JP5692373B2 - 成膜装置及び成膜方法 - Google Patents
成膜装置及び成膜方法 Download PDFInfo
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- JP5692373B2 JP5692373B2 JP2013517811A JP2013517811A JP5692373B2 JP 5692373 B2 JP5692373 B2 JP 5692373B2 JP 2013517811 A JP2013517811 A JP 2013517811A JP 2013517811 A JP2013517811 A JP 2013517811A JP 5692373 B2 JP5692373 B2 JP 5692373B2
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- film
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- granular substrate
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- 238000000034 method Methods 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 107
- 239000010408 film Substances 0.000 claims description 100
- 239000010409 thin film Substances 0.000 claims description 33
- 238000005096 rolling process Methods 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000036544 posture Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Description
Claims (8)
- 成膜処理対象の粒状基板が搭載される主面を有するトレイと、
前記粒状基板が前記主面上で転動するように前記主面を水平に維持したままで前記トレイを一定期間振動させた後、前記主面上に搭載されたすべての前記粒状基板に膜が形成される所定の位置に前記トレイを停止させる転動機構と、
停止した前記トレイの前記主面上で静止した前記粒状基板の露出した表面に薄膜を形成する薄膜形成機構と
を備えることを特徴とする成膜装置。 - 前記薄膜形成機構が、前記トレイの前記主面上において前記薄膜の原料ガスをプラズマ化して、前記粒状基板の前記表面に前記薄膜を形成することを特徴とする請求項1に記載の成膜装置。
- 前記粒状基板がシリコン基板であることを特徴とする請求項1に記載の成膜装置。
- 前記粒状基板上に形成される薄膜が太陽電池の反射防止膜であることを特徴とする請求項3に記載の成膜装置。
- トレイの主面上に成膜処理対象の粒状基板を搭載するステップと、
前記粒状基板が前記主面上で転動するように、前記主面を水平に維持したままで前記トレイを振動させるステップと、
前記主面上に搭載されたすべての前記粒状基板に膜が形成される所定の位置に前記トレイを停止させた後に、前記主面上で静止した前記粒状基板の露出した表面に薄膜を形成するステップと
を含み、前記トレイを振動させるステップと前記薄膜を形成するステップとを含む成膜工程を複数回繰り返すことを特徴とする成膜方法。 - 前記薄膜を形成するステップが、前記トレイの前記主面上において前記薄膜の原料ガスをプラズマ化して、前記粒状基板の前記表面に前記薄膜を形成することを特徴とする請求項5に記載の成膜方法。
- 前記粒状基板がシリコン基板であることを特徴とする請求項5に記載の成膜方法。
- 前記粒状基板上に形成される薄膜が太陽電池の反射防止膜であることを特徴とする請求項7に記載の成膜方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013517811A JP5692373B2 (ja) | 2011-05-27 | 2011-09-21 | 成膜装置及び成膜方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011118815 | 2011-05-27 | ||
JP2011118815 | 2011-05-27 | ||
PCT/JP2011/071499 WO2012164767A1 (ja) | 2011-05-27 | 2011-09-21 | 成膜装置及び成膜方法 |
JP2013517811A JP5692373B2 (ja) | 2011-05-27 | 2011-09-21 | 成膜装置及び成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012164767A1 JPWO2012164767A1 (ja) | 2014-07-31 |
JP5692373B2 true JP5692373B2 (ja) | 2015-04-01 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2013517811A Expired - Fee Related JP5692373B2 (ja) | 2011-05-27 | 2011-09-21 | 成膜装置及び成膜方法 |
Country Status (2)
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---|---|
JP (1) | JP5692373B2 (ja) |
WO (1) | WO2012164767A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6394375B2 (ja) * | 2014-12-25 | 2018-09-26 | 株式会社島津製作所 | ワークホルダ及び成膜装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0280396A (ja) * | 1988-09-16 | 1990-03-20 | Seiko Instr Inc | 砥粒及び砥粒へのダイヤモンド析出合成方法 |
US6897085B2 (en) * | 2003-01-21 | 2005-05-24 | Spheral Solar Power, Inc. | Method of fabricating an optical concentrator for a photovoltaic solar cell |
JP4750436B2 (ja) * | 2005-03-16 | 2011-08-17 | 孝之 阿部 | 表面処理物の製造方法、表面処理方法及び表面処理装置 |
JP5039487B2 (ja) * | 2007-09-26 | 2012-10-03 | 株式会社アルバック | 金属蒸着装置および同装置における粉体状担体の撹拌方法 |
AU2008365516B2 (en) * | 2008-12-19 | 2012-07-26 | Sphelar Power Corporation | Solar cell module and method for producing the same |
-
2011
- 2011-09-21 JP JP2013517811A patent/JP5692373B2/ja not_active Expired - Fee Related
- 2011-09-21 WO PCT/JP2011/071499 patent/WO2012164767A1/ja active Application Filing
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Publication number | Publication date |
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WO2012164767A1 (ja) | 2012-12-06 |
JPWO2012164767A1 (ja) | 2014-07-31 |
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