JP5667391B2 - ディスク型ｍｅｍｓ振動子 - Google Patents

ディスク型ｍｅｍｓ振動子 Download PDF

Info

Publication number
JP5667391B2
JP5667391B2 JP2010180357A JP2010180357A JP5667391B2 JP 5667391 B2 JP5667391 B2 JP 5667391B2 JP 2010180357 A JP2010180357 A JP 2010180357A JP 2010180357 A JP2010180357 A JP 2010180357A JP 5667391 B2 JP5667391 B2 JP 5667391B2
Authority
JP
Japan
Prior art keywords
disk
vibrator
cross
type
support structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010180357A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012039557A (ja
JP2012039557A5 (https=
Inventor
藤 健 史 齊
藤 健 史 齊
村 悟 利 木
村 悟 利 木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2010180357A priority Critical patent/JP5667391B2/ja
Priority to US13/814,736 priority patent/US20130134829A1/en
Priority to PCT/JP2011/063992 priority patent/WO2012020602A1/ja
Publication of JP2012039557A publication Critical patent/JP2012039557A/ja
Publication of JP2012039557A5 publication Critical patent/JP2012039557A5/ja
Application granted granted Critical
Publication of JP5667391B2 publication Critical patent/JP5667391B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
JP2010180357A 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子 Expired - Fee Related JP5667391B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010180357A JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子
US13/814,736 US20130134829A1 (en) 2010-08-11 2011-06-13 Disk type mems resonator
PCT/JP2011/063992 WO2012020602A1 (ja) 2010-08-11 2011-06-13 ディスク型ｍｅｍｓ振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010180357A JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子

Publications (3)

Publication Number Publication Date
JP2012039557A JP2012039557A (ja) 2012-02-23
JP2012039557A5 JP2012039557A5 (https=) 2013-03-28
JP5667391B2 true JP5667391B2 (ja) 2015-02-12

Family

ID=45567572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010180357A Expired - Fee Related JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子

Country Status (3)

Country Link
US (1) US20130134829A1 (https=)
JP (1) JP5667391B2 (https=)
WO (1) WO2012020602A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103338022B (zh) * 2013-07-22 2016-03-09 中国科学院半导体研究所 频率可调的mems谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6876047B2 (en) * 2001-11-09 2005-04-05 Turnstone Systems, Inc. MEMS device having a trilayered beam and related methods
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
US6894586B2 (en) * 2003-05-21 2005-05-17 The Regents Of The University Of California Radial bulk annular resonator using MEMS technology
FR2872501B1 (fr) * 2004-07-01 2006-11-03 Commissariat Energie Atomique Microresonateur composite a forte deformation
JP2006217207A (ja) * 2005-02-03 2006-08-17 Seiko Epson Corp 振動子及び半導体装置
JP4857744B2 (ja) * 2005-12-06 2012-01-18 セイコーエプソン株式会社 Ｍｅｍｓ振動子の製造方法
WO2007110928A1 (ja) * 2006-03-28 2007-10-04 Fujitsu Limited 可動素子

Also Published As

Publication number Publication date
JP2012039557A (ja) 2012-02-23
US20130134829A1 (en) 2013-05-30
WO2012020602A1 (ja) 2012-02-16

Similar Documents

Publication Publication Date Title
CN102148613B (zh) 一种固体介质层谐振器及其制备方法
Mihailovich et al. Dissipation measurements of vacuum-operated single-crystal silicon microresonators
JP5177015B2 (ja) パッケージドデバイスおよびパッケージドデバイス製造方法
JP2009529820A (ja) 少なくとも１個の共振器モード形状を有するｍｅｍｓ共振器
JP5711913B2 (ja) ディスク型ｍｅｍｓ振動子
WO2017203741A1 (ja) 共振子及び共振装置
JP2008504771A (ja) 変形量が大きな複合型微小共振器
US9413333B2 (en) Nanomechanical resonator array and production method thereof
JP5667391B2 (ja) ディスク型ｍｅｍｓ振動子
JP5671742B2 (ja) 電極構造要素と振動構造要素を近接して配置する方法およびこれを用いたｍｅｍｓデバイス
CN103905009A (zh) 振子、振荡器、电子设备、移动体和振子的制造方法
JP5558869B2 (ja) Ｍｅｍｓ
JP2009088854A (ja) マイクロメカニカル共振器およびその製造方法
JP2009094798A (ja) マイクロメカニカル共振器
JP2004306208A (ja) Ｍｅｍｓ素子及びのその製造方法
US20100327993A1 (en) Micro mechanical resonator
Hashimoto et al. Evaluation of a single-crystal-silicon microelectromechanical systems resonator utilizing a narrow gap process
Oka et al. Characterization of four-points-pinned ring-shaped silicon microelectromechanical systems resonator
Kiso et al. High quality factor 80 MHz microelectromechanical systems resonator utilizing torsional-to-transverse vibration conversion
Giner et al. The concept of" collapsed electrodes" for glassblown spherical resonators demonstrating 200: 1 aspect ratio gap definition
Dong et al. Anchor loss variation in MEMS Wine-Glass mode disk resonators due to fluctuating fabrication process
Zaman Hybrid RF Acoustic Resonators and Arrays with Integrated Capacitive and Piezoelectric Transducers
JP2010145122A (ja) 圧電振動子および振動ジャイロ装置
Okamoto et al. Lame-mode octagonal microelectromechanical system resonator utilizing slanting shape of sliding driving electrodes
JP2010145121A (ja) 圧電振動子および振動ジャイロ装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130207

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130604

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140715

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140901

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141212

R150 Certificate of patent or registration of utility model

Ref document number: 5667391

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees