KR101594235B1 - 기판 수납 용기 - Google Patents

기판 수납 용기 Download PDF

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Publication number
KR101594235B1
KR101594235B1 KR1020137034467A KR20137034467A KR101594235B1 KR 101594235 B1 KR101594235 B1 KR 101594235B1 KR 1020137034467 A KR1020137034467 A KR 1020137034467A KR 20137034467 A KR20137034467 A KR 20137034467A KR 101594235 B1 KR101594235 B1 KR 101594235B1
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KR
South Korea
Prior art keywords
lid
bar
cam
correcting
rotating operation
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KR1020137034467A
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English (en)
Korean (ko)
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KR20140041591A (ko
Inventor
즈요시 나가시마
슈이치 이노우에
다카하루 오야마
지아키 마츠토리
가즈마사 오누키
히로유키 시다
히로키 야마기시
Original Assignee
미라이얼 가부시키가이샤
신에츠 폴리머 가부시키가이샤
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Application filed by 미라이얼 가부시키가이샤, 신에츠 폴리머 가부시키가이샤 filed Critical 미라이얼 가부시키가이샤
Publication of KR20140041591A publication Critical patent/KR20140041591A/ko
Application granted granted Critical
Publication of KR101594235B1 publication Critical patent/KR101594235B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Closures For Containers (AREA)
KR1020137034467A 2011-07-06 2012-07-03 기판 수납 용기 Active KR101594235B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011150284A JP5715898B2 (ja) 2011-07-06 2011-07-06 基板収納容器
JPJP-P-2011-150284 2011-07-06
PCT/JP2012/066989 WO2013005740A1 (ja) 2011-07-06 2012-07-03 基板収納容器

Publications (2)

Publication Number Publication Date
KR20140041591A KR20140041591A (ko) 2014-04-04
KR101594235B1 true KR101594235B1 (ko) 2016-02-15

Family

ID=47437088

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137034467A Active KR101594235B1 (ko) 2011-07-06 2012-07-03 기판 수납 용기

Country Status (5)

Country Link
US (1) US9387960B2 (https=)
JP (1) JP5715898B2 (https=)
KR (1) KR101594235B1 (https=)
TW (1) TWI599526B (https=)
WO (1) WO2013005740A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250092031A (ko) * 2023-12-14 2025-06-23 (주)상아프론테크 밀폐의 안정성이 개선되는 웨이퍼 저장 장치

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6067123B2 (ja) * 2013-08-22 2017-01-25 ミライアル株式会社 基板収納容器
WO2015033411A1 (ja) * 2013-09-04 2015-03-12 ミライアル株式会社 基板収納容器
JP6067129B2 (ja) * 2013-09-11 2017-01-25 ミライアル株式会社 基板収納容器
JP6326330B2 (ja) * 2014-09-05 2018-05-16 株式会社Ｓｃｒｅｅｎホールディングス 基板収納容器、ロードポート装置および基板処理装置
WO2016046985A1 (ja) * 2014-09-26 2016-03-31 ミライアル株式会社 基板収納容器
US10559484B2 (en) * 2015-04-10 2020-02-11 Shin-Etsu Polymer Co., Ltd. Substrate storage container
WO2017058497A1 (en) * 2015-10-01 2017-04-06 Entegris, Inc. Substrate container with improved substrate retainer and door latch assist mechanism
JP6591297B2 (ja) * 2016-01-20 2019-10-16 信越ポリマー株式会社 基板収納容器
TWM528296U (zh) * 2016-05-02 2016-09-11 中勤實業股份有限公司 閂鎖機構及具有該閂鎖機構的晶圓盒
CN107323990B (zh) * 2017-08-28 2019-08-13 大连佳峰自动化股份有限公司 一种晶元盒运输车及其晶圆盒自动定位机构
US11948821B2 (en) * 2018-04-25 2024-04-02 Miraial Co., Ltd. Substrate storing container
JP6653788B1 (ja) * 2018-06-12 2020-02-26 ミライアル株式会社 基板収納容器
KR102253060B1 (ko) 2019-05-07 2021-05-18 한국기계연구원 태양전지용 기능성 커버
TWI760258B (zh) * 2020-08-12 2022-04-01 大立鈺科技有限公司 可伸縮收納機構以及可供該可伸縮收納機構容置的收納盒
KR102873446B1 (ko) 2021-03-17 2025-10-20 진가오 솔라 컴퍼니 리미티드 태양 전지 패널
WO2023017591A1 (ja) * 2021-08-11 2023-02-16 ミライアル株式会社 基板収納容器
JP7634453B2 (ja) * 2021-09-16 2025-02-21 信越ポリマー株式会社 基板収納容器
TWI832599B (zh) * 2022-07-27 2024-02-11 家登精密工業股份有限公司 上開式載板載具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957292A (en) 1997-08-01 1999-09-28 Fluoroware, Inc. Wafer enclosure with door
JP2008098236A (ja) 2006-10-06 2008-04-24 Shin Etsu Polymer Co Ltd 蓋体及び基板収納容器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
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NL8503232A (nl) * 1984-12-11 1986-07-01 Microtechnic Sa Vergrendelingssysteem voor een verpakking.
US4995430A (en) 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
JP3180600B2 (ja) 1995-01-09 2001-06-25 神鋼電機株式会社 密閉コンテナ
US7048127B2 (en) * 2001-07-23 2006-05-23 Kakizaki Manufacturing Co., Ltd. Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism
JP4115115B2 (ja) 2001-10-29 2008-07-09 信越ポリマー株式会社 基板収納容器の蓋体係止機構
US6955382B2 (en) 2002-01-15 2005-10-18 Entegris, Inc. Wafer carrier door and latching mechanism with c-shaped cam follower
TWI239931B (en) * 2003-05-19 2005-09-21 Miraial Co Ltd Lid unit for thin plate supporting container and thin plate supporting container
JP4716671B2 (ja) 2003-05-19 2011-07-06 ミライアル株式会社 薄板支持容器用蓋体
US7624861B2 (en) * 2004-10-14 2009-12-01 Autotronic Plastics, Inc. Benefit denial system for securing an asset within a container and method of use
JP4540529B2 (ja) * 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP4647417B2 (ja) 2005-07-08 2011-03-09 信越ポリマー株式会社 基板収納容器の蓋体開閉方法
JP4739033B2 (ja) * 2006-01-20 2011-08-03 信越ポリマー株式会社 収納容器の蓋体及び収納容器
JP4880646B2 (ja) * 2008-06-30 2012-02-22 信越ポリマー株式会社 基板収納容器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957292A (en) 1997-08-01 1999-09-28 Fluoroware, Inc. Wafer enclosure with door
JP2008098236A (ja) 2006-10-06 2008-04-24 Shin Etsu Polymer Co Ltd 蓋体及び基板収納容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250092031A (ko) * 2023-12-14 2025-06-23 (주)상아프론테크 밀폐의 안정성이 개선되는 웨이퍼 저장 장치
KR102847043B1 (ko) 2023-12-14 2025-08-18 (주)상아프론테크 밀폐의 안정성이 개선되는 웨이퍼 저장 장치

Also Published As

Publication number Publication date
JP5715898B2 (ja) 2015-05-13
KR20140041591A (ko) 2014-04-04
US20140138279A1 (en) 2014-05-22
US9387960B2 (en) 2016-07-12
WO2013005740A1 (ja) 2013-01-10
TWI599526B (zh) 2017-09-21
TW201328947A (zh) 2013-07-16
JP2013016743A (ja) 2013-01-24

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