JP5177015B2 - パッケージドデバイスおよびパッケージドデバイス製造方法 - Google Patents
パッケージドデバイスおよびパッケージドデバイス製造方法 Download PDFInfo
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- JP5177015B2 JP5177015B2 JP2009045873A JP2009045873A JP5177015B2 JP 5177015 B2 JP5177015 B2 JP 5177015B2 JP 2009045873 A JP2009045873 A JP 2009045873A JP 2009045873 A JP2009045873 A JP 2009045873A JP 5177015 B2 JP5177015 B2 JP 5177015B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 238000004806 packaging method and process Methods 0.000 claims description 262
- 238000000034 method Methods 0.000 claims description 139
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 58
- 238000005304 joining Methods 0.000 claims description 38
- 230000002093 peripheral effect Effects 0.000 claims description 35
- 235000012431 wafers Nutrition 0.000 description 190
- 230000008569 process Effects 0.000 description 52
- 239000000463 material Substances 0.000 description 51
- 238000001514 detection method Methods 0.000 description 27
- 230000008878 coupling Effects 0.000 description 19
- 238000010168 coupling process Methods 0.000 description 19
- 238000005859 coupling reaction Methods 0.000 description 19
- 238000005530 etching Methods 0.000 description 16
- 238000000708 deep reactive-ion etching Methods 0.000 description 14
- 239000012535 impurity Substances 0.000 description 14
- 238000002955 isolation Methods 0.000 description 14
- 238000000926 separation method Methods 0.000 description 14
- 238000009413 insulation Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000000992 sputter etching Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000002210 silicon-based material Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000005459 micromachining Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000009623 Bosch process Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00301—Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/02—Temperature
- B32B2309/027—Ambient temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/60—In a particular environment
- B32B2309/68—Vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0806—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
- B81B2207/094—Feed-through, via
- B81B2207/096—Feed-through, via through the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Description
D,D’ センシングデバイス
S1,S1’,S2,S3,S3’,S4 接合対象面
10,20 振動部
11,12,13,14,21,22,23,24 駆動電極
15,16,25,26 モニタ電極
17,18,27,28 検出電極
30 カップリングビーム部
40,40’ アンカー部
50,60 連結部
70,70’ 外壁部
80,90 パッケージング部
81,91 母材
91A 配線領域
91B 非配線領域
82,92,93 絶縁層
82a,92a 端面
82b,92b 周側面
95 導電プラグ
96A,96B 電極パッド
W1,W3 パッケージングウエハ
W2,W2’ デバイスウエハ
300 常温接合装置
301 チャンバ
302,303 ステージ
304 ガン
305,306 接合対象物
Claims (9)
- 第1接合対象面を有するデバイスが作り込まれたデバイス基板と、
第2接合対象面をなす絶縁層を有して前記デバイス基板と接合されたパッケージング部と、を備え、
前記第1接合対象面および前記第2接合対象面は接合しており、
前記絶縁層における周側面の少なくとも一部の金属濃度は、前記絶縁層におけるデバイス基板側の端面の金属濃度より高く、
前記第1接合対象面の外郭は、前記第2接合対象面の外郭よりも内方に退避している、パッケージドデバイス。 - 前記第1接合対象面の外郭が前記第2接合対象面の外郭よりも内方に退避している長さは、10μm以上である、請求項1に記載のパッケージドデバイス。
- 前記デバイス基板は、第3接合対象面を有する部分構造部を含み、前記第2接合対象面および前記第3接合対象面は接合しており、前記第3接合対象面の外郭は、前記第2接合対象面の外郭よりも内方に退避している、請求項1または2に記載のパッケージドデバイス。
- 前記第3接合対象面の外郭が前記第2接合対象面の外郭よりも内方に退避している長さは、10μm以上である、請求項3に記載のパッケージドデバイス。
- 前記絶縁層の厚さは50nm以上である、請求項1から4のいずれか一つに記載のパッケージドデバイス。
- 第1接合対象面を有するデバイスが作り込まれたデバイス基板を用意する工程と、
第2接合対象面をなす絶縁層を有するパッケージング部、および、前記デバイス基板を、常温接合法によって接合する接合工程と、を含み、
前記接合工程では、前記第1接合対象面および前記第2接合対象面は前記常温接合法によって接合され、前記第2接合対象面に接合された前記第1接合対象面の外郭は、前記第2接合対象面の外郭よりも内方に退避している、パッケージドデバイス製造方法。 - 第1接合対象面を有する複数のデバイスが作り込まれたデバイスウエハを用意する工程と、
第2接合対象面をなす絶縁層を有するパッケージング部を形成するための、前記絶縁層を伴う前記複数のパッケージング部形成区画を含むパッケージングウエハ、および、前記デバイスウエハを、常温接合法によって接合する接合工程と、を含み、
前記接合工程では、前記第1接合対象面および前記第2接合対象面は前記常温接合法によって接合され、前記第2接合対象面に接合された前記第1接合対象面の外郭は、前記第2接合対象面の外郭よりも内方に退避している、パッケージドデバイス製造方法。 - 前記第1接合対象面の外郭が前記第2接合対象面の外郭よりも内方に退避している長さは、10μm以上である、請求項6または7に記載のパッケージドデバイス製造方法。
- 前記絶縁層の厚さは50nm以上である、請求項6から8のいずれか一つに記載のパッケージドデバイス製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009045873A JP5177015B2 (ja) | 2009-02-27 | 2009-02-27 | パッケージドデバイスおよびパッケージドデバイス製造方法 |
US12/688,302 US8283735B2 (en) | 2009-02-27 | 2010-01-15 | Packaged device and producing method thereof |
DE102010001824.4A DE102010001824B4 (de) | 2009-02-27 | 2010-02-11 | Zusammengepackte Vorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009045873A JP5177015B2 (ja) | 2009-02-27 | 2009-02-27 | パッケージドデバイスおよびパッケージドデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010199507A JP2010199507A (ja) | 2010-09-09 |
JP5177015B2 true JP5177015B2 (ja) | 2013-04-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009045873A Expired - Fee Related JP5177015B2 (ja) | 2009-02-27 | 2009-02-27 | パッケージドデバイスおよびパッケージドデバイス製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8283735B2 (ja) |
JP (1) | JP5177015B2 (ja) |
DE (1) | DE102010001824B4 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10000376B2 (en) | 2014-02-25 | 2018-06-19 | Northrop Grumman Litef Gmbh | Method for producing a micro-electromechanical component and a micro-electromechanical component |
Families Citing this family (11)
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US20070170528A1 (en) * | 2006-01-20 | 2007-07-26 | Aaron Partridge | Wafer encapsulated microelectromechanical structure and method of manufacturing same |
WO2012171663A1 (en) * | 2011-06-15 | 2012-12-20 | Eth Zurich | Low-temperature wafer-level packaging and direct electrical interconnection |
JP5874609B2 (ja) | 2012-03-27 | 2016-03-02 | 株式会社デンソー | 半導体装置およびその製造方法 |
KR102094026B1 (ko) * | 2013-02-19 | 2020-03-27 | 엔지케이 인슐레이터 엘티디 | 복합 기판, 탄성파 디바이스 및 탄성파 디바이스의 제법 |
EP3028007A4 (en) | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
WO2015154173A1 (en) | 2014-04-10 | 2015-10-15 | Motion Engine Inc. | Mems pressure sensor |
WO2015184531A1 (en) | 2014-06-02 | 2015-12-10 | Motion Engine Inc. | Multi-mass mems motion sensor |
CA3004760A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
US10301171B1 (en) | 2017-11-13 | 2019-05-28 | Globalfoundries Singapore Pte. Ltd. | Wafer level packaging for MEMS device |
US10793421B2 (en) * | 2017-11-13 | 2020-10-06 | Vanguard International Semiconductor Singapore Pte. Ltd. | Wafer level encapsulation for MEMS device |
JP2019145737A (ja) * | 2018-02-23 | 2019-08-29 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置および半導体装置の製造方法 |
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JPH04348055A (ja) * | 1991-03-05 | 1992-12-03 | Hitachi Ltd | 半導体装置及びその製造方法 |
US6232150B1 (en) * | 1998-12-03 | 2001-05-15 | The Regents Of The University Of Michigan | Process for making microstructures and microstructures made thereby |
KR100343211B1 (ko) | 1999-11-04 | 2002-07-10 | 윤종용 | 웨이퍼 레벨 진공 패키징이 가능한 mems의 구조물의제작방법 |
JP3519720B2 (ja) * | 2001-06-11 | 2004-04-19 | 松下電器産業株式会社 | 電子デバイス |
DE10153319B4 (de) * | 2001-10-29 | 2011-02-17 | austriamicrosystems AG, Schloss Premstätten | Mikrosensor |
US6962835B2 (en) * | 2003-02-07 | 2005-11-08 | Ziptronix, Inc. | Method for room temperature metal direct bonding |
DE10324421B4 (de) | 2003-05-28 | 2010-11-25 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Halbleiterbauelement mit Metallisierungsfläche und Verfahren zur Herstellung desselben |
JP4312631B2 (ja) | 2004-03-03 | 2009-08-12 | 三菱電機株式会社 | ウエハレベルパッケージ構造体とその製造方法、及びそのウエハレベルパッケージ構造体から分割された素子 |
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DE102005002304B4 (de) * | 2005-01-17 | 2011-08-18 | Austriamicrosystems Ag | Mikroelektromechanischer Sensor und Verfahren zu dessen Herstellung |
JP2007059470A (ja) * | 2005-08-22 | 2007-03-08 | Sony Corp | 半導体装置およびその製造方法 |
JP2007201196A (ja) | 2006-01-26 | 2007-08-09 | Matsushita Electric Works Ltd | ウェハ接合装置およびウェハ接合方法 |
US20070180916A1 (en) * | 2006-02-09 | 2007-08-09 | General Electric Company | Capacitive micromachined ultrasound transducer and methods of making the same |
JP4162094B2 (ja) | 2006-05-30 | 2008-10-08 | 三菱重工業株式会社 | 常温接合によるデバイス、デバイス製造方法ならびに常温接合装置 |
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-
2009
- 2009-02-27 JP JP2009045873A patent/JP5177015B2/ja not_active Expired - Fee Related
-
2010
- 2010-01-15 US US12/688,302 patent/US8283735B2/en not_active Expired - Fee Related
- 2010-02-11 DE DE102010001824.4A patent/DE102010001824B4/de not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10000376B2 (en) | 2014-02-25 | 2018-06-19 | Northrop Grumman Litef Gmbh | Method for producing a micro-electromechanical component and a micro-electromechanical component |
KR101901503B1 (ko) * | 2014-02-25 | 2018-11-05 | 노스롭 그루만 리테프 게엠베하 | 부품의 제조 방법 및 그 부품 |
Also Published As
Publication number | Publication date |
---|---|
DE102010001824A1 (de) | 2011-08-18 |
DE102010001824B4 (de) | 2015-04-09 |
US8283735B2 (en) | 2012-10-09 |
JP2010199507A (ja) | 2010-09-09 |
US20100218977A1 (en) | 2010-09-02 |
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