JP5650902B2 - ナノインプリント用モールドの露光装置及びナノインプリント用モールドの製造方法 - Google Patents

ナノインプリント用モールドの露光装置及びナノインプリント用モールドの製造方法 Download PDF

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JP5650902B2
JP5650902B2 JP2009273679A JP2009273679A JP5650902B2 JP 5650902 B2 JP5650902 B2 JP 5650902B2 JP 2009273679 A JP2009273679 A JP 2009273679A JP 2009273679 A JP2009273679 A JP 2009273679A JP 5650902 B2 JP5650902 B2 JP 5650902B2
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exposure
roll
pulse
mold
resist layer
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JP2011118049A5 (enExample
JP2011118049A (ja
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一之 古谷
一之 古谷
鈴木　勝
勝 鈴木
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Asahi Kasei Corp
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Asahi Kasei E Materials Corp
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  • Moulds For Moulding Plastics Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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JP2009273679A 2009-12-01 2009-12-01 ナノインプリント用モールドの露光装置及びナノインプリント用モールドの製造方法 Expired - Fee Related JP5650902B2 (ja)

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JP2009273679A JP5650902B2 (ja) 2009-12-01 2009-12-01 ナノインプリント用モールドの露光装置及びナノインプリント用モールドの製造方法

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JP2011118049A JP2011118049A (ja) 2011-06-16
JP2011118049A5 JP2011118049A5 (enExample) 2012-12-20
JP5650902B2 true JP5650902B2 (ja) 2015-01-07

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Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
JP5805082B2 (ja) * 2010-06-16 2015-11-04 旭化成株式会社 ローラーモールドの作製装置および作製方法
JP5968601B2 (ja) * 2011-06-30 2016-08-10 株式会社ホロン ロールモールド製作装置およびロールモールド作製方法
JP5689533B2 (ja) 2011-08-31 2015-03-25 旭化成イーマテリアルズ株式会社 光学用基材、半導体発光素子、インプリント用モールドおよび露光方法
CN102566260A (zh) * 2011-12-30 2012-07-11 西安交通大学 超长光栅尺辊压模具表面图形化的快速加工方法
CN104380206B (zh) * 2012-05-14 2017-03-08 旭化成株式会社 滚筒模具的制作装置及制作方法
JP6047051B2 (ja) * 2013-03-28 2016-12-21 日立マクセル株式会社 光学素子および光学装置
JP6818479B2 (ja) 2016-09-16 2021-01-20 デクセリアルズ株式会社 原盤の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3668600B2 (ja) * 1997-11-07 2005-07-06 大日本スクリーン製造株式会社 画像出力装置
JPH11149642A (ja) * 1997-11-14 1999-06-02 Canon Inc 光記録媒体およびその製造方法
JP4258013B2 (ja) * 2001-08-08 2009-04-30 株式会社オーク製作所 多重露光描画装置および多重露光描画方法
EP1710094B1 (en) * 2004-01-27 2011-10-05 Asahi Kasei Chemicals Corporation Process for producing laser engravable printing substrate
JP2007144995A (ja) * 2005-10-25 2007-06-14 Dainippon Printing Co Ltd 光硬化ナノインプリント用モールド及びその製造方法
JP4559997B2 (ja) * 2006-03-31 2010-10-13 財団法人光産業技術振興協会 偏光板
JP4367442B2 (ja) * 2006-06-23 2009-11-18 ヤマハ株式会社 光ディスク描画方法および光ディスク描画装置
JP2008004243A (ja) * 2006-06-26 2008-01-10 Yamaha Corp 光ディスク描画方法および光ディスク装置並びに光ディスク記録媒体
JP5028892B2 (ja) * 2006-07-18 2012-09-19 コニカミノルタビジネステクノロジーズ株式会社 画像形成装置及びプリントヘッド
CN104076600B (zh) * 2008-01-25 2019-02-15 旭化成株式会社 无缝塑模的制造方法

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