JP5695292B2 - センサデバイス - Google Patents

センサデバイス Download PDF

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Publication number
JP5695292B2
JP5695292B2 JP2008320185A JP2008320185A JP5695292B2 JP 5695292 B2 JP5695292 B2 JP 5695292B2 JP 2008320185 A JP2008320185 A JP 2008320185A JP 2008320185 A JP2008320185 A JP 2008320185A JP 5695292 B2 JP5695292 B2 JP 5695292B2
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JP
Japan
Prior art keywords
mounting
sensor device
sensor
terminal
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008320185A
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English (en)
Japanese (ja)
Other versions
JP2010145137A (ja
JP2010145137A5 (enExample
Inventor
雅敬 松永
雅敬 松永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2008320185A priority Critical patent/JP5695292B2/ja
Priority to US12/637,792 priority patent/US8256288B2/en
Priority to CN2012103287521A priority patent/CN102865863A/zh
Priority to CN2009102540785A priority patent/CN101750056B/zh
Publication of JP2010145137A publication Critical patent/JP2010145137A/ja
Publication of JP2010145137A5 publication Critical patent/JP2010145137A5/ja
Priority to US13/427,076 priority patent/US8701485B2/en
Priority to US13/572,898 priority patent/US8544323B2/en
Application granted granted Critical
Publication of JP5695292B2 publication Critical patent/JP5695292B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008320185A 2008-12-16 2008-12-16 センサデバイス Expired - Fee Related JP5695292B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2008320185A JP5695292B2 (ja) 2008-12-16 2008-12-16 センサデバイス
US12/637,792 US8256288B2 (en) 2008-12-16 2009-12-15 Sensor device
CN2012103287521A CN102865863A (zh) 2008-12-16 2009-12-16 传感器器件
CN2009102540785A CN101750056B (zh) 2008-12-16 2009-12-16 传感器器件
US13/427,076 US8701485B2 (en) 2008-12-16 2012-03-22 Sensor device
US13/572,898 US8544323B2 (en) 2008-12-16 2012-08-13 Sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008320185A JP5695292B2 (ja) 2008-12-16 2008-12-16 センサデバイス

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014032188A Division JP5757352B2 (ja) 2014-02-21 2014-02-21 センサデバイス

Publications (3)

Publication Number Publication Date
JP2010145137A JP2010145137A (ja) 2010-07-01
JP2010145137A5 JP2010145137A5 (enExample) 2012-02-23
JP5695292B2 true JP5695292B2 (ja) 2015-04-01

Family

ID=42565739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008320185A Expired - Fee Related JP5695292B2 (ja) 2008-12-16 2008-12-16 センサデバイス

Country Status (1)

Country Link
JP (1) JP5695292B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5757352B2 (ja) * 2014-02-21 2015-07-29 セイコーエプソン株式会社 センサデバイス
JP7024349B2 (ja) * 2017-11-24 2022-02-24 セイコーエプソン株式会社 センサーユニット、センサーユニットの製造方法、慣性計測装置、電子機器、および移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310956A (ja) * 1989-05-26 1990-12-26 Hitachi Ltd 高密度実装半導体パツケージ
JPH05315521A (ja) * 1992-05-12 1993-11-26 Oki Electric Ind Co Ltd 半導体装置
JP3009104B2 (ja) * 1998-01-30 2000-02-14 富士電機株式会社 半導体センサおよび半導体センサ用パッケージ
JPH11233709A (ja) * 1998-02-13 1999-08-27 Hitachi Ltd 半導体装置およびその製造方法ならびに電子装置
JP2002022452A (ja) * 2000-07-11 2002-01-23 Ngk Insulators Ltd 振動型ジャイロスコープを内蔵した角速度測定装置
JP4297415B2 (ja) * 2003-06-04 2009-07-15 日本碍子株式会社 振動型ジャイロスコープ
JP5164015B2 (ja) * 2006-08-24 2013-03-13 セイコーエプソン株式会社 多軸ジャイロセンサ

Also Published As

Publication number Publication date
JP2010145137A (ja) 2010-07-01

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