JP5674548B2 - 半導体記憶装置 - Google Patents
半導体記憶装置 Download PDFInfo
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- JP5674548B2 JP5674548B2 JP2011101129A JP2011101129A JP5674548B2 JP 5674548 B2 JP5674548 B2 JP 5674548B2 JP 2011101129 A JP2011101129 A JP 2011101129A JP 2011101129 A JP2011101129 A JP 2011101129A JP 5674548 B2 JP5674548 B2 JP 5674548B2
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- Prior art keywords
- phase change
- intermediate layer
- film
- memory device
- semiconductor memory
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- 239000004065 semiconductor Substances 0.000 title claims description 20
- 230000008859 change Effects 0.000 claims description 38
- 239000012782 phase change material Substances 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 229910008355 Si-Sn Inorganic materials 0.000 claims description 6
- 229910006453 Si—Sn Inorganic materials 0.000 claims description 6
- 229910052714 tellurium Inorganic materials 0.000 claims description 6
- 229910008434 Si—Bi Inorganic materials 0.000 claims description 5
- 229910018530 Si-Ag Inorganic materials 0.000 claims description 2
- 229910018598 Si-Co Inorganic materials 0.000 claims description 2
- 229910007981 Si-Mg Inorganic materials 0.000 claims description 2
- 229910008065 Si-SiO Inorganic materials 0.000 claims description 2
- 229910008332 Si-Ti Inorganic materials 0.000 claims description 2
- 229910008329 Si-V Inorganic materials 0.000 claims description 2
- 229910008341 Si-Zr Inorganic materials 0.000 claims description 2
- 229910008383 Si—Ag Inorganic materials 0.000 claims description 2
- 229910008453 Si—Co Inorganic materials 0.000 claims description 2
- 229910008458 Si—Cr Inorganic materials 0.000 claims description 2
- 229910008313 Si—In Inorganic materials 0.000 claims description 2
- 229910008316 Si—Mg Inorganic materials 0.000 claims description 2
- 229910006639 Si—Mn Inorganic materials 0.000 claims description 2
- 229910006295 Si—Mo Inorganic materials 0.000 claims description 2
- 229910006405 Si—SiO Inorganic materials 0.000 claims description 2
- 229910006749 Si—Ti Inorganic materials 0.000 claims description 2
- 229910006768 Si—V Inorganic materials 0.000 claims description 2
- 229910006682 Si—Zr Inorganic materials 0.000 claims description 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 2
- 229910006351 Si—Sb Inorganic materials 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 17
- 229920005591 polysilicon Polymers 0.000 description 16
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229910052718 tin Inorganic materials 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 239000000470 constituent Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000002427 irreversible effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 229910008310 Si—Ge Inorganic materials 0.000 description 2
- 229910008482 TiSiN Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910005936 Ge—Sb Inorganic materials 0.000 description 1
- 229910020830 Sn-Bi Inorganic materials 0.000 description 1
- 229910018728 Sn—Bi Inorganic materials 0.000 description 1
- 229910008599 TiW Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
- H10N70/026—Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Description
(1)Siと金属との接合:約20kΩ
(2)Ge−Sb−Teと金属との接合:約100Ω
(3)SiとGe−Sb−Teとの接合:約1MΩ
すなわち、Siと相変化材料(Ge−Sb−Te)とを接合した場合には、Siと金属との接合、および相変化材料と金属との接合に比較して接触抵抗が大幅に大きくなることが判明した。
11 熱酸化膜
12 TiN膜
13 W膜
14 TiN膜
15 n+型ポリシリコン膜
16 酸化シリコン膜
17 孔
18 記録層
19 上部電極
20 中間層
21 Sb膜
Claims (6)
- 相変化材料からなる記録部と、シリコン半導体層からなる回路部とを少なくとも含む相変化メモリ素子を有する半導体記憶装置であって、
前記記録部と前記回路部とが中間層を介して電気的に接続されており、
前記中間層は、Si−Sb、Si−Te、Si−Sn、Si−Biの何れかの二元系材料で形成されていることを特徴とする半導体記憶装置。 - 前記中間層は、さらに、Si−Ag、Si−Mo、Si−V、Si−Ti、Si−Co、Si−Mn、Si−Mg、Si−In、Si−Cr、Si−Zr、Si−Hf、Si−ZrO2、Si−SiO2、Si−TiO2の少なくとも一種を含むことを特徴とする請求項1記載の半導体記憶装置。
- 前記回路部には、前記シリコン半導体層からなる配線、トランジスタまたはダイオードが形成されていることを特徴とする請求項1記載の半導体記憶装置。
- 前記中間層のシリコン含有率は、前記記録部との界面から前記回路部との界面に向かって次第に高くなっていることを特徴とする請求項1記載の半導体記憶装置。
- 前記中間層の膜厚は、10nmであることを特徴とする請求項1記載の半導体記憶装置。
- 相変化材料からなる記録部と、シリコン半導体層からなる回路部とを少なくとも含む相変化メモリ素子を有する半導体記憶装置であって、
前記記録部と前記回路部とが中間層を介して電気的に接続されており、
前記中間層は、前記相変化材料を構成する元素の少なくとも一種とシリコンとを含有し、
前記中間層のシリコン含有率は、前記記録部との界面から前記回路部との界面に向かって次第に高くなっていることを特徴とする半導体記憶装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011101129A JP5674548B2 (ja) | 2011-04-28 | 2011-04-28 | 半導体記憶装置 |
US13/457,889 US8658998B2 (en) | 2011-04-28 | 2012-04-27 | Semiconductor storage device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011101129A JP5674548B2 (ja) | 2011-04-28 | 2011-04-28 | 半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012234903A JP2012234903A (ja) | 2012-11-29 |
JP5674548B2 true JP5674548B2 (ja) | 2015-02-25 |
Family
ID=47067213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011101129A Expired - Fee Related JP5674548B2 (ja) | 2011-04-28 | 2011-04-28 | 半導体記憶装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8658998B2 (ja) |
JP (1) | JP5674548B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8994489B2 (en) | 2011-10-19 | 2015-03-31 | Micron Technology, Inc. | Fuses, and methods of forming and using fuses |
US9252188B2 (en) | 2011-11-17 | 2016-02-02 | Micron Technology, Inc. | Methods of forming memory cells |
US8723155B2 (en) | 2011-11-17 | 2014-05-13 | Micron Technology, Inc. | Memory cells and integrated devices |
US9136467B2 (en) | 2012-04-30 | 2015-09-15 | Micron Technology, Inc. | Phase change memory cells and methods of forming phase change memory cells |
US9553262B2 (en) | 2013-02-07 | 2017-01-24 | Micron Technology, Inc. | Arrays of memory cells and methods of forming an array of memory cells |
US9881971B2 (en) * | 2014-04-01 | 2018-01-30 | Micron Technology, Inc. | Memory arrays |
US9362494B2 (en) | 2014-06-02 | 2016-06-07 | Micron Technology, Inc. | Array of cross point memory cells and methods of forming an array of cross point memory cells |
US9343506B2 (en) | 2014-06-04 | 2016-05-17 | Micron Technology, Inc. | Memory arrays with polygonal memory cells having specific sidewall orientations |
US20220199899A1 (en) * | 2020-12-22 | 2022-06-23 | International Business Machines Corporation | Transfer length phase change material (pcm) based bridge cell |
JP2022147390A (ja) | 2021-03-23 | 2022-10-06 | キオクシア株式会社 | 記憶装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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US6914255B2 (en) | 2003-08-04 | 2005-07-05 | Ovonyx, Inc. | Phase change access device for memories |
JP4124743B2 (ja) * | 2004-01-21 | 2008-07-23 | 株式会社ルネサステクノロジ | 相変化メモリ |
KR100682946B1 (ko) * | 2005-05-31 | 2007-02-15 | 삼성전자주식회사 | 상전이 램 및 그 동작 방법 |
KR100668348B1 (ko) * | 2005-11-11 | 2007-01-12 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조방법 |
JP4437479B2 (ja) | 2006-08-02 | 2010-03-24 | 株式会社半導体理工学研究センター | 相変化メモリ素子 |
US7800092B2 (en) * | 2006-08-15 | 2010-09-21 | Micron Technology, Inc. | Phase change memory elements using energy conversion layers, memory arrays and systems including same, and methods of making and using |
KR100855975B1 (ko) * | 2007-01-30 | 2008-09-02 | 삼성전자주식회사 | 반도체 메모리 소자 및 그 제조 방법 |
JP2008218492A (ja) | 2007-02-28 | 2008-09-18 | Elpida Memory Inc | 相変化メモリ装置 |
JP2009123725A (ja) * | 2007-11-12 | 2009-06-04 | Hitachi Ltd | 不揮発性半導体記憶装置 |
JP5557421B2 (ja) * | 2007-11-26 | 2014-07-23 | ピーエスフォー ルクスコ エスエイアールエル | 相変化型不揮発メモリ、その製造方法および半導体装置 |
KR20100001260A (ko) | 2008-06-26 | 2010-01-06 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
JP2009117854A (ja) | 2008-12-19 | 2009-05-28 | Handotai Rikougaku Kenkyu Center:Kk | 相変化メモリ素子、相変化チャンネルトランジスタおよびメモリセルアレイ |
TW201025588A (en) * | 2008-12-30 | 2010-07-01 | Ind Tech Res Inst | Phase-change memory devices and methods for fabricating the same |
JP2010161137A (ja) * | 2009-01-07 | 2010-07-22 | Hitachi Ltd | 半導体記憶装置の製造方法 |
US8363463B2 (en) * | 2009-06-25 | 2013-01-29 | Macronix International Co., Ltd. | Phase change memory having one or more non-constant doping profiles |
US20100327251A1 (en) * | 2009-06-30 | 2010-12-30 | Hynix Semiconductor Inc. | Phase change memory device having partially confined heating electrodes capable of reducing heating disturbances between adjacent memory cells |
JP2011199215A (ja) * | 2010-03-24 | 2011-10-06 | Hitachi Ltd | 半導体記憶装置 |
US8243506B2 (en) * | 2010-08-26 | 2012-08-14 | Micron Technology, Inc. | Phase change memory structures and methods |
US8247789B2 (en) * | 2010-08-31 | 2012-08-21 | Micron Technology, Inc. | Memory cells and methods of forming memory cells |
KR101835709B1 (ko) * | 2010-11-16 | 2018-03-08 | 삼성전자주식회사 | 버퍼 전극을 포함하는 반도체 소자와 그 제조방법, 및 그것을 포함하는 반도체 모듈 및 전자 시스템 |
-
2011
- 2011-04-28 JP JP2011101129A patent/JP5674548B2/ja not_active Expired - Fee Related
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2012
- 2012-04-27 US US13/457,889 patent/US8658998B2/en active Active
Also Published As
Publication number | Publication date |
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JP2012234903A (ja) | 2012-11-29 |
US20120273742A1 (en) | 2012-11-01 |
US8658998B2 (en) | 2014-02-25 |
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