JP5588784B2 - 圧電デバイスの製造方法及び圧電デバイス - Google Patents

圧電デバイスの製造方法及び圧電デバイス Download PDF

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Publication number
JP5588784B2
JP5588784B2 JP2010184612A JP2010184612A JP5588784B2 JP 5588784 B2 JP5588784 B2 JP 5588784B2 JP 2010184612 A JP2010184612 A JP 2010184612A JP 2010184612 A JP2010184612 A JP 2010184612A JP 5588784 B2 JP5588784 B2 JP 5588784B2
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JP
Japan
Prior art keywords
pair
base
electrodes
vibrating piece
piezoelectric device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010184612A
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English (en)
Japanese (ja)
Other versions
JP2012044495A (ja
JP2012044495A5 (enExample
Inventor
了一 市川
芳明 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2010184612A priority Critical patent/JP5588784B2/ja
Priority to US13/212,030 priority patent/US8823247B2/en
Publication of JP2012044495A publication Critical patent/JP2012044495A/ja
Publication of JP2012044495A5 publication Critical patent/JP2012044495A5/ja
Application granted granted Critical
Publication of JP5588784B2 publication Critical patent/JP5588784B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010184612A 2010-08-20 2010-08-20 圧電デバイスの製造方法及び圧電デバイス Expired - Fee Related JP5588784B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010184612A JP5588784B2 (ja) 2010-08-20 2010-08-20 圧電デバイスの製造方法及び圧電デバイス
US13/212,030 US8823247B2 (en) 2010-08-20 2011-08-17 Piezoelectric vibrating devices including respective packages in which castellations include respective connecting electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010184612A JP5588784B2 (ja) 2010-08-20 2010-08-20 圧電デバイスの製造方法及び圧電デバイス

Publications (3)

Publication Number Publication Date
JP2012044495A JP2012044495A (ja) 2012-03-01
JP2012044495A5 JP2012044495A5 (enExample) 2013-08-29
JP5588784B2 true JP5588784B2 (ja) 2014-09-10

Family

ID=45593500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010184612A Expired - Fee Related JP5588784B2 (ja) 2010-08-20 2010-08-20 圧電デバイスの製造方法及び圧電デバイス

Country Status (2)

Country Link
US (1) US8823247B2 (enExample)
JP (1) JP5588784B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9069005B2 (en) * 2011-06-17 2015-06-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
JP5788728B2 (ja) * 2011-07-21 2015-10-07 日本電波工業株式会社 圧電振動片、圧電デバイス、及び圧電デバイスの製造方法
JP5980530B2 (ja) * 2012-03-15 2016-08-31 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08340184A (ja) * 1995-06-13 1996-12-24 Shimeo Seimitsu Kk 電子部品収納用容器
JPH09148875A (ja) * 1995-11-24 1997-06-06 Kyocera Corp 圧電振動子ならびにその製造方法
JPH09181557A (ja) * 1995-12-25 1997-07-11 Murata Mfg Co Ltd 電子部品
GB2345397B (en) * 1997-08-19 2001-10-31 Citizen Watch Co Ltd Piezoelectric vibrator
US6249049B1 (en) * 1998-06-12 2001-06-19 Nec Corporation Ceramic package type electronic part which is high in connection strength to electrode
JP3296356B2 (ja) * 1999-02-08 2002-06-24 松下電器産業株式会社 弾性表面波デバイスとその製造方法
JP4068367B2 (ja) * 2002-03-08 2008-03-26 シチズンホールディングス株式会社 圧電デバイス用集合基板、圧電デバイス及びその製造方法
JP2005057520A (ja) 2003-08-05 2005-03-03 Matsushita Electric Ind Co Ltd 超小型水晶振動子パッケージ
JP4144036B2 (ja) 2004-05-21 2008-09-03 株式会社大真空 電子部品用パッケージ及び当該電子部品用パッケージを用いた圧電振動デバイス
JP2006032645A (ja) * 2004-07-15 2006-02-02 Daishinku Corp 電子部品用パッケージ
JP4722859B2 (ja) * 2004-11-05 2011-07-13 株式会社Ｎｅｏｍａｘマテリアル 気密封止用キャップ、気密封止用キャップの製造方法および電子部品収納用パッケージ
US20060255691A1 (en) * 2005-03-30 2006-11-16 Takahiro Kuroda Piezoelectric resonator and manufacturing method thereof
JP4804813B2 (ja) * 2005-06-24 2011-11-02 日本電波工業株式会社 圧電発振器
JP4843424B2 (ja) * 2006-09-05 2011-12-21 日本電波工業株式会社 水晶振動子用のガラス封止カバー及びこれを用いた水晶振動子の製造方法
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法
JP2012090252A (ja) * 2010-09-22 2012-05-10 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス
US8232845B2 (en) * 2010-09-27 2012-07-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Packaged device with acoustic resonator and electronic circuitry and method of making the same
JP2012074837A (ja) * 2010-09-28 2012-04-12 Nippon Dempa Kogyo Co Ltd 圧電デバイス
JP5731880B2 (ja) * 2010-10-15 2015-06-10 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
JP2012175492A (ja) * 2011-02-23 2012-09-10 Nippon Dempa Kogyo Co Ltd 圧電デバイス及び圧電デバイスの製造方法
JP2013192027A (ja) * 2012-03-14 2013-09-26 Nippon Dempa Kogyo Co Ltd 圧電デバイス

Also Published As

Publication number Publication date
JP2012044495A (ja) 2012-03-01
US20120043860A1 (en) 2012-02-23
US8823247B2 (en) 2014-09-02

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