JP5711913B2 - ディスク型ｍｅｍｓ振動子 - Google Patents

ディスク型ｍｅｍｓ振動子 Download PDF

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Publication number
JP5711913B2
JP5711913B2 JP2010179495A JP2010179495A JP5711913B2 JP 5711913 B2 JP5711913 B2 JP 5711913B2 JP 2010179495 A JP2010179495 A JP 2010179495A JP 2010179495 A JP2010179495 A JP 2010179495A JP 5711913 B2 JP5711913 B2 JP 5711913B2
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JP
Japan
Prior art keywords
disk
vibrator
hole
type
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010179495A
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English (en)
Japanese (ja)
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JP2012039507A (ja
JP2012039507A5 (enExample
Inventor
藤 健 史 齊
藤 健 史 齊
村 悟 利 木
村 悟 利 木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2010179495A priority Critical patent/JP5711913B2/ja
Priority to PCT/JP2011/063991 priority patent/WO2012020601A1/ja
Priority to US13/814,738 priority patent/US20130134837A1/en
Publication of JP2012039507A publication Critical patent/JP2012039507A/ja
Publication of JP2012039507A5 publication Critical patent/JP2012039507A5/ja
Application granted granted Critical
Publication of JP5711913B2 publication Critical patent/JP5711913B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0271—Resonators; ultrasonic resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010179495A 2010-08-10 2010-08-10 ディスク型ｍｅｍｓ振動子 Expired - Fee Related JP5711913B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010179495A JP5711913B2 (ja) 2010-08-10 2010-08-10 ディスク型ｍｅｍｓ振動子
PCT/JP2011/063991 WO2012020601A1 (ja) 2010-08-10 2011-06-13 ディスク型ｍｅｍｓ振動子
US13/814,738 US20130134837A1 (en) 2010-08-10 2011-06-13 Disk type mems resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010179495A JP5711913B2 (ja) 2010-08-10 2010-08-10 ディスク型ｍｅｍｓ振動子

Publications (3)

Publication Number Publication Date
JP2012039507A JP2012039507A (ja) 2012-02-23
JP2012039507A5 JP2012039507A5 (enExample) 2013-03-28
JP5711913B2 true JP5711913B2 (ja) 2015-05-07

Family

ID=45567571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010179495A Expired - Fee Related JP5711913B2 (ja) 2010-08-10 2010-08-10 ディスク型ｍｅｍｓ振動子

Country Status (3)

Country Link
US (1) US20130134837A1 (enExample)
JP (1) JP5711913B2 (enExample)
WO (1) WO2012020601A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103839826B (zh) * 2014-02-24 2017-01-18 京东方科技集团股份有限公司 一种低温多晶硅薄膜晶体管、阵列基板及其制作方法
CN103964369B (zh) * 2014-04-15 2016-04-20 杭州电子科技大学 电极横向可动的微机械圆盘谐振器
US11664781B2 (en) 2014-07-02 2023-05-30 Stathera Ip Holdings Inc. Methods and devices for microelectromechanical resonators
JP6370832B2 (ja) * 2016-05-06 2018-08-08 矢崎総業株式会社 電圧センサ
US9813831B1 (en) 2016-11-29 2017-11-07 Cirrus Logic, Inc. Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure
US9900707B1 (en) * 2016-11-29 2018-02-20 Cirrus Logic, Inc. Biasing of electromechanical systems microphone with alternating-current voltage waveform

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
FR2872501B1 (fr) * 2004-07-01 2006-11-03 Commissariat Energie Atomique Microresonateur composite a forte deformation
US7551043B2 (en) * 2005-08-29 2009-06-23 The Regents Of The University Of Michigan Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same
JP4857744B2 (ja) * 2005-12-06 2012-01-18 セイコーエプソン株式会社 Ｍｅｍｓ振動子の製造方法

Also Published As

Publication number Publication date
WO2012020601A1 (ja) 2012-02-16
JP2012039507A (ja) 2012-02-23
US20130134837A1 (en) 2013-05-30

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