JP5661733B2 - オーバーラップするレーザ開先を有する構成部材及びこのような構成部材の製造方法 - Google Patents
オーバーラップするレーザ開先を有する構成部材及びこのような構成部材の製造方法 Download PDFInfo
- Publication number
- JP5661733B2 JP5661733B2 JP2012502596A JP2012502596A JP5661733B2 JP 5661733 B2 JP5661733 B2 JP 5661733B2 JP 2012502596 A JP2012502596 A JP 2012502596A JP 2012502596 A JP2012502596 A JP 2012502596A JP 5661733 B2 JP5661733 B2 JP 5661733B2
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- JP
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- Prior art keywords
- component
- laser
- groove
- holes
- laser groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000470 constituent Substances 0.000 title description 6
- 238000000034 method Methods 0.000 claims description 12
- 229910010293 ceramic material Inorganic materials 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 6
- 230000001939 inductive effect Effects 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 230000006698 induction Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005058 metal casting Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/08—Severing cooled glass by fusing, i.e. by melting through the glass
- C03B33/082—Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/15—Sheet, web, or layer weakened to permit separation through thickness
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Toxicology (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Laser Beam Processing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Conveying And Assembling Of Building Elements In Situ (AREA)
- Golf Clubs (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Producing Shaped Articles From Materials (AREA)
Description
Claims (13)
- 破断誘発線としてのレーザ開先(2)を有する構成部材(1)であって、
前記レーザ開先(2)は、レーザ放射の複数のレーザ孔(3)から成り、前記構成部材(1)を別々の部材に後に個別化するために用いられる、構成部材において、
前記構成部材(1)の表面で測定して、それぞれ2つの隣接する前記レーザ孔(3)の間隔Aは前記レーザ孔(3)の直径D以下であり、
前記レーザ開先(2)が、前記個別化された部材における切り欠き部(11)と組み合わされている、
ことを特徴とする構成部材。 - 前記複数のレーザ孔(3)の深さHは同じである、請求項1記載の構成部材。
- 前記複数のレーザ孔(3)の深さHは同じではない、請求項1記載の構成部材。
- 前記レーザ開先(2)は前記構成部材(1)の互いに対向する側面(4,5)に打ち込まれている、請求項1から3のいずれか1項記載の構成部材。
- 前記構成部材(1)の互いに対向する側面(4,5)は相似なレーザ開先(2)を有している、請求項1から4のいずれか1項記載の構成部材。
- 前記構成部材(1)は、セラミック材料又はガラスでできている、請求項1から5のいずれか1項記載の構成部材。
- 前記セラミック材料又はガラスは、半導体材料、酸化アルミニウム、酸化ジルコニウム又は混合セラミック材料である、請求項6記載の構成部材。
- 前記構成部材(1)は、電子部材又は電気部材のための基板として用いられるセラミックプレートである、請求項1から7のいずれか1項記載の構成部材。
- 前記構成部材(1)は固体が充填された重合体及び/又は固体が充填されていない重合体である、請求項1から8のいずれか1項記載の構成部材。
- 前記固体が充填された重合体は非焼結セラミックシートである、請求項9記載の構成部材。
- 前記シートはその内部に、重合体によって囲まれている非焼結セラミック材料を含んでいる、請求項10記載の構成部材。
- 請求項1から11のいずれか1項記載の構成部材の製造方法において、
前記構成部材(1)への照射時間の間、レーザ開先(2)を形成するように、レーザ放射及び/又は前記構成部材を移動させる
ことを特徴とする構成部材の製造方法。 - 少なくとも2回、同じ箇所にレーザ孔(3)を打ち込む、請求項12記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009015087.0 | 2009-03-31 | ||
DE102009015087 | 2009-03-31 | ||
PCT/EP2010/053972 WO2010112412A1 (de) | 2009-03-31 | 2010-03-26 | Bauteil mit einer überlappendenden laserspur; verfahren zur herstellung eines solchen bauteils |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012521895A JP2012521895A (ja) | 2012-09-20 |
JP2012521895A5 JP2012521895A5 (ja) | 2014-07-03 |
JP5661733B2 true JP5661733B2 (ja) | 2015-01-28 |
Family
ID=42229244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012502596A Active JP5661733B2 (ja) | 2009-03-31 | 2010-03-26 | オーバーラップするレーザ開先を有する構成部材及びこのような構成部材の製造方法 |
Country Status (18)
Country | Link |
---|---|
US (1) | US8822003B2 (ja) |
EP (1) | EP2414132B1 (ja) |
JP (1) | JP5661733B2 (ja) |
KR (1) | KR20120004498A (ja) |
CN (1) | CN102448659B (ja) |
BR (1) | BRPI1012662A2 (ja) |
CA (1) | CA2757229A1 (ja) |
DE (1) | DE102010003314A1 (ja) |
DK (1) | DK2414132T3 (ja) |
ES (1) | ES2625308T3 (ja) |
IL (1) | IL215452A0 (ja) |
MX (1) | MX2011010284A (ja) |
MY (1) | MY156815A (ja) |
PT (1) | PT2414132T (ja) |
RU (1) | RU2542056C2 (ja) |
SG (1) | SG174996A1 (ja) |
TW (1) | TW201039958A (ja) |
WO (1) | WO2010112412A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102848084B (zh) * | 2012-09-28 | 2015-09-16 | 合肥彩虹蓝光科技有限公司 | 一种具有不同切割深度的发光原件切割方法 |
US20150364374A1 (en) * | 2014-06-12 | 2015-12-17 | Toshiba Corporation | Semiconductor Device Die Singulation by Discontinuous Laser Scribe and Break |
EP3023397A1 (de) * | 2014-11-24 | 2016-05-25 | Manz AG | Verfahren zum Abtrennen eines Teils eines spröden Materials |
CN106932944B (zh) | 2017-04-28 | 2020-06-30 | 上海天马有机发光显示技术有限公司 | 一种显示面板及其制作方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3583279B2 (ja) * | 1998-01-13 | 2004-11-04 | 三菱電機株式会社 | 穴あけ加工方法 |
US20050263854A1 (en) * | 1998-10-23 | 2005-12-01 | Shelton Bryan S | Thick laser-scribed GaN-on-sapphire optoelectronic devices |
JP2003002677A (ja) * | 2001-06-22 | 2003-01-08 | Seiko Epson Corp | レーザ割断用支持テーブル、レーザ割断装置、レーザ割断方法、及び、液晶パネルの製造方法 |
JP2003320466A (ja) * | 2002-05-07 | 2003-11-11 | Disco Abrasive Syst Ltd | レーザビームを使用した加工機 |
JP2004063803A (ja) * | 2002-07-29 | 2004-02-26 | Ngk Spark Plug Co Ltd | プリント配線基板の製造方法、プリント配線基板製造用金属板、連結プリント配線基板 |
JP2005209719A (ja) * | 2004-01-20 | 2005-08-04 | Disco Abrasive Syst Ltd | 半導体ウエーハの加工方法 |
JP3908236B2 (ja) | 2004-04-27 | 2007-04-25 | 株式会社日本製鋼所 | ガラスの切断方法及びその装置 |
JP2006319198A (ja) | 2005-05-13 | 2006-11-24 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法およびレーザー加工装置 |
CN101341100A (zh) * | 2005-12-29 | 2009-01-07 | H2B光电技术有限公司 | 用于分离加工脆性材料构件的装置 |
TWI449137B (zh) * | 2006-03-23 | 2014-08-11 | Ceramtec Ag | 構件或電路用的攜帶體 |
WO2008062496A1 (fr) * | 2006-10-31 | 2008-05-29 | Kyocera Corporation | Élément céramique, procédé de formation d'une rainure dans un élément céramique et substrat pour une partie électronique |
JP2008198905A (ja) * | 2007-02-15 | 2008-08-28 | Hitachi Metals Ltd | セラミックス基板及びセラミックス回路基板の製造方法並びに集合基板と半導体モジュール |
DE102008043539A1 (de) | 2007-11-07 | 2009-05-14 | Ceramtec Ag | Verfahren zum Laserritzen von spröden Bauteilen |
JP5230240B2 (ja) * | 2008-04-04 | 2013-07-10 | 芝浦メカトロニクス株式会社 | レーザ加工装置 |
-
2010
- 2010-03-19 TW TW099108082A patent/TW201039958A/zh unknown
- 2010-03-26 EP EP10710351.7A patent/EP2414132B1/de active Active
- 2010-03-26 CN CN201080024963.5A patent/CN102448659B/zh active Active
- 2010-03-26 KR KR1020117025967A patent/KR20120004498A/ko not_active Application Discontinuation
- 2010-03-26 CA CA2757229A patent/CA2757229A1/en not_active Abandoned
- 2010-03-26 SG SG2011071354A patent/SG174996A1/en unknown
- 2010-03-26 BR BRPI1012662A patent/BRPI1012662A2/pt not_active IP Right Cessation
- 2010-03-26 DE DE102010003314A patent/DE102010003314A1/de not_active Withdrawn
- 2010-03-26 PT PT107103517T patent/PT2414132T/pt unknown
- 2010-03-26 ES ES10710351.7T patent/ES2625308T3/es active Active
- 2010-03-26 RU RU2011143585/03A patent/RU2542056C2/ru not_active IP Right Cessation
- 2010-03-26 MX MX2011010284A patent/MX2011010284A/es active IP Right Grant
- 2010-03-26 DK DK10710351.7T patent/DK2414132T3/en active
- 2010-03-26 JP JP2012502596A patent/JP5661733B2/ja active Active
- 2010-03-26 WO PCT/EP2010/053972 patent/WO2010112412A1/de active Application Filing
- 2010-03-26 US US13/259,449 patent/US8822003B2/en not_active Expired - Fee Related
- 2010-03-26 MY MYPI2011004671A patent/MY156815A/en unknown
-
2011
- 2011-10-02 IL IL215452A patent/IL215452A0/en unknown
Also Published As
Publication number | Publication date |
---|---|
ES2625308T3 (es) | 2017-07-19 |
US20120015129A1 (en) | 2012-01-19 |
MX2011010284A (es) | 2011-12-08 |
RU2542056C2 (ru) | 2015-02-20 |
CA2757229A1 (en) | 2010-10-07 |
CN102448659A (zh) | 2012-05-09 |
MY156815A (en) | 2016-03-31 |
CN102448659B (zh) | 2015-10-21 |
JP2012521895A (ja) | 2012-09-20 |
TW201039958A (en) | 2010-11-16 |
DK2414132T3 (en) | 2017-06-26 |
EP2414132B1 (de) | 2017-03-22 |
IL215452A0 (en) | 2011-12-29 |
WO2010112412A1 (de) | 2010-10-07 |
SG174996A1 (en) | 2011-11-28 |
PT2414132T (pt) | 2017-04-24 |
EP2414132A1 (de) | 2012-02-08 |
RU2011143585A (ru) | 2013-05-10 |
US8822003B2 (en) | 2014-09-02 |
BRPI1012662A2 (pt) | 2016-04-05 |
KR20120004498A (ko) | 2012-01-12 |
DE102010003314A1 (de) | 2010-10-07 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |