JP5646367B2 - 水晶デバイス - Google Patents

水晶デバイス Download PDF

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Publication number
JP5646367B2
JP5646367B2 JP2011039130A JP2011039130A JP5646367B2 JP 5646367 B2 JP5646367 B2 JP 5646367B2 JP 2011039130 A JP2011039130 A JP 2011039130A JP 2011039130 A JP2011039130 A JP 2011039130A JP 5646367 B2 JP5646367 B2 JP 5646367B2
Authority
JP
Japan
Prior art keywords
crystal
base
crystal element
lid
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011039130A
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English (en)
Japanese (ja)
Other versions
JP2012178620A (ja
JP2012178620A5 (enExample
Inventor
岳寛 高橋
岳寛 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2011039130A priority Critical patent/JP5646367B2/ja
Priority to US13/400,549 priority patent/US20120217846A1/en
Publication of JP2012178620A publication Critical patent/JP2012178620A/ja
Publication of JP2012178620A5 publication Critical patent/JP2012178620A5/ja
Application granted granted Critical
Publication of JP5646367B2 publication Critical patent/JP5646367B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011039130A 2011-02-25 2011-02-25 水晶デバイス Expired - Fee Related JP5646367B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011039130A JP5646367B2 (ja) 2011-02-25 2011-02-25 水晶デバイス
US13/400,549 US20120217846A1 (en) 2011-02-25 2012-02-20 Crystal Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011039130A JP5646367B2 (ja) 2011-02-25 2011-02-25 水晶デバイス

Publications (3)

Publication Number Publication Date
JP2012178620A JP2012178620A (ja) 2012-09-13
JP2012178620A5 JP2012178620A5 (enExample) 2014-02-27
JP5646367B2 true JP5646367B2 (ja) 2014-12-24

Family

ID=46718477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011039130A Expired - Fee Related JP5646367B2 (ja) 2011-02-25 2011-02-25 水晶デバイス

Country Status (2)

Country Link
US (1) US20120217846A1 (enExample)
JP (1) JP5646367B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5999833B2 (ja) * 2011-06-08 2016-09-28 日本電波工業株式会社 水晶デバイス
JP6481813B2 (ja) * 2015-02-17 2019-03-13 セイコーエプソン株式会社 振動子、振動デバイス、発振器、電子機器、および移動体
JP6725208B2 (ja) * 2015-03-25 2020-07-15 株式会社大真空 圧電振動デバイス
WO2018008198A1 (ja) * 2016-07-05 2018-01-11 株式会社村田製作所 共振子及び共振装置
JP6680372B2 (ja) * 2019-02-12 2020-04-15 セイコーエプソン株式会社 振動子、振動デバイス、発振器、電子機器、および移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56119518A (en) * 1980-02-25 1981-09-19 Seiko Instr & Electronics Ltd Ultrathin type quartz oscillator
JPH083058Y2 (ja) * 1989-05-22 1996-01-29 株式会社村田製作所 圧電共振部品
JP3709113B2 (ja) * 1999-12-21 2005-10-19 セイコーインスツル株式会社 圧電振動子とその製造方法
JP4635917B2 (ja) * 2006-03-09 2011-02-23 株式会社大真空 表面実装型圧電振動デバイス
JPWO2010079803A1 (ja) * 2009-01-07 2012-06-28 株式会社大真空 圧電振動デバイスの製造方法
JP5001393B2 (ja) * 2009-09-16 2012-08-15 日本電波工業株式会社 圧電振動デバイス及び圧電振動デバイスの製造方法
JP5595196B2 (ja) * 2010-09-16 2014-09-24 日本電波工業株式会社 圧電デバイス
JP5999833B2 (ja) * 2011-06-08 2016-09-28 日本電波工業株式会社 水晶デバイス

Also Published As

Publication number Publication date
JP2012178620A (ja) 2012-09-13
US20120217846A1 (en) 2012-08-30

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