JP5690366B2 - 光変調器 - Google Patents
光変調器 Download PDFInfo
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- JP5690366B2 JP5690366B2 JP2013064923A JP2013064923A JP5690366B2 JP 5690366 B2 JP5690366 B2 JP 5690366B2 JP 2013064923 A JP2013064923 A JP 2013064923A JP 2013064923 A JP2013064923 A JP 2013064923A JP 5690366 B2 JP5690366 B2 JP 5690366B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
- G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index
- G02F1/0154—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index using electro-optic effects, e.g. linear electro optic [LEO], Pockels, quadratic electro optical [QEO] or Kerr effect
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/122—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode having a particular pattern
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/128—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode field shaping
Description
図1は、本発明の第1実施形態に係る光変調器の構成を示す平面図であり、図2は、図1のII−II線に沿った光変調器の断面図であり、図3は、図2の断面図近傍における光変調器の斜視図である。
次に、本発明の第2実施形態について説明する。第2実施形態以降の各実施形態については、他の実施形態との相違点について主として説明し、他の実施形態の要素と同一の要素については、同一の符号を付すことにより、その詳細な説明を省略する場合がある。
次に、本発明の第3実施形態について説明する。図6は、第3実施形態に係る光変調器の構成を示す平面図であり、図7は、図6のVII−VII線に沿った光変調器の断面図である。第3実施形態の光変調器300は、第1貫通孔及び第2貫通孔の平面視形状において、第2実施形態の光変調器200と相違する。
次に、本発明の第4実施形態について説明する。図8は、第4実施形態に係る光変調器の構成を示す平面図であり、図9は、図8のIX−IX線に沿った光変調器の断面図である。第4実施形態の光変調器400は、第1テラス部3T1と、第2テラス部3T2とをさらに備える点、及び、第1接地電極11がテラス上接地電極要素11Dをさらに有する点、及び、第2接地電極12がテラス上接地電極要素12Dをさらに有する点、において、第1実施形態の光変調器100(図1〜図3参照)と異なる。
次に、本発明の第5実施形態について説明する。図10は、第5実施形態に係る光変調器の断面図であり、第4実施形態の図9に対応する図である。第5実施形態の光変調器500は、第1接地電極の中央部接地電極要素及び第2接地電極の中央部接地電極要素の態様の点において、第4実施形態の光変調器400(図8及び図9参照)と異なる。
次に、本発明の第6実施形態について説明する。図11は、第6実施形態に係る光変調器の構成を示す平面図であり、図12は、図11のXII−XII線に沿った光変調器の断面図である。第6実施形態の光変調器600は、変調電極の態様の点において、第4実施形態の光変調器400と相違する。
Claims (6)
- 主面を有する基体部と、前記基体部の前記主面上に設けられ、当該主面に沿った第1方向に沿って延びるリッジ型光導波路と、当該リッジ型光導波路内を導波する光を変調するための変調電極と、を備え、
前記基体部の前記主面は、前記リッジ型光導波路が設けられた設置面と、前記第1方向と直交し、かつ、前記主面に沿った第2方向に沿って前記設置面を挟むように位置する第1面及び第2面と、を有し、
前記変調電極は、変調信号が供給される信号電極と、第1接地電極と、第2接地電極とからなり、
前記信号電極は、前記リッジ型光導波路上に前記第1方向に沿って延びるように設けられた部分であって、当該リッジ型光導波路の最上部の前記第2方向の幅よりも広い幅を有する幅広部を有し、
前記第1接地電極は、前記第1方向に沿って延びるように前記第1面上に設けられた第1接地電極要素を有し、
前記第2接地電極は、前記第1方向に沿って延びるように前記第2面上に設けられた第2接地電極要素を有し、
前記第1接地電極要素は、当該第1接地電極要素の前記第1方向の一部のみに設けられた少なくとも1つの第1貫通孔を有し、
前記第2接地電極要素は、当該第2接地電極要素の前記第1方向の一部のみに設けられた少なくとも1つの第2貫通孔を有し、
前記少なくとも1つの第1貫通孔は、平面視で前記信号電極の前記幅広部と重複する、又は、当該幅広部と前記第2方向に向かって対向し、
前記少なくとも1つの第2貫通孔は、平面視で前記信号電極の前記幅広部と重複する、又は、当該幅広部と前記第2方向に向かって対向する光変調器。 - 前記少なくとも1つの第1貫通孔、及び、前記少なくとも1つの第2貫通孔は、平面視で、円形形状、楕円形状、レーストラック形状、又は、角丸矩形形状を有する請求項1に記載の光変調器。
- 前記第1接地電極要素は、複数の第1貫通孔を有し、当該複数の第1貫通孔は、前記第1方向に沿って順に設けられており、
前記第2接地電極要素は、複数の第2貫通孔を有し、当該複数の第2貫通孔は、前記第1方向に沿って順に設けられている請求項1又は2に記載の光変調器。 - 前記少なくとも1つの第1貫通孔は、平面視で、前記第1接地電極要素の前記リッジ型光導波路側の側面と離間しており、
前記少なくとも1つの第2貫通孔は、平面視で、前記第2接地電極要素の前記リッジ型光導波路側の側面と離間している請求項1〜3のいずれか一項に記載の光変調器。 - 前記少なくとも1つの第1貫通孔は、平面視で、前記第1接地電極要素の前記リッジ型光導波路側の側面と2μm以上離間しており、
前記少なくとも1つの第2貫通孔は、平面視で、前記第2接地電極要素の前記リッジ型光導波路側の側面と2μm以上離間している請求項4に記載の光変調器。 - 前記第1接地電極要素及び前記第2接地電極要素は、平面視で、前記リッジ型光導波路の光軸に対して略線対称に設けられている請求項1〜5のいずれか1項に記載の光変調器。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013064923A JP5690366B2 (ja) | 2013-03-26 | 2013-03-26 | 光変調器 |
CN201480017747.6A CN105074547B (zh) | 2013-03-26 | 2014-02-27 | 光调制器 |
US14/780,525 US9551887B2 (en) | 2013-03-26 | 2014-02-27 | Optical modulator |
PCT/JP2014/054906 WO2014156459A1 (ja) | 2013-03-26 | 2014-02-27 | 光変調器 |
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JP2013064923A JP5690366B2 (ja) | 2013-03-26 | 2013-03-26 | 光変調器 |
Related Child Applications (3)
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JP2015017566A Division JP6179532B2 (ja) | 2015-01-30 | 2015-01-30 | 光変調器 |
JP2015017563A Division JP6086126B2 (ja) | 2015-01-30 | 2015-01-30 | 光変調器 |
JP2015017571A Division JP6179533B2 (ja) | 2015-01-30 | 2015-01-30 | 光変調器 |
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JP2014191096A JP2014191096A (ja) | 2014-10-06 |
JP5690366B2 true JP5690366B2 (ja) | 2015-03-25 |
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US (1) | US9551887B2 (ja) |
JP (1) | JP5690366B2 (ja) |
CN (1) | CN105074547B (ja) |
WO (1) | WO2014156459A1 (ja) |
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JP6458603B2 (ja) * | 2015-03-31 | 2019-01-30 | 住友大阪セメント株式会社 | 光デバイス |
EP3477362B1 (en) * | 2016-07-21 | 2022-01-12 | Huawei Technologies Co., Ltd. | Electro-optic modulator |
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JP7056236B2 (ja) * | 2018-03-02 | 2022-04-19 | 富士通オプティカルコンポーネンツ株式会社 | 光変調器、及びこれを用いた光トランシーバモジュール |
JP7067258B2 (ja) * | 2018-05-18 | 2022-05-16 | 住友電気工業株式会社 | マッハツェンダ変調器 |
WO2021108323A1 (en) * | 2019-11-27 | 2021-06-03 | HyperLight Corporation | Electro-optic devices having engineered electrodes |
US11940713B2 (en) * | 2020-11-10 | 2024-03-26 | International Business Machines Corporation | Active electro-optic quantum transducers comprising resonators with switchable nonlinearities |
CN114019742B (zh) * | 2021-10-09 | 2023-08-25 | 华中科技大学 | 一种基于马赫曾德尔调制器的调制方法 |
US20230400717A1 (en) * | 2022-06-14 | 2023-12-14 | HyperLight Corporation | Optical device configured for stress mitigation |
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2013
- 2013-03-26 JP JP2013064923A patent/JP5690366B2/ja active Active
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2014
- 2014-02-27 WO PCT/JP2014/054906 patent/WO2014156459A1/ja active Application Filing
- 2014-02-27 CN CN201480017747.6A patent/CN105074547B/zh active Active
- 2014-02-27 US US14/780,525 patent/US9551887B2/en active Active
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US20160062155A1 (en) | 2016-03-03 |
JP2014191096A (ja) | 2014-10-06 |
CN105074547A (zh) | 2015-11-18 |
WO2014156459A1 (ja) | 2014-10-02 |
US9551887B2 (en) | 2017-01-24 |
CN105074547B (zh) | 2018-08-31 |
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