JP5633349B2 - センサー装置及びセンサー装置アレイ - Google Patents

センサー装置及びセンサー装置アレイ Download PDF

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Publication number
JP5633349B2
JP5633349B2 JP2010272281A JP2010272281A JP5633349B2 JP 5633349 B2 JP5633349 B2 JP 5633349B2 JP 2010272281 A JP2010272281 A JP 2010272281A JP 2010272281 A JP2010272281 A JP 2010272281A JP 5633349 B2 JP5633349 B2 JP 5633349B2
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Japan
Prior art keywords
transducer element
sheet
substrate
sensor
sensor device
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Expired - Fee Related
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JP2010272281A
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Japanese (ja)
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JP2012122790A (ja
JP2012122790A5 (enExample
Inventor
神谷　俊幸
俊幸 神谷
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Seiko Epson Corp
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Seiko Epson Corp
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JP2010272281A 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ Expired - Fee Related JP5633349B2 (ja)

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JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

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JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

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JP2012122790A JP2012122790A (ja) 2012-06-28
JP2012122790A5 JP2012122790A5 (enExample) 2014-01-23
JP5633349B2 true JP5633349B2 (ja) 2014-12-03

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JP2010272281A Expired - Fee Related JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708987A1 (en) * 2019-03-14 2020-09-16 Koninklijke Philips N.V. Two-dimensional force sensor
JP2023006242A (ja) 2021-06-30 2023-01-18 セイコーエプソン株式会社 圧電センサーおよびハンド
JP2023006241A (ja) * 2021-06-30 2023-01-18 セイコーエプソン株式会社 圧電センサーおよびハンド

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136937Y2 (enExample) * 1980-09-04 1986-10-25
JPH073377B2 (ja) * 1990-04-02 1995-01-18 株式会社村田製作所 圧電型圧力分布センサ
JP2006093424A (ja) * 2004-09-24 2006-04-06 Ngk Insulators Ltd 圧電／電歪デバイス
JP2008082947A (ja) * 2006-09-28 2008-04-10 Hiroshima Univ 挟み込み剪断力センサおよび挟み込み剪断力測定装置
EP2202501A1 (en) * 2008-12-23 2010-06-30 ETH Zürich Hollow piezoelectric device for distingishing forces and torques
JP5560980B2 (ja) * 2010-07-14 2014-07-30 セイコーエプソン株式会社 センサー素子アレイ及びその製造方法

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JP2012122790A (ja) 2012-06-28

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