 2011-07-06 2011-07-06 基板収納容器

Country Status (5)

Country Link
US (1) US9387960B2 (https=)
JP (1) JP5715898B2 (https=)
KR (1) KR101594235B1 (https=)
TW (1) TWI599526B (https=)
WO (1) WO2013005740A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170003851U (ko) * 2016-05-02 2017-11-10 청 킹 엔터프라이즈 컴퍼니 리미티드 래치기구 및 이를 구비한 웨이퍼 카세트

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6067123B2 (ja) * 2013-08-22 2017-01-25 ミライアル株式会社 基板収納容器
WO2015033411A1 (ja) * 2013-09-04 2015-03-12 ミライアル株式会社 基板収納容器
JP6067129B2 (ja) * 2013-09-11 2017-01-25 ミライアル株式会社 基板収納容器
JP6326330B2 (ja) * 2014-09-05 2018-05-16 株式会社Ｓｃｒｅｅｎホールディングス 基板収納容器、ロードポート装置および基板処理装置
WO2016046985A1 (ja) * 2014-09-26 2016-03-31 ミライアル株式会社 基板収納容器
US10559484B2 (en) * 2015-04-10 2020-02-11 Shin-Etsu Polymer Co., Ltd. Substrate storage container
WO2017058497A1 (en) * 2015-10-01 2017-04-06 Entegris, Inc. Substrate container with improved substrate retainer and door latch assist mechanism
JP6591297B2 (ja) * 2016-01-20 2019-10-16 信越ポリマー株式会社 基板収納容器
CN107323990B (zh) * 2017-08-28 2019-08-13 大连佳峰自动化股份有限公司 一种晶元盒运输车及其晶圆盒自动定位机构
US11948821B2 (en) * 2018-04-25 2024-04-02 Miraial Co., Ltd. Substrate storing container
JP6653788B1 (ja) * 2018-06-12 2020-02-26 ミライアル株式会社 基板収納容器
KR102253060B1 (ko) 2019-05-07 2021-05-18 한국기계연구원 태양전지용 기능성 커버
TWI760258B (zh) * 2020-08-12 2022-04-01 大立鈺科技有限公司 可伸縮收納機構以及可供該可伸縮收納機構容置的收納盒
KR102873446B1 (ko) 2021-03-17 2025-10-20 진가오 솔라 컴퍼니 리미티드 태양 전지 패널
WO2023017591A1 (ja) * 2021-08-11 2023-02-16 ミライアル株式会社 基板収納容器
JP7634453B2 (ja) * 2021-09-16 2025-02-21 信越ポリマー株式会社 基板収納容器
TWI832599B (zh) * 2022-07-27 2024-02-11 家登精密工業股份有限公司 上開式載板載具
KR102841032B1 (ko) * 2023-12-14 2025-07-31 (주)상아프론테크 고정의 편의성이 개선되는 웨이퍼 저장 장치

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8503232A (nl) * 1984-12-11 1986-07-01 Microtechnic Sa Vergrendelingssysteem voor een verpakking.
US4995430A (en) 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
JP3180600B2 (ja) 1995-01-09 2001-06-25 神鋼電機株式会社 密閉コンテナ
US5957292A (en) * 1997-08-01 1999-09-28 Fluoroware, Inc. Wafer enclosure with door
US7048127B2 (en) * 2001-07-23 2006-05-23 Kakizaki Manufacturing Co., Ltd. Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism
JP4115115B2 (ja) 2001-10-29 2008-07-09 信越ポリマー株式会社 基板収納容器の蓋体係止機構
US6955382B2 (en) 2002-01-15 2005-10-18 Entegris, Inc. Wafer carrier door and latching mechanism with c-shaped cam follower
TWI239931B (en) * 2003-05-19 2005-09-21 Miraial Co Ltd Lid unit for thin plate supporting container and thin plate supporting container
JP4716671B2 (ja) 2003-05-19 2011-07-06 ミライアル株式会社 薄板支持容器用蓋体
US7624861B2 (en) * 2004-10-14 2009-12-01 Autotronic Plastics, Inc. Benefit denial system for securing an asset within a container and method of use
JP4540529B2 (ja) * 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP4647417B2 (ja) 2005-07-08 2011-03-09 信越ポリマー株式会社 基板収納容器の蓋体開閉方法
JP4739033B2 (ja) * 2006-01-20 2011-08-03 信越ポリマー株式会社 収納容器の蓋体及び収納容器
JP4841383B2 (ja) * 2006-10-06 2011-12-21 信越ポリマー株式会社 蓋体及び基板収納容器
JP4880646B2 (ja) * 2008-06-30 2012-02-22 信越ポリマー株式会社 基板収納容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170003851U (ko) * 2016-05-02 2017-11-10 청 킹 엔터프라이즈 컴퍼니 리미티드 래치기구 및 이를 구비한 웨이퍼 카세트

Also Published As

Publication number Publication date
KR20140041591A (ko) 2014-04-04
US20140138279A1 (en) 2014-05-22
US9387960B2 (en) 2016-07-12
WO2013005740A1 (ja) 2013-01-10
TWI599526B (zh) 2017-09-21
TW201328947A (zh) 2013-07-16
KR101594235B1 (ko) 2016-02-15
JP2013016743A (ja) 2013-01-24

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