JP2012122790A5 - - Google Patents

Download PDF

Info

Publication number
JP2012122790A5
JP2012122790A5 JP2010272281A JP2010272281A JP2012122790A5 JP 2012122790 A5 JP2012122790 A5 JP 2012122790A5 JP 2010272281 A JP2010272281 A JP 2010272281A JP 2010272281 A JP2010272281 A JP 2010272281A JP 2012122790 A5 JP2012122790 A5 JP 2012122790A5
Authority
JP
Japan
Prior art keywords
transducer element
sheet
substrate
sensor device
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010272281A
Other languages
English (en)
Japanese (ja)
Other versions
JP5633349B2 (ja
JP2012122790A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010272281A priority Critical patent/JP5633349B2/ja
Priority claimed from JP2010272281A external-priority patent/JP5633349B2/ja
Publication of JP2012122790A publication Critical patent/JP2012122790A/ja
Publication of JP2012122790A5 publication Critical patent/JP2012122790A5/ja
Application granted granted Critical
Publication of JP5633349B2 publication Critical patent/JP5633349B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010272281A 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ Expired - Fee Related JP5633349B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Publications (3)

Publication Number Publication Date
JP2012122790A JP2012122790A (ja) 2012-06-28
JP2012122790A5 true JP2012122790A5 (enExample) 2014-01-23
JP5633349B2 JP5633349B2 (ja) 2014-12-03

Family

ID=46504382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010272281A Expired - Fee Related JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Country Status (1)

Country Link
JP (1) JP5633349B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708987A1 (en) * 2019-03-14 2020-09-16 Koninklijke Philips N.V. Two-dimensional force sensor
JP7830846B2 (ja) * 2021-06-30 2026-03-17 セイコーエプソン株式会社 圧電センサーおよびハンド
JP2023006241A (ja) * 2021-06-30 2023-01-18 セイコーエプソン株式会社 圧電センサーおよびハンド

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136937Y2 (enExample) * 1980-09-04 1986-10-25
JPH073377B2 (ja) * 1990-04-02 1995-01-18 株式会社村田製作所 圧電型圧力分布センサ
JP2006093424A (ja) * 2004-09-24 2006-04-06 Ngk Insulators Ltd 圧電／電歪デバイス
JP2008082947A (ja) * 2006-09-28 2008-04-10 Hiroshima Univ 挟み込み剪断力センサおよび挟み込み剪断力測定装置
EP2202501A1 (en) * 2008-12-23 2010-06-30 ETH Zürich Hollow piezoelectric device for distingishing forces and torques
JP5560980B2 (ja) * 2010-07-14 2014-07-30 セイコーエプソン株式会社 センサー素子アレイ及びその製造方法

Similar Documents

Publication Publication Date Title
WO2015088708A3 (en) Flexible micromachined transducer device and method for fabricating same
JP2014179062A5 (enExample)
JP2012247372A5 (enExample)
JP2012251801A5 (enExample)
JP2014235133A5 (enExample)
JP2015228014A5 (ja) 表示装置
WO2008149570A1 (ja) 音響センサ
JP2015062060A5 (ja) 半導体装置
JP2013514589A5 (enExample)
WO2016010618A3 (en) A sonar transducer array assembly and methods of manufacture thereof
WO2014084880A3 (en) Input device securing techniques
JP2007533039A5 (enExample)
JP2015055896A5 (enExample)
JP2010508794A5 (enExample)
EP2674227A3 (en) Ultrasonic transducer element unit, probe, probe head, electronic device, and ultrasonic diagnostic device
EP2637166A3 (en) Ultrasound backing element, transducer and ultrasound probe including the same
JP2016139056A5 (enExample)
JP2011175528A5 (enExample)
JP2014146772A5 (enExample)
JP2015505895A5 (enExample)
WO2016106320A3 (en) Foldable opposing sensor array
JP2012122790A5 (enExample)
WO2016025472A3 (en) Actuator structure and method
JP2013058710A5 (enExample)
JP2015026370A5 (enExample)