JP5587315B2 - 気密なシャフト貫通部を備える真空バルブ - Google Patents

気密なシャフト貫通部を備える真空バルブ Download PDF

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Publication number
JP5587315B2
JP5587315B2 JP2011525508A JP2011525508A JP5587315B2 JP 5587315 B2 JP5587315 B2 JP 5587315B2 JP 2011525508 A JP2011525508 A JP 2011525508A JP 2011525508 A JP2011525508 A JP 2011525508A JP 5587315 B2 JP5587315 B2 JP 5587315B2
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JP
Japan
Prior art keywords
shaft
valve
bearing surface
ring
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011525508A
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English (en)
Japanese (ja)
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JP2012502231A (ja
JP2012502231A5 (enExample
Inventor
エーネ，フロリアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Publication of JP2012502231A publication Critical patent/JP2012502231A/ja
Publication of JP2012502231A5 publication Critical patent/JP2012502231A5/ja
Application granted granted Critical
Publication of JP5587315B2 publication Critical patent/JP5587315B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
    • F16K1/226—Shaping or arrangements of the sealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J1/00—Pistons; Trunk pistons; Plungers
    • F16J1/01—Pistons; Trunk pistons; Plungers characterised by the use of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
    • F16J15/3212—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings with metal springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/322—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip supported in a direction perpendicular to the surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
    • F16K1/226—Shaping or arrangements of the sealing
    • F16K1/2268—Sealing means for the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/02—Spindle sealings with stuffing-box ; Sealing rings
    • F16K41/04—Spindle sealings with stuffing-box ; Sealing rings with at least one ring of rubber or like material between spindle and housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7069—With lock or seal
    • Y10T137/71—With seal

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
JP2011525508A 2008-09-05 2009-08-27 気密なシャフト貫通部を備える真空バルブ Active JP5587315B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08015681 2008-09-05
EP08015681.3 2008-09-05
PCT/EP2009/061061 WO2010026100A1 (de) 2008-09-05 2009-08-27 Vakuumventil mit gasdichter wellendurchführung

Publications (3)

Publication Number Publication Date
JP2012502231A JP2012502231A (ja) 2012-01-26
JP2012502231A5 JP2012502231A5 (enExample) 2012-08-23
JP5587315B2 true JP5587315B2 (ja) 2014-09-10

Family

ID=40350009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525508A Active JP5587315B2 (ja) 2008-09-05 2009-08-27 気密なシャフト貫通部を備える真空バルブ

Country Status (6)

Country Link
US (1) US8727311B2 (enExample)
JP (1) JP5587315B2 (enExample)
KR (2) KR20110057198A (enExample)
CN (1) CN102171499B (enExample)
DE (1) DE112009002071B4 (enExample)
WO (1) WO2010026100A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009014140A1 (de) * 2009-03-24 2010-10-07 Mtu Friedrichshafen Gmbh Klappenanordnung, insbesondere Abgasklappenanordnung
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
ITBS20130168A1 (it) 2013-11-15 2015-05-16 Omb Saleri S P A Valvola per metano in sistemi per autotrazione a tenuta migliorata
JP6677738B2 (ja) * 2015-03-09 2020-04-08 バット ホールディング アーゲー 真空バルブ
US11085564B2 (en) 2015-11-11 2021-08-10 Greene, Tweed Technologies, Inc. Sealing rings and sealing ring assemblies for high temperature end applications
JP6801465B2 (ja) * 2017-01-12 2020-12-16 株式会社島津製作所 真空バルブおよびバルブ製造方法
KR102329142B1 (ko) * 2017-05-30 2021-11-22 주식회사 원익아이피에스 게이트 밸브 조립체
FR3067783B1 (fr) * 2017-06-20 2020-09-04 Ksb Sas Robinet a papillon centre
KR20190057935A (ko) 2017-11-21 2019-05-29 주식회사 해상기술 회전축 실링장치
KR101934295B1 (ko) 2018-01-16 2019-01-02 엘지전자 주식회사 스크롤 압축기
KR102098604B1 (ko) * 2018-03-14 2020-04-08 씰링크 주식회사 직선 및 회전운동 밀폐장치
DE102021102702A1 (de) 2021-02-05 2022-08-11 Vat Holding Ag Ventil, insbesondere Vakuumventil
US11732654B2 (en) * 2021-03-19 2023-08-22 General Electric Company Feed-through assembly
FR3121491B1 (fr) * 2021-03-30 2025-09-05 Safran Aerosystems Hydraulics Etancheite dynamique dans une vanne de regulation de turbomachine d’aeronef

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US734633A (en) * 1903-02-16 1903-07-28 Richard Titus Stuffing-box.
US1293607A (en) * 1917-11-22 1919-02-04 James W Dawson Valve-stem-lubricating shield.
US2066250A (en) * 1932-02-04 1936-12-29 Timken Michigan Company Valve
US2353549A (en) 1941-04-16 1944-07-11 Cherry Burrell Corp Valve
US2655942A (en) * 1948-04-05 1953-10-20 D F Campbell Butterfly valve with sequential rotating and tilting opening and closing movements
US3099431A (en) * 1961-04-07 1963-07-30 Sarco Company Inc Valve with stem seal
GB1105606A (en) 1964-06-05 1968-03-06 Saunders Valve Co Ltd Means for sealing a spindle
US3371676A (en) * 1965-06-18 1968-03-05 Grinnell Corp Lubricated plug valve with adjustable uniform sealing pressure gland
US3544068A (en) * 1968-06-04 1970-12-01 M & J Valve Co Valve construction
US3586289A (en) * 1969-11-21 1971-06-22 Hills Mccanna Co Valve unit and stem packing assembly
US3904173A (en) * 1973-12-10 1975-09-09 Fairbanks Company Butterfly valve assembly
US4111392A (en) * 1976-07-06 1978-09-05 Braukmann Armaturen Ag Valve, especially a radiator valve
JPS5670168A (en) * 1979-11-12 1981-06-11 Greene Jerome Seal device
DE3717724A1 (de) 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
US4886241A (en) * 1987-09-16 1989-12-12 Fisher Controls International, Inc. Valve stem packing containment for high pressure, high temperature
JPH01126483A (ja) * 1987-11-10 1989-05-18 Mitsubishi Electric Corp ゲートバルブ装置
DE3801998C1 (enExample) * 1988-01-23 1989-05-18 Schertler, Siegfried, Haag, Ch
US4885947A (en) * 1988-12-19 1989-12-12 Huntington Mechanical Laboratories, Inc. Mechanism for feedthrough of rotary motion to a sealed chamber
JPH0394485A (ja) 1989-06-23 1991-04-19 Fuji Electric Co Ltd トンネル型ジョセフソン素子および超伝導トランジスタ
JP2535412Y2 (ja) * 1990-01-16 1997-05-14 高砂熱学工業株式会社 回転弁ボンネット部のシール構造
US5044606A (en) * 1990-05-31 1991-09-03 The United States Of America As Represented By The United States Department Of Energy Valve stem and packing assembly
JPH0789903B2 (ja) 1991-09-06 1995-10-04 株式会社荏原総合研究所 光合成微生物培養方法及び装置
JP2573371Y2 (ja) * 1992-02-10 1998-05-28 株式会社巴技術研究所 バタフライ弁の軸封装置
DE19646040A1 (de) * 1996-11-08 1998-05-20 Pfannenschmidt Erhard Schaltarmatur
JPH1126483A (ja) 1997-06-30 1999-01-29 Matsushita Electric Works Ltd 樹脂封止半導体装置及びその樹脂封止方法
JP3294179B2 (ja) * 1997-12-17 2002-06-24 株式会社山武 弁装置
US5927685A (en) * 1998-03-16 1999-07-27 Jvp, Inc. Sealing device for a valve stem of a valve
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6367770B1 (en) * 2000-03-23 2002-04-09 Vat Holding Ag Vacuum valve for separating two vacuum chambers
US6439255B1 (en) 2000-11-17 2002-08-27 Mks Instruments, Inc. Valve flapper with dynamic circumference seal
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
DE10133631A1 (de) * 2001-07-11 2003-01-30 Siemens Ag Verfahren zur berührungslosen Erfassung der Position einer Drosselklappenwelle eines Drosselklappenstutzens und Drosselklappenstutzen
GB2404237A (en) 2003-07-22 2005-01-26 Paul Adrian Wareham Butterfly valve
US7661184B2 (en) * 2003-11-26 2010-02-16 Swagelok Company Load applying tool
CN100513850C (zh) 2005-08-23 2009-07-15 浙江华夏阀门有限公司 三角截面密封套

Also Published As

Publication number Publication date
WO2010026100A1 (de) 2010-03-11
CN102171499A (zh) 2011-08-31
KR20160110567A (ko) 2016-09-21
JP2012502231A (ja) 2012-01-26
US20110168937A1 (en) 2011-07-14
CN102171499B (zh) 2013-03-20
KR101761245B1 (ko) 2017-08-04
DE112009002071B4 (de) 2012-11-08
DE112009002071A5 (de) 2011-07-21
KR20110057198A (ko) 2011-05-31
US8727311B2 (en) 2014-05-20

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