JP2012039557A5 - - Google Patents

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Publication number
JP2012039557A5
JP2012039557A5 JP2010180357A JP2010180357A JP2012039557A5 JP 2012039557 A5 JP2012039557 A5 JP 2012039557A5 JP 2010180357 A JP2010180357 A JP 2010180357A JP 2010180357 A JP2010180357 A JP 2010180357A JP 2012039557 A5 JP2012039557 A5 JP 2012039557A5
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JP
Japan
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sectional shape
cross
support structure
dimension
doped
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JP2010180357A
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English (en)
Japanese (ja)
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JP5667391B2 (ja
JP2012039557A (ja
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Priority to JP2010180357A priority Critical patent/JP5667391B2/ja
Priority claimed from JP2010180357A external-priority patent/JP5667391B2/ja
Priority to US13/814,736 priority patent/US20130134829A1/en
Priority to PCT/JP2011/063992 priority patent/WO2012020602A1/ja
Publication of JP2012039557A publication Critical patent/JP2012039557A/ja
Publication of JP2012039557A5 publication Critical patent/JP2012039557A5/ja
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Publication of JP5667391B2 publication Critical patent/JP5667391B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010180357A 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子 Expired - Fee Related JP5667391B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010180357A JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子
US13/814,736 US20130134829A1 (en) 2010-08-11 2011-06-13 Disk type mems resonator
PCT/JP2011/063992 WO2012020602A1 (ja) 2010-08-11 2011-06-13 ディスク型ｍｅｍｓ振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010180357A JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子

Publications (3)

Publication Number Publication Date
JP2012039557A JP2012039557A (ja) 2012-02-23
JP2012039557A5 true JP2012039557A5 (https=) 2013-03-28
JP5667391B2 JP5667391B2 (ja) 2015-02-12

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ID=45567572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010180357A Expired - Fee Related JP5667391B2 (ja) 2010-08-11 2010-08-11 ディスク型ｍｅｍｓ振動子

Country Status (3)

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US (1) US20130134829A1 (https=)
JP (1) JP5667391B2 (https=)
WO (1) WO2012020602A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103338022B (zh) * 2013-07-22 2016-03-09 中国科学院半导体研究所 频率可调的mems谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6876047B2 (en) * 2001-11-09 2005-04-05 Turnstone Systems, Inc. MEMS device having a trilayered beam and related methods
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
US6894586B2 (en) * 2003-05-21 2005-05-17 The Regents Of The University Of California Radial bulk annular resonator using MEMS technology
FR2872501B1 (fr) * 2004-07-01 2006-11-03 Commissariat Energie Atomique Microresonateur composite a forte deformation
JP2006217207A (ja) * 2005-02-03 2006-08-17 Seiko Epson Corp 振動子及び半導体装置
JP4857744B2 (ja) * 2005-12-06 2012-01-18 セイコーエプソン株式会社 Ｍｅｍｓ振動子の製造方法
WO2007110928A1 (ja) * 2006-03-28 2007-10-04 Fujitsu Limited 可動素子

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