JP2011123037A5 - - Google Patents

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Publication number
JP2011123037A5
JP2011123037A5 JP2009283432A JP2009283432A JP2011123037A5 JP 2011123037 A5 JP2011123037 A5 JP 2011123037A5 JP 2009283432 A JP2009283432 A JP 2009283432A JP 2009283432 A JP2009283432 A JP 2009283432A JP 2011123037 A5 JP2011123037 A5 JP 2011123037A5
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JP
Japan
Prior art keywords
beam splitter
light
polarization beam
polarization
polarizing beam
Prior art date
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Application number
JP2009283432A
Other languages
English (en)
Japanese (ja)
Other versions
JP5629455B2 (ja
JP2011123037A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009283432A priority Critical patent/JP5629455B2/ja
Priority claimed from JP2009283432A external-priority patent/JP5629455B2/ja
Priority to EP10191358.0A priority patent/EP2336714B1/en
Priority to US12/966,210 priority patent/US9372066B2/en
Publication of JP2011123037A publication Critical patent/JP2011123037A/ja
Publication of JP2011123037A5 publication Critical patent/JP2011123037A5/ja
Application granted granted Critical
Publication of JP5629455B2 publication Critical patent/JP5629455B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009283432A 2009-12-14 2009-12-14 干渉計 Expired - Fee Related JP5629455B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009283432A JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計
EP10191358.0A EP2336714B1 (en) 2009-12-14 2010-11-16 Interferometer
US12/966,210 US9372066B2 (en) 2009-12-14 2010-12-13 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009283432A JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計

Publications (3)

Publication Number Publication Date
JP2011123037A JP2011123037A (ja) 2011-06-23
JP2011123037A5 true JP2011123037A5 (enExample) 2013-02-07
JP5629455B2 JP5629455B2 (ja) 2014-11-19

Family

ID=43646496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009283432A Expired - Fee Related JP5629455B2 (ja) 2009-12-14 2009-12-14 干渉計

Country Status (3)

Country Link
US (1) US9372066B2 (enExample)
EP (1) EP2336714B1 (enExample)
JP (1) JP5629455B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5993207B2 (ja) * 2012-05-22 2016-09-14 東京エレクトロン株式会社 光干渉システム及び基板処理装置
CN105258635A (zh) * 2015-11-09 2016-01-20 中国科学院长春光学精密机械与物理研究所 一种宽波段斐索激光干涉仪标准参考镜
CN110006349A (zh) * 2019-04-29 2019-07-12 西安交通大学 一种高容差共光路光栅干涉仪

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520615A (en) * 1965-10-25 1970-07-14 Vickers Ltd Optical phase measuring apparatus
JPS6055206A (ja) * 1983-09-05 1985-03-30 Japan Aviation Electronics Ind Ltd 光干渉計
JPH0454406A (ja) * 1990-06-25 1992-02-21 Toyota Autom Loom Works Ltd 光学式変位計
US5153669A (en) * 1991-03-27 1992-10-06 Hughes Danbury Optical Systems, Inc. Three wavelength optical measurement apparatus and method
JPH0571913A (ja) 1991-09-11 1993-03-23 Fuji Xerox Co Ltd 干渉計
US6229619B1 (en) * 1996-02-12 2001-05-08 Massachusetts Institute Of Technology Compensation for measurement uncertainty due to atmospheric effects
JPH1166600A (ja) * 1997-08-08 1999-03-09 Tdk Corp 受発光素子と光学ピックアップ装置
US6455861B1 (en) * 1998-11-24 2002-09-24 Cambridge Research & Instrumentation, Inc. Fluorescence polarization assay system and method
JP2000234914A (ja) * 1999-02-15 2000-08-29 Tokimec Inc 歪み検出装置
JP2001256654A (ja) * 2000-03-13 2001-09-21 Optware:Kk 光情報記録装置、光情報再生装置、光情報記録再生装置および光情報記録媒体
DE60001139T2 (de) * 2000-08-16 2003-09-11 Agilent Technologies, Inc. (N.D.Ges.D.Staates Delaware) Wellenlängenmesser mit grober und feiner Messanlage
WO2002093237A1 (en) * 2001-05-15 2002-11-21 Optellios, Inc. Polarization analysis unit, calibration method and optimization therefor
US6778280B2 (en) * 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
US6897962B2 (en) * 2002-04-18 2005-05-24 Agilent Technologies, Inc. Interferometer using beam re-tracing to eliminate beam walk-off
US6943881B2 (en) * 2003-06-04 2005-09-13 Tomophase Corporation Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
WO2005003862A1 (de) * 2003-07-05 2005-01-13 Carl Zeiss Smt Ag Vorrichtung zur polarisationsspezifischen untersuchung eines optischen systems
JP4514209B2 (ja) 2004-10-15 2010-07-28 キヤノン株式会社 位置検出装置及び方法
JP4939765B2 (ja) * 2005-03-28 2012-05-30 株式会社日立製作所 変位計測方法とその装置
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
DE602006017558D1 (de) * 2005-08-09 2010-11-25 Gen Hospital Corp Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie
JP4810693B2 (ja) * 2007-02-09 2011-11-09 富士フイルム株式会社 光波干渉測定装置
JP5305732B2 (ja) * 2008-05-13 2013-10-02 キヤノン株式会社 干渉計
US20110075153A1 (en) * 2009-09-25 2011-03-31 Hogan Josh N Compact isolated analysis system

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