JP2007171206A5 - - Google Patents

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Publication number
JP2007171206A5
JP2007171206A5 JP2006346376A JP2006346376A JP2007171206A5 JP 2007171206 A5 JP2007171206 A5 JP 2007171206A5 JP 2006346376 A JP2006346376 A JP 2006346376A JP 2006346376 A JP2006346376 A JP 2006346376A JP 2007171206 A5 JP2007171206 A5 JP 2007171206A5
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JP
Japan
Prior art keywords
component
measurement
measuring displacement
displacement according
light beam
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JP2006346376A
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English (en)
Japanese (ja)
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JP2007171206A (ja
JP5346152B2 (ja
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Priority claimed from US11/316,855 external-priority patent/US7440113B2/en
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Publication of JP2007171206A5 publication Critical patent/JP2007171206A5/ja
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JP2006346376A 2005-12-23 2006-12-22 リトロー型干渉計 Active JP5346152B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/316,855 2005-12-23
US11/316,855 US7440113B2 (en) 2005-12-23 2005-12-23 Littrow interferometer

Publications (3)

Publication Number Publication Date
JP2007171206A JP2007171206A (ja) 2007-07-05
JP2007171206A5 true JP2007171206A5 (enExample) 2010-02-04
JP5346152B2 JP5346152B2 (ja) 2013-11-20

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Family Applications (1)

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JP2006346376A Active JP5346152B2 (ja) 2005-12-23 2006-12-22 リトロー型干渉計

Country Status (6)

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US (1) US7440113B2 (enExample)
JP (1) JP5346152B2 (enExample)
CN (1) CN1987341A (enExample)
DE (1) DE102006037529A1 (enExample)
GB (1) GB2433776A (enExample)
NL (1) NL1033095C2 (enExample)

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CN107462167B (zh) * 2017-08-24 2019-11-05 中国科学院长春光学精密机械与物理研究所 长行程、高精度测量的光栅位移测量方法
CN107607045B (zh) * 2017-08-24 2019-12-13 中国科学院长春光学精密机械与物理研究所 基于衍射光栅的长行程、高精度位移测量系统
CN107655411B (zh) * 2017-08-24 2019-10-15 中国科学院长春光学精密机械与物理研究所 长行程、高精度测量的光栅位移测量系统
CN107462166B (zh) * 2017-08-24 2019-10-15 中国科学院长春光学精密机械与物理研究所 基于衍射光栅的长行程、高精度位移测量方法
CN108775869A (zh) * 2018-03-23 2018-11-09 中国科学院长春光学精密机械与物理研究所 实现长行程三维位移测量的光栅位移测量系统及方法
CN113865480A (zh) * 2021-09-18 2021-12-31 桂林电子科技大学 一种基于zemax仿真的外差式光栅干涉仪读头系统信号分析方法
CN115046482B (zh) * 2022-06-15 2023-07-07 中国科学院长春光学精密机械与物理研究所 二维光栅位移测量装置
CN114877811B (zh) * 2022-06-15 2023-06-20 中国科学院长春光学精密机械与物理研究所 一维光栅位移测量装置
CN117871044B (zh) * 2023-12-14 2024-06-25 中国计量科学研究院 一种测定Littrow衍射角的装置及方法
CN118583063B (zh) * 2024-08-05 2024-09-27 中国科学院长春光学精密机械与物理研究所 一种利特罗光栅干涉测量装置及其使用方法

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