JP5629455B2 - 干渉計 - Google Patents

干渉計 Download PDF

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Publication number
JP5629455B2
JP5629455B2 JP2009283432A JP2009283432A JP5629455B2 JP 5629455 B2 JP5629455 B2 JP 5629455B2 JP 2009283432 A JP2009283432 A JP 2009283432A JP 2009283432 A JP2009283432 A JP 2009283432A JP 5629455 B2 JP5629455 B2 JP 5629455B2
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JP
Japan
Prior art keywords
light
beam splitter
polarization beam
interferometer
polarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009283432A
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English (en)
Japanese (ja)
Other versions
JP2011123037A (ja
JP2011123037A5 (enExample
Inventor
加藤　成樹
成樹 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009283432A priority Critical patent/JP5629455B2/ja
Priority to EP10191358.0A priority patent/EP2336714B1/en
Priority to US12/966,210 priority patent/US9372066B2/en
Publication of JP2011123037A publication Critical patent/JP2011123037A/ja
Publication of JP2011123037A5 publication Critical patent/JP2011123037A5/ja
Application granted granted Critical
Publication of JP5629455B2 publication Critical patent/JP5629455B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2009283432A 2009-12-14 2009-12-14 干渉計 Expired - Fee Related JP5629455B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009283432A JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計
EP10191358.0A EP2336714B1 (en) 2009-12-14 2010-11-16 Interferometer
US12/966,210 US9372066B2 (en) 2009-12-14 2010-12-13 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009283432A JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計

Publications (3)

Publication Number Publication Date
JP2011123037A JP2011123037A (ja) 2011-06-23
JP2011123037A5 JP2011123037A5 (enExample) 2013-02-07
JP5629455B2 true JP5629455B2 (ja) 2014-11-19

Family

ID=43646496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009283432A Expired - Fee Related JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計

Country Status (3)

Country Link
US (1) US9372066B2 (enExample)
EP (1) EP2336714B1 (enExample)
JP (1) JP5629455B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5993207B2 (ja) * 2012-05-22 2016-09-14 東京エレクトロン株式会社 光干渉システム及び基板処理装置
CN105258635A (zh) * 2015-11-09 2016-01-20 中国科学院长春光学精密机械与物理研究所 一种宽波段斐索激光干涉仪标准参考镜
CN110006349A (zh) * 2019-04-29 2019-07-12 西安交通大学 一种高容差共光路光栅干涉仪

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520615A (en) * 1965-10-25 1970-07-14 Vickers Ltd Optical phase measuring apparatus
JPS6055206A (ja) * 1983-09-05 1985-03-30 Japan Aviation Electronics Ind Ltd 光干渉計
JPH0454406A (ja) * 1990-06-25 1992-02-21 Toyota Autom Loom Works Ltd 光学式変位計
US5153669A (en) * 1991-03-27 1992-10-06 Hughes Danbury Optical Systems, Inc. Three wavelength optical measurement apparatus and method
JPH0571913A (ja) 1991-09-11 1993-03-23 Fuji Xerox Co Ltd 干渉計
US6229619B1 (en) * 1996-02-12 2001-05-08 Massachusetts Institute Of Technology Compensation for measurement uncertainty due to atmospheric effects
JPH1166600A (ja) * 1997-08-08 1999-03-09 Tdk Corp 受発光素子と光学ピックアップ装置
US6455861B1 (en) * 1998-11-24 2002-09-24 Cambridge Research & Instrumentation, Inc. Fluorescence polarization assay system and method
JP2000234914A (ja) * 1999-02-15 2000-08-29 Tokimec Inc 歪み検出装置
JP2001256654A (ja) * 2000-03-13 2001-09-21 Optware:Kk 光情報記録装置、光情報再生装置、光情報記録再生装置および光情報記録媒体
DE60001139T2 (de) * 2000-08-16 2003-09-11 Agilent Technologies, Inc. (N.D.Ges.D.Staates Delaware) Wellenlängenmesser mit grober und feiner Messanlage
WO2002093237A1 (en) * 2001-05-15 2002-11-21 Optellios, Inc. Polarization analysis unit, calibration method and optimization therefor
US6778280B2 (en) * 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
US6897962B2 (en) * 2002-04-18 2005-05-24 Agilent Technologies, Inc. Interferometer using beam re-tracing to eliminate beam walk-off
US6943881B2 (en) * 2003-06-04 2005-09-13 Tomophase Corporation Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
WO2005003862A1 (de) * 2003-07-05 2005-01-13 Carl Zeiss Smt Ag Vorrichtung zur polarisationsspezifischen untersuchung eines optischen systems
JP4514209B2 (ja) 2004-10-15 2010-07-28 キヤノン株式会社 位置検出装置及び方法
JP4939765B2 (ja) * 2005-03-28 2012-05-30 株式会社日立製作所 変位計測方法とその装置
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
DE602006017558D1 (de) * 2005-08-09 2010-11-25 Gen Hospital Corp Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie
JP4810693B2 (ja) * 2007-02-09 2011-11-09 富士フイルム株式会社 光波干渉測定装置
JP5305732B2 (ja) * 2008-05-13 2013-10-02 キヤノン株式会社 干渉計
US20110075153A1 (en) * 2009-09-25 2011-03-31 Hogan Josh N Compact isolated analysis system

Also Published As

Publication number Publication date
JP2011123037A (ja) 2011-06-23
EP2336714B1 (en) 2014-05-21
EP2336714A1 (en) 2011-06-22
US9372066B2 (en) 2016-06-21
US20110141479A1 (en) 2011-06-16

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