JP5600246B2 - シリコンリッチ酸化物を含むナノワイヤーおよびその製造方法 - Google Patents
シリコンリッチ酸化物を含むナノワイヤーおよびその製造方法 Download PDFInfo
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- JP5600246B2 JP5600246B2 JP2009089485A JP2009089485A JP5600246B2 JP 5600246 B2 JP5600246 B2 JP 5600246B2 JP 2009089485 A JP2009089485 A JP 2009089485A JP 2009089485 A JP2009089485 A JP 2009089485A JP 5600246 B2 JP5600246 B2 JP 5600246B2
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- 239000002070 nanowire Substances 0.000 title claims description 182
- 229910052710 silicon Inorganic materials 0.000 title claims description 113
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 112
- 239000010703 silicon Substances 0.000 title claims description 110
- 238000004519 manufacturing process Methods 0.000 title description 24
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 46
- 239000010931 gold Substances 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 150000003376 silicon Chemical class 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 239000002096 quantum dot Substances 0.000 claims description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 238000005401 electroluminescence Methods 0.000 claims description 4
- 238000005424 photoluminescence Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000004020 luminiscence type Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 66
- 238000000034 method Methods 0.000 description 34
- 239000003054 catalyst Substances 0.000 description 23
- 239000007789 gas Substances 0.000 description 18
- 229910052760 oxygen Inorganic materials 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 12
- 239000007787 solid Substances 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 10
- 239000011247 coating layer Substances 0.000 description 7
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- 238000004774 atomic orbital Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
- H01L29/068—Nanowires or nanotubes comprising a junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
- H01L33/18—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Silicon Compounds (AREA)
- Photovoltaic Devices (AREA)
- Led Devices (AREA)
- Light Receiving Elements (AREA)
Description
本発明の一実施形態によるナノワイヤーの製造方法は、図2aおよび図2bに示すように、まず、シリコン基板10の上に金属触媒、例えば、Au金属触媒を基板上にコーティングして金属触媒のコーティング層20を形成する。この際、不純物を除去するために、通常の方法で基板をあらかじめ洗浄することができる。
次いで、チャンバーまたはマイクロチャンバーを準備する。この際、前記チャンバーとしては、ナノワイヤーが成長できる大きさの通常のチャンバーを使用することができ、前記チャンバー内にシリコン基板を位置させる。この後、Arなどの気体と酸素とを注入してナノワイヤーを成長させることができるが、これに関しては、下記の(c)工程でより詳しく説明する。
本工程では、別途の気相のナノワイヤー源を供給せずに、シリコン基板から拡散または気化したナノワイヤー源を使用してナノワイヤーを形成させる。
本発明の製造方法では、前記(c)の工程以降に、形成されたナノワイヤーに熱を加えるか、またはレーザーを照射してシリコン量子ドットを形成させる工程をさらに含んでもよい。加熱する際の条件は、好ましくは800〜1300℃の温度で、好ましくは10〜1500分間行われるが、工程条件に応じて変更することができる。
図2aは、ナノワイヤーの製造方法を示す断面概略図であり、これを参照しながら説明する。
前記製造例1で得られたナノワイヤーを、1100℃で360分間加熱してナノワイヤーを製造した。製造されたナノワイヤーのTEM写真を図7に示した。図7を参照すると、ナノワイヤーの内部にシリコン量子ドットが形成されていることが確認できる。
2、Q2 シェル部、
3 金属ナノドット、
4 シリコン量子ドット、
10 基板、
20 金属触媒層、
30 リッド、
40 第1ナノワイヤー、
50 第2ナノワイヤー、
60 サセプタ、
100 シリコンリッチ酸化物を含むナノワイヤー、
P1 シリコン基板の端部、
P2 シリコン基板の内部、
P3 シリコン基板の中心部。
Claims (8)
- SiOx(ただし、0<x<2)を含むナノワイヤーであって、
前記ナノワイヤーは、コア部とシェル部とからなり、前記コア部は、結晶性または非晶性の前記SiOx(ただし、0<x<2)を含み、前記シェル部は、シリカを含むことを特徴とする、ナノワイヤー。 - 前記ナノワイヤーの縦軸に沿って一列に整列した複数の金属ナノドットを含むことを特徴とする、請求項1に記載のナノワイヤー。
- 前記コア部は、前記ナノワイヤーの縦軸に沿って一列に整列した複数の金属ナノドットを含むことを特徴とする、請求項1または2に記載のナノワイヤー。
- 内部にシリコン量子ドットを含むことを特徴とする、請求項1〜3のいずれか1項に記載のナノワイヤー。
- 前記シェル部は、シリコン量子ドットを含むことを特徴とする、請求項1〜4のいずれか1項に記載のナノワイヤー。
- 前記金属ナノドットは、金、ニッケル、鉄、銀、アルミニウムおよびパラジウムからなる群より選択される少なくとも1種の金属から形成されることを特徴とする、請求項2または3に記載のナノワイヤー。
- 請求項1〜6のいずれか1項に記載のナノワイヤーを含む電子素子。
- 太陽電池、センサー、光検出素子、発光ダイオード、レーザダイオード、エレクトロルミネッセンス素子、フォトルミネッセンス素子、カソードルミネッセンス素子、電界効果トランジスタ、チャージ・トラップ・フラッシュ、表面プラズモン導波路またはMOSキャパシタであることを特徴とする、請求項7に記載の電子素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080076325A KR101475524B1 (ko) | 2008-08-05 | 2008-08-05 | 실리콘 풍부산화물을 포함하는 나노와이어 및 그의제조방법 |
KR10-2008-0076325 | 2008-08-05 |
Publications (2)
Publication Number | Publication Date |
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JP2010037184A JP2010037184A (ja) | 2010-02-18 |
JP5600246B2 true JP5600246B2 (ja) | 2014-10-01 |
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JP2009089485A Expired - Fee Related JP5600246B2 (ja) | 2008-08-05 | 2009-04-01 | シリコンリッチ酸化物を含むナノワイヤーおよびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8513641B2 (ja) |
JP (1) | JP5600246B2 (ja) |
KR (1) | KR101475524B1 (ja) |
CN (1) | CN101643196B (ja) |
Families Citing this family (12)
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KR101457562B1 (ko) * | 2008-07-11 | 2014-11-04 | 삼성전자주식회사 | 실리콘 나노닷 함유 실리카 나노 와이어 및 그의 제조방법 |
US8816324B2 (en) | 2010-02-25 | 2014-08-26 | National University Corporation Hokkaido University | Semiconductor device and method for manufacturing semiconductor device |
CN107090593A (zh) * | 2010-05-11 | 2017-08-25 | 昆南诺股份有限公司 | 线的气相合成 |
JP5733655B2 (ja) * | 2010-05-18 | 2015-06-10 | 国立研究開発法人物質・材料研究機構 | シリコンナノ粒子/シリコンナノワイヤ複合材料、太陽電池、発光デバイス、及び製造法 |
DE102010032747B4 (de) | 2010-07-29 | 2014-07-17 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren zur solaren Herstellung von Nanodrähten mit einem Katalysator |
CN102201483B (zh) * | 2011-05-13 | 2012-10-03 | 中国科学院半导体研究所 | 硅纳米线光栅谐振增强型光电探测器及其制作方法 |
CN102280537B (zh) * | 2011-08-09 | 2013-03-13 | 华中科技大学 | 一种led漫反射杯的制备方法 |
JP5705713B2 (ja) * | 2011-12-05 | 2015-04-22 | 古河電気工業株式会社 | 中空銅コアシリコンナノワイヤー、シリコン複合銅基板及びこれらの製造方法並びにリチウムイオン二次電池 |
WO2013154417A2 (en) * | 2012-04-10 | 2013-10-17 | Mimos Berhad | Nanomaterials and method of fabrication thereof |
US9064942B2 (en) | 2013-01-28 | 2015-06-23 | International Business Machines Corporation | Nanowire capacitor for bidirectional operation |
KR101972056B1 (ko) * | 2017-08-29 | 2019-04-25 | 강원대학교산학협력단 | 비정질 실리콘을 이용한 실리카 나노와이어의 제조방법 |
CN113401864A (zh) * | 2020-06-30 | 2021-09-17 | 吉林大学 | 一种利用激光组装制备半导体微纳米结构的方法及其应用 |
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JP3571287B2 (ja) | 2000-11-09 | 2004-09-29 | 独立行政法人 科学技術振興機構 | 酸化珪素のナノワイヤの製造方法 |
DE10104193A1 (de) * | 2001-01-31 | 2002-08-01 | Max Planck Gesellschaft | Verfahren zur Herstellung einer Halbleiterstruktur mit Siliziumclustern und/oder -nanokristallen und eine Halbleiterstruktur dieser Art |
KR100682933B1 (ko) * | 2005-02-16 | 2007-02-15 | 삼성전자주식회사 | 질화실리콘 표피를 갖는 실리콘 나노선 및 그 제조방법 |
KR100723418B1 (ko) | 2005-02-25 | 2007-05-30 | 삼성전자주식회사 | 실리콘 나노 와이어, 실리콘 나노 와이어를 포함하는반도체 소자 및 실리콘 나노 와이어 제조 방법 |
KR101138865B1 (ko) | 2005-03-09 | 2012-05-14 | 삼성전자주식회사 | 나노 와이어 및 그 제조 방법 |
JP4811851B2 (ja) | 2005-08-24 | 2011-11-09 | 独立行政法人物質・材料研究機構 | シリコンナノワイヤーの架橋成長方法 |
KR101102098B1 (ko) | 2005-11-07 | 2012-01-02 | 삼성전자주식회사 | 가지형 나노 와이어의 제조방법 |
KR100741243B1 (ko) * | 2005-11-07 | 2007-07-19 | 삼성전자주식회사 | 금속 나노닷들을 포함하는 나노 와이어 및 그의 제조방법 |
JP2007319988A (ja) | 2006-06-01 | 2007-12-13 | National Institute For Materials Science | Iv族半導体ナノ細線の製造方法並びに構造制御方法 |
US7776760B2 (en) * | 2006-11-07 | 2010-08-17 | Nanosys, Inc. | Systems and methods for nanowire growth |
US7857907B2 (en) * | 2007-01-25 | 2010-12-28 | Au Optronics Corporation | Methods of forming silicon nanocrystals by laser annealing |
US8093474B2 (en) * | 2007-03-23 | 2012-01-10 | Lawrence Livermore National Security, Llc | Metallic nanospheres embedded in nanowires initiated on nanostructures and methods for synthesis thereof |
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KR20100016725A (ko) | 2010-02-16 |
JP2010037184A (ja) | 2010-02-18 |
US8513641B2 (en) | 2013-08-20 |
CN101643196A (zh) | 2010-02-10 |
KR101475524B1 (ko) | 2014-12-23 |
US20100065809A1 (en) | 2010-03-18 |
CN101643196B (zh) | 2015-04-29 |
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