JP6739500B2 - 触知センサ - Google Patents
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- JP6739500B2 JP6739500B2 JP2018215442A JP2018215442A JP6739500B2 JP 6739500 B2 JP6739500 B2 JP 6739500B2 JP 2018215442 A JP2018215442 A JP 2018215442A JP 2018215442 A JP2018215442 A JP 2018215442A JP 6739500 B2 JP6739500 B2 JP 6739500B2
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- 239000010410 layer Substances 0.000 claims description 135
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 4
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- 239000004713 Cyclic olefin copolymer Substances 0.000 description 2
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
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- BIXHRBFZLLFBFL-UHFFFAOYSA-N germanium nitride Chemical compound N#[Ge]N([Ge]#N)[Ge]#N BIXHRBFZLLFBFL-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0447—Position sensing using the local deformation of sensor cells
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Human Computer Interaction (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
Description
z=I0−(ε/C11)×(W132×W122)
によって得られ、
ここでεは弾性誘電層110の誘電率、C11は図8におけるキャパシタンス感知ユニットCSaのキャパシタンス値、W132は第2感知部分132の第1方向D1における幅、W122は第1感知部分122の第2方向D2における幅、及びI0は応力を受ける前の弾性誘電層110の厚さである。このようにして、厚さ方向に平行に剪断感知素子SSに加わっている法線応力Fの大きさは、以下の式、すなわち、
F=E(z/I0)
であり、Eは弾性誘電層110のヤング率である。
であり、上記でW132は第2感知部分132の第1方向D1における幅である。距離Wは図7及び図8において以下の式から得ることができ、すなわち、
W=(1−C21/C11)×W122、又は
W=(1−C22/C12)×W122
であり、W122は第1感知部分122の第2方向の幅である。
110:弾性誘電層
112:第1表面
114:第2表面
120, 120A, 120B, 120C:第1リボン状電極
122E1, 122E2:第1端縁
124:第1接続部分
130, 130A, 130B, 130C:第2リボン状電極
132, 132A, 132B, 132C:第2感知部分
132E1, 132E2:第2端縁
134:第2接続部分
240, 340:第1支持層
250, 350:第2支持層
360:湾曲面基板
360S:外面(外側表面)
370:保護層
C11, C12, C21, C22:キャパシタンス
CS, CSa, CSb, CSc, CSd:キャパシタンス感知ユニット
SS:剪断感知素子
D1, D1’:第1方向
D2, D2’:第2方向
L, W, z:距離
L122:第1方向長さ
L132:第2方向長さ
I0:厚さ
W122, W124, W132, W134:幅
Claims (18)
- 触知センサにおいて、
互いに相反する第1表面及び第2表面を有する弾性誘電層と、
前記第1表面に配置された複数個の第1リボン状電極であって、前記第1リボン状電極それぞれは、第1方向に延在し、また前記第1方向に直列接続した複数個の第1感知部分を有する、該複数個の第1リボン状電極と、及び
前記第2表面に配置された複数個の第2リボン状電極であって、前記第2リボン状電極それぞれは前記第1方向に交差する第2方向に延在する、該複数個の第2リボン状電極と、
を備え、
前記第1感知部分それぞれは、N個の前記第2リボン状電極に対してクロスオーバーして前記第1方向に延在する第1方向長さを有し、前記第1感知部分それぞれは、前記第2方向に平行な第1端縁を有し、且つ前記第1表面と前記第2表面と垂直な方向から見て、前記第1端縁は、1個の前記第2リボン状電極の端縁と整列し、Nは1より大きい正の整数であり、各前記第2リボン状電極は前記第2方向に沿って直列接続した複数個の第2感知部分を含み、
複数個の前記第1感知部分それぞれと、複数個の前記第2感知部分それぞれと、前記弾性誘電層とが互いに重なり複数のキャパシタンス感知ユニットを定義し、これにより剪断感知素子を形成し、前記剪断感知素子が複数の前記キャパシタンス感知ユニットを介しキャパシタンスの変化を感知することで、剪断を感知する、触知センサ。 - 請求項1記載の触知センサにおいて、前記第1リボン状電極それぞれは、さらに、複数個の第1接続部分を有し、前記第1接続部分それぞれは、隣接する2つの前記第1感知部分間を接続し、また前記第1感知部分それぞれの幅は前記第1接続部分それぞれの幅より大きい、触知センサ。
- 請求項2記載の触知センサにおいて、前記第1接続部分それぞれの前記第2方向に測った幅は、前記第1感知部分それぞれの前記第2方向に測った幅の1/2以下である、触知センサ。
- 請求項1〜3のうちいずれか一項記載の触知センサにおいて、前記第2リボン状電極それぞれは、第2方向に直列接続した複数個の第2感知部分を有する、触知センサ。
- 請求項4記載の触知センサにおいて、前記第2リボン状電極それぞれは、さらに、複数個の第2接続部分を有し、前記第2接続部分それぞれは、隣接する2つの前記第2感知部分間を接続し、また前記第2感知部分それぞれの幅は前記第2接続部分それぞれの幅より大きい、触知センサ。
- 請求項4記載の触知センサにおいて、前記第1感知部分それぞれは、N個の前記第2感知部分にクロスオーバーする、触知センサ。
- 請求項4記載の触知センサにおいて、前記第2感知部分それぞれは、M個の前記第1感知部分に対してクロスオーバーして前記第2方向に延在する第2方向長さを有し、前記Mは1より大きい正の整数である、触知センサ。
- 請求項4記載の触知センサにおいて、前記第1感知部分それぞれの第1端縁は、1個の前記第2感知部分の端縁に整列する、触知センサ。
- 請求項4記載の触知センサにおいて、前記第2感知部分それぞれの前記第1方向に平行な第2端縁は、1個の前記第1感知部分の前記第1方向に平行な前記第1端縁に整列する、触知センサ。
- 請求項1〜9のうちいずれか一項記載の触知センサにおいて、前記第1方向は前記第2方向に直交する、触知センサ。
- 請求項1〜10のうちいずれか一項記載の触知センサにおいて、さらに、それぞれ前記弾性誘電層の前記第1表面及び前記第2表面に配置された第1支持層及び第2支持層を備え、前記第1リボン状電極は前記第1支持層に配置され、また前記第2リボン状電極は前記第2支持層に配置されている、触知センサ。
- 請求項11記載の触知センサにおいて、前記第1リボン状電極は、前記第1支持層と前記弾性誘電層との間に配置されている、触知センサ。
- 請求項11記載の触知センサにおいて、前記第2リボン状電極は、前記第2支持層と前記弾性誘電層との間に配置されている、触知センサ。
- 請求項11記載の触知センサにおいて、前記第1支持層は、前記第1リボン状電極と前記弾性誘電層との間に配置されている、触知センサ。前記
- 請求項11記載の触知センサにおいて、さらに、湾曲面基板を備え、前記第2支持層は、前記湾曲面基板上に配置され、また前記湾曲面基板に形状適合する、触知センサ。
- 請求項11記載の触知センサにおいて、前記第2支持層は、絶縁ゲル及び前記絶縁ゲルに分散させた複数のレーザー誘発性の誘発粒子からなるものである、触知センサ。
- 請求項11記載の触知センサにおいて、さらに、第1支持層上にコーティングで配置された保護層を備え、前記保護層の材料は絶縁ポリマー材料を含む、触知センサ。
- 請求項1〜17のうちいずれか一項記載の触知センサにおいて、前記弾性誘電層の厚さは、50ミクロン〜500ミクロンの範囲にわたる、触知センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107100430A TWI671509B (zh) | 2018-01-05 | 2018-01-05 | 觸覺感測器 |
TW107100430 | 2018-01-05 |
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JP2019120676A JP2019120676A (ja) | 2019-07-22 |
JP6739500B2 true JP6739500B2 (ja) | 2020-08-12 |
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JP2018215442A Active JP6739500B2 (ja) | 2018-01-05 | 2018-11-16 | 触知センサ |
Country Status (4)
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US (1) | US10635219B2 (ja) |
JP (1) | JP6739500B2 (ja) |
CN (1) | CN110006559B (ja) |
TW (1) | TWI671509B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11860048B2 (en) * | 2017-07-10 | 2024-01-02 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive and tactile sensors and related sensing methods |
TWI671509B (zh) * | 2018-01-05 | 2019-09-11 | 財團法人工業技術研究院 | 觸覺感測器 |
CN110793701B (zh) * | 2019-11-19 | 2021-09-28 | 安徽大学 | 一种高灵敏度电容式柔性三维力触觉传感器及其制备方法 |
CN110926663A (zh) * | 2019-12-03 | 2020-03-27 | 东华大学 | 一种可水洗可穿戴的高灵敏度压力传感器的制备方法 |
KR102308009B1 (ko) * | 2019-12-27 | 2021-10-05 | 하이비스 주식회사 | 유효 감지 면적이 확장된 압력감지재 |
CN111256571A (zh) * | 2020-01-20 | 2020-06-09 | 腾讯科技(深圳)有限公司 | 柔性电容触觉传感器及其制备方法和触觉传感系统 |
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