JP5684304B2 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 75
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 71
- 239000004065 semiconductor Substances 0.000 title claims description 63
- 239000012535 impurity Substances 0.000 claims description 90
- 239000000758 substrate Substances 0.000 claims description 34
- 238000005468 ion implantation Methods 0.000 claims description 27
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 21
- 229910052698 phosphorus Inorganic materials 0.000 claims description 21
- 239000011574 phosphorus Substances 0.000 claims description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- 238000009826 distribution Methods 0.000 claims description 9
- 238000009751 slip forming Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 42
- 238000000034 method Methods 0.000 description 33
- 229910052757 nitrogen Inorganic materials 0.000 description 21
- 230000008569 process Effects 0.000 description 17
- 230000015556 catabolic process Effects 0.000 description 13
- 230000003746 surface roughness Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 230000007774 longterm Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
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- H01L29/0843—Source or drain regions of field-effect devices
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- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- Insulated Gate Type Field-Effect Transistor (AREA)
Description
図1は、本発明の第1の実施形態に係わるDIMOSFETの構成を示す断面図である。図1において、不純物濃度5×1018〜1×1019/cm3程度のn型不純物を含む六方晶SiC基板(n+基板)101上にn型不純物濃度5×1015〜2×1016/cm3程度を含み、厚さが5〜10μm程度であるSiC層(n- 層)102が形成されている。SiC層102の一部表面には、p型不純物としてアルミニウム(Al)が、表面からの深さ方向の濃度が1×1016〜2×1019/cm3程度(ピーク濃度)に変化し、SiC層102表面から深さ900nmまでの領域に存在する第1の炭化珪素領域103(p型ウェル)が形成されている。このp型ウェルは、p型ベース領域103となる。
図12は、本発明の第2の実施形態に係わるDMOSFETの構成を示す断面図である。図12において、不純物濃度5×1018〜1×1019/cm3程度のn型不純物を含む六方晶4H−SiC基板(n+ 基板)201上にn型不純物濃度5×1015〜2×1016/cm3程度を含み、厚さが5〜10μm程度であるSiC層(n- 層)202が形成されている。SiC層202の上には、p型不純物としてアルミニウム(Al)が、表面からの深さ方向の濃度が1×1016/cm3から2×1019/cm3程度(ピーク濃度)まで変化し、厚さ900nmのp型ベース層103が形成されている。
図19は、本発明の第3の実施形態に係る横型DIMOSFETの構成を示す断面図である。基本的には、第1の実施形態のDIMOSFETを横型にしたものと考えてよい。図19において、窒素が添加されたn型炭化珪素基板309(N)の左上には、第1の実施形態と同様に、p型べース領域303とその中に形成されたソース領域304が選択的に形成されている。このp型ベース領域303に隣接して、炭化珪素基板309上には、窒素が添加された低濃度の第3の炭化珪素領域302(N)が形成されている。
102、202…n型SiC層
302…n型SiC領域
103、303…p型ベース領域
203…p型ベース層
104、204,304…n型ソース領域
105、205、305…ゲート絶縁膜
106、206、306…ゲート電極
107、207、307…ドレイン電極
108、208、308…ソース電極
109,209,309…レジスト
110、210、310…トレンチ
111…p+ 型SiC基板
112…n型層
214a…n型領域
214b…n+ 型コンタクト
311…絶縁層
312…Ni層
Claims (10)
- 第1と第2の主面を有する炭化珪素基板と、
前記炭化珪素基板の前記第1の主面に設けられた第1導電型の第1の炭化珪素層と、
前記第1の炭化珪素層上に設けられた第2導電型の第2の炭化珪素層と、
前記第2の炭化珪素層の表面に設けられた第1導電型の第1の炭化珪素領域と、
前記第2の炭化珪素層の表面に、前記第1の炭化珪素領域と離隔して設けられ、前記第1の炭化珪素領域と同一深さ、同一不純物濃度分布を有する第1導電型の第2の炭化珪素領域と、
前記第2の炭化珪素領域と前記第1の炭化珪素層を接続する第1導電型の第3の炭化珪素領域と、
前記第1の炭化珪素領域の少なくとも1部の表面と、前記第2の炭化珪素領域の表面と、前記第1の炭化珪素領域と前記第2の炭化珪素領域に挟まれた前記第2の炭化珪素層の表面に連続的に形成されたゲート絶縁膜と、
前記ゲート絶縁膜上に形成されたゲート電極と、
前記第2の炭化珪素層と前記第1の炭化珪素領域の前記ゲート絶縁膜に覆われない部分とが隣接する部分に、自身の底面で前記隣接する部分を横切るようにトレンチが設けられ、このトレンチに埋め込まれた第1の電極と、
前記炭化珪素基板の前記第2の主面に形成された第2の電極と
を具備し、
前記第1の炭化珪素領域の前記ゲート絶縁膜と接する部分の不純物の濃度は、前記第1の炭化珪素領域の前記トレンチの底面に露出する面の不純物の濃度よりも低く、
前記第2の炭化珪素層の前記トレンチの底面に露出する面の不純物の濃度は、前記2の炭化珪素層の前記ゲート絶縁膜と接する部分の不純物の濃度よりも高い
ことを特徴とする半導体装置。 - 前記炭化珪素基板は、第1導電型であり、MOSFETを構成することを特徴とする請求項1に記載の半導体装置。
- 前記炭化珪素基板は、第2導電型であり、IGBTを形成することを特徴とする請求項1に記載の半導体装置。
- 前記第1の炭化珪素領域は不純物としてアルミニウムを含み、前記ゲート絶縁膜と接する部分のアルミニウムの濃度は、1×1017/cm3未満であることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- 前記第2の炭化珪素層は不純物として燐を含み、前記ゲート絶縁膜と接する部分の燐の濃度は、1×1019/cm3未満であることを特徴とする請求項1乃至4のいずれかに記載の半導体装置。
- 前記第1の炭化珪素領域は不純物としてアルミニウムを含み、前記第1の炭化珪素領域の前記トレンチの底面に露出する面のアルミニウムの濃度は、1×1017/cm3以上であることを特徴とする請求項1乃至5のいずれかに記載の半導体装置。
- 前記第2の炭化珪素層は不純物として燐を含み、前記第2の炭化珪素層の前記トレンチの底面に露出する面の燐の濃度は、1×1019/cm3以上であることを特徴とする請求項1乃至6のいずれかに記載の半導体装置。
- 前記第1および第2の炭化珪素領域は、イオン注入により注入された不純物を含むことを特徴とする請求項1乃至7のいずれかに記載の半導体装置。
- 前記第1の炭化珪素領域の前記ゲート絶縁膜と接する部分の不純物の濃度に対する、前記第1の炭化珪素領域の前記トレンチの底面に露出する面の不純物の濃度の比は10倍以上であることを特徴とする請求項1乃至8のいずれかに記載の半導体装置。
- 前記第2の炭化珪素層の前記ゲート絶縁膜と接する部分の不純物の濃度に対する、前記第2の炭化珪素層の前記トレンチの底面に露出する面の不純物の濃度の比は10倍以上であることを特徴とする請求項1乃至9のいずれかに記載の半導体装置。
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