JP5665373B2 - 薄膜の加工方法、及び光電変換装置の作製方法 - Google Patents

薄膜の加工方法、及び光電変換装置の作製方法 Download PDF

Info

Publication number
JP5665373B2
JP5665373B2 JP2010127431A JP2010127431A JP5665373B2 JP 5665373 B2 JP5665373 B2 JP 5665373B2 JP 2010127431 A JP2010127431 A JP 2010127431A JP 2010127431 A JP2010127431 A JP 2010127431A JP 5665373 B2 JP5665373 B2 JP 5665373B2
Authority
JP
Japan
Prior art keywords
laser beam
beam spot
photoelectric conversion
thin film
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010127431A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011251317A (ja
JP2011251317A5 (https=
Inventor
田中　幸一郎
幸一郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2010127431A priority Critical patent/JP5665373B2/ja
Publication of JP2011251317A publication Critical patent/JP2011251317A/ja
Publication of JP2011251317A5 publication Critical patent/JP2011251317A5/ja
Application granted granted Critical
Publication of JP5665373B2 publication Critical patent/JP5665373B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Laser Beam Processing (AREA)
  • Photovoltaic Devices (AREA)
JP2010127431A 2010-06-03 2010-06-03 薄膜の加工方法、及び光電変換装置の作製方法 Expired - Fee Related JP5665373B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010127431A JP5665373B2 (ja) 2010-06-03 2010-06-03 薄膜の加工方法、及び光電変換装置の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010127431A JP5665373B2 (ja) 2010-06-03 2010-06-03 薄膜の加工方法、及び光電変換装置の作製方法

Publications (3)

Publication Number Publication Date
JP2011251317A JP2011251317A (ja) 2011-12-15
JP2011251317A5 JP2011251317A5 (https=) 2013-06-20
JP5665373B2 true JP5665373B2 (ja) 2015-02-04

Family

ID=45415693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010127431A Expired - Fee Related JP5665373B2 (ja) 2010-06-03 2010-06-03 薄膜の加工方法、及び光電変換装置の作製方法

Country Status (1)

Country Link
JP (1) JP5665373B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130118491A (ko) * 2012-04-20 2013-10-30 삼성디스플레이 주식회사 레이저 실링 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
CN103330556A (zh) * 2013-07-24 2013-10-02 贵州大学 便携式血压仪
KR101351340B1 (ko) * 2013-10-23 2014-01-16 주식회사 엘티에스 태양전지 제조방법
CN110744208A (zh) * 2018-07-23 2020-02-04 杭州纤纳光电科技有限公司 产线激光划线设备及其使用方法
CN109659392B (zh) * 2018-12-05 2020-06-12 中国科学院长春光学精密机械与物理研究所 降低微结构硅材料上金半接触电阻的方法及微结构硅材料
JP7418016B2 (ja) * 2021-10-29 2024-01-19 三星ダイヤモンド工業株式会社 レーザ加工方法、レーザ加工装置、および、太陽電池の製造方法
CN115775847A (zh) * 2022-12-13 2023-03-10 环晟光伏(江苏)有限公司 一种提升太阳能电池转换效率的se工艺

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160079A (ja) * 2000-11-30 2002-06-04 Laser Gijutsu Sogo Kenkyusho 薄膜アブレーション加工方法及び装置
JP2002231986A (ja) * 2001-02-07 2002-08-16 Mitsubishi Heavy Ind Ltd 集積型薄膜太陽電池の製造方法
JP4887086B2 (ja) * 2006-07-19 2012-02-29 武井電機工業株式会社 薄膜除去方法及び薄膜除去装置
JP2007324633A (ja) * 2007-09-14 2007-12-13 Masayoshi Murata 集積化タンデム型薄膜シリコン太陽電池モジュール及びその製造方法

Also Published As

Publication number Publication date
JP2011251317A (ja) 2011-12-15

Similar Documents

Publication Publication Date Title
JP5665373B2 (ja) 薄膜の加工方法、及び光電変換装置の作製方法
JP4439492B2 (ja) カルコパイライト型太陽電池およびその製造方法
US8048706B1 (en) Ablative scribing of solar cell structures
US7964476B2 (en) Method and apparatus for the laser scribing of ultra lightweight semiconductor devices
JP4925724B2 (ja) 太陽電池およびその製造方法
CN101375410B (zh) 太阳能电池及其制造方法
US8841157B2 (en) Method and structure for using discontinuous laser scribe lines
JP2007201304A (ja) 太陽電池およびその製造方法
JP5283749B2 (ja) 光電変換モジュールおよびその製造方法
WO2012051574A2 (en) Ablative scribing of solar cell structures
JP4439477B2 (ja) 光起電力素子及びその製造方法
CN102227817A (zh) 光电转换装置的制造方法、光电转换装置的制造装置及光电转换装置
JP6202308B2 (ja) 化合物薄膜太陽電池の製造方法
Dunsky et al. Solid state laser applications in photovoltaics manufacturing
JP2007317879A (ja) カルコパイライト型太陽電池およびその製造方法
JP2007317868A (ja) カルコパイライト型太陽電池およびその製造方法
JP2012038902A (ja) 集積型光電変換装置の製造方法
Huang et al. Picosecond pulsed laser scribing of Cd2SnO4-based CdTe thin-film solar cells on flexible glass
JPH0693515B2 (ja) 半導体装置作製方法
JP4215607B2 (ja) 光起電力装置の製造方法
JP4684306B2 (ja) 薄膜太陽電池の製造方法
CN111886698A (zh) 产生薄膜太阳能模块的方法
JP2000340814A (ja) 薄膜太陽電池モジュールの製造方法
WO2019232034A1 (en) Thin-film photovoltaic device structure and method of monolithically interconnecting photovoltaic cells in modules utilizing such structure
KR101988564B1 (ko) 개구형 투광타입 cigs박막 태양 전지의 제조 방법 및 개구형 투광타입 cigs박막 태양 전지

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130502

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130502

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140221

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140311

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140501

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141209

R150 Certificate of patent or registration of utility model

Ref document number: 5665373

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees