Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
  • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
  • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
  • F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
  • F16K1/226—Shaping or arrangements of the sealing
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J1/00—Pistons; Trunk pistons; Plungers
  • F16J1/01—Pistons; Trunk pistons; Plungers characterised by the use of particular materials
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J15/00—Sealings
  • F16J15/16—Sealings between relatively-moving surfaces
  • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
  • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
  • F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
  • F16J15/3212—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings with metal springs
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16J—PISTONS; CYLINDERS; SEALINGS
  • F16J15/00—Sealings
  • F16J15/16—Sealings between relatively-moving surfaces
  • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
  • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
  • F16J15/322—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip supported in a direction perpendicular to the surfaces
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
  • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
  • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
  • F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
  • F16K1/226—Shaping or arrangements of the sealing
  • F16K1/2268—Sealing means for the axis of rotation
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K41/00—Spindle sealings
  • F16K41/02—Spindle sealings with stuffing-box ; Sealing rings
  • F16K41/04—Spindle sealings with stuffing-box ; Sealing rings with at least one ring of rubber or like material between spindle and housing
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
  • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T137/00—Fluid handling
  • Y10T137/7069—With lock or seal
  • Y10T137/71—With seal

Definitions

• the invention relates to a vacuum valve for interrupting, releasing or regulating a flow of a medium flowing in the interior of the vacuum valve along a flow path according to the preamble of claim 1.
• Vacuum valves are used.
• the highly sensitive semiconductor or liquid crystal elements sequentially go through a plurality of process chambers in which the semiconductor elements located within the process chamber are processed by means of one processing device each. Both during the processing process within the process chamber, as well as during transport from process chamber to process chamber, the highly sensitive semiconductor elements must always be in a protected atmosphere - especially in a vacuum and particle-free environment or a protective gas atmosphere.
• the process chambers are connected to one another, for example, via connecting passages, the process chambers being able to be opened by means of vacuum valves for transferring the parts from one to the next process chamber and subsequently sealed gas-tight in order to carry out the respective production step.
• movable transfer chambers are used, which dock to the process chambers and the semiconductor elements in Protective atmosphere between the process chambers can transport.
• vacuum valves which have been passed through semiconductor parts are also referred to as vacuum transfer valves, because of their rectangular opening cross section also as rectangular valves and due to their usual functioning also as slide valve, rectangular slide or transfer slide valve.
• Slide valves with a wedge-shaped valve closure are also called slide valves.
• vacuum valves are used for opening and closing gas channels or regulating a flow of a medium through the gas channel.
• Such valves are located, for example, within a piping system between a process chamber or a transfer chamber and a vacuum pump or the atmosphere.
• the opening cross-section of such valves, also called pump valves, is generally much smaller than in a vacuum transfer valve.
• Different designs of such vacuum valves are known, for example vacuum angle valves, slide valves, butterfly valves, butterfly valves and shuttle valves.
• valves are therefore also referred to as control valves.
• valves with, on the one hand, a linear and, on the other hand, a rotary closing and opening movement, a combination of movements also being possible.
• Vacuum valves whose flow cross section through a
• Rotary movement of the valve closure is variable, are, for example, butterfly valves, which are also referred to as butterfly valves or throttle valves, as well as shuttle valves, Venetian blind valves or Chevrontypventile.
• a rotary flap valve the flow of the medium flowing along the flow path is interrupted, released or regulated by a rotational movement of a closure flap arranged in the flow path, wherein at least one component of the rotation axis of the closure flap runs perpendicular to the flow axis of the flow path.
• Butterfly valves, butterfly valves and butterfly valves are well known and are shown inter alia in GB 2 404 237 (Wareham) or US 2004/0129909 A1 (Wiese).
• a Venetian blind valve has a plurality of such flaps whose axes of rotation are usually parallel to each other and perpendicular to the flow axis of the flow path.
• a Chevrontypventil has two mutually rotatable superimposed parallel closure plates with a substantially parallel to the axis of rotation axis of rotation.
• the closing plates each have - in particular radially extending slot-like - openings which are aligned in a first relative rotation of the closing plates to each other and thus release the flow path, and are covered in a second relative rotation of the closing plates and thus block the flow path.
• a closure plate is pivoted into the flow path about an axis extending essentially parallel to the axis of flow, so that the opening cross-section is reduced and the flow path can be blocked.
• valve closure in particular a closure plate, is pushed linearly into the flow path in a generally perpendicular direction to the flow axis.
• the gas-tight closure takes place either by means of this linear movement or additionally by a second movement in a direction parallel to the flow path.
• a slide valve in which the closing and sealing operation takes place via a single linear movement for example, either a wedge valve, as shown inter alia in US 6,367,770 Bl (Duelli), or under the product name "MONOVAT series 02 and 03" known and designed as a rectangular insert valve transfer valve the company VAT Vacuum valves AG in Hague, Switzerland, whose structure and operation is described for example in US 4,809,950 (Geiser) and US 4,881,717 (Geiser).
• a suitable material for sealing rings is, for example, the elastic sealing material known under the trade name Viton®.
• the valve drive can be provided for generating the movement within the vacuum region.
• Constructions are known in which vacuum-suitable stepper motors are used without lubricant. The production of such motors requires special materials for bearings, etc., in order to minimize the generation of undesirable particles, which are caused inter alia by friction, in the vacuum region. Even if the arrangement of the drive in the interior of the vacuum valve, the transmission of movement from the atmosphere in the vacuum area is avoided and can be dispensed with appropriate seals, this arrangement of the drive in the vacuum range, especially when used in highly sensitive ultra-high vacuum applications comparatively complex and isolated not at all possible.
• the valve drive for generating the movement is therefore usually arranged outside the vacuum region in the atmospheric region, wherein the movement is then conducted in a gastight manner via at least one member, in particular a shaft, from the atmospheric region into the inner region of the valve by means of a sealing passage.
• the shaft via the sealing shaft passage gas-tight into Vacuum is performed by at least one sealing ring between the shaft and the bushing is arranged.
• US Pat. No. 4,885,947 (Balter et al.) Describes a vacuum rotary feedthrough having a first and a second shaft for transmitting rotary movements from the outside of the vacuum chamber to the interior of the vacuum chamber.
• the first shaft is formed as a hollow shaft and the second shaft is rotatably mounted in the first shaft.
• the waves do not form continuous waves from the vacuum side to the atmosphere side.
• the transmission of the rotational movements takes place via a complex transmission mechanism.
• the first shaft has a recess inclined relative to the axis of rotation and arranged eccentrically, into which projects a conical sleeve. By a wobbling motion of the conical sleeve, the first shaft is rotated.
• the rotation of the second shaft also takes place via an eccentric drive.
• the waves are sealed by a bellows. Due to the complex structure of this vacuum rotary feedthrough, the precision and stability of the transmission of the rotational movements is impaired. Furthermore, only relatively small torques can be transmitted.
• Packing seal in the housing ensures a seal between the cylindrical valve stem and a cylindrical wall of the valve housing.
• the cylindrical wall encloses the cylindrical valve stem, wherein the packing seal in the annular intermediate region between the wall and the
• Valve stem is arranged.
• the annular packing seal consists of a pair of wedge-shaped packing elements guided inside each other.
• An axial force exerted on the packing elements by means of springs causes the packing gasket to be compressed in the radial direction between the cylindrical valve stem and the cylindrical wall, so that the annular gap between the cylindrical valve stem and the cylindrical wall is completely filled by the packing gasket in a sealing manner ,
• the axial force is caused by springs.
• a problem of the device described for biasing the packing seal is that in the case of a conditional due to thermal expansion of the packing seal in the radial direction inevitably to a drastic increase of the radial sealing force on the cylindrical valve stem and thus to increased wear of the seal, in particular Twisting the valve stem, comes.
• the described device may be conditionally suitable to compensate for an axial expansion of the packing seal parallel to the valve stem by the resilience of the spring, but it is to ensure a substantially radial sealing force of the seal on the rotatable valve stem with thermally induced expansion of the seal in the radial direction Valve stem not suitable.
• the invention comprises a vacuum valve for interrupting, releasing or regulating a flow of a medium flowing in the interior of the vacuum valve along a flow path.
• This vacuum valve can thus both a two or more discrete states - eg open and closed - switchable valve or an arbitrarily adjustable control valve with within certain limits freely adjustable Be flow cross section.
• the medium flowing through the valve is preferably a gas or a liquid.
• the vacuum valve has a valve housing, which separates the interior of the vacuum valve from the outer atmosphere of the vacuum valve gas-tight.
• the valve housing may be in one piece or consist of several individual parts that are connected to one another such that the inner region is vacuum-tightly separated from the atmospheric region.
• the valve housing preferably has at least two ports which form openings to the interior of the vacuum valve and through which the flow path leads.
• the vacuum valve has a valve drive, which can generate a movement in the atmosphere, ie outside the interior.
• the valve drive can be designed as an electric, pneumatic or hydraulic motor, in particular as a stepping motor or pneumatic cylinder unit, or as another drive for generating a rotary or translatory, ie linear, movement.
• the generally associated with the vacuum valve valve drive is coupled to the valve housing, in this at least partially integrated or decoupled from this.
• a shaft is coupled to the valve drive such that the motion generated by the drive in the atmosphere causes or represents movement of the shaft.
• Under the shaft is generally a mechanical member for transmitting a rotational or translational movement
• the movement is preferably either a rotational movement about the longitudinal axis of the shaft or a linear thrust movement along the longitudinal axis of the shaft.
• the shaft has a geometric shaft axis, which is formed in particular by the geometric longitudinal axis of the shaft and which extends in particular through the geometric cross-section center.
• the shaft is guided gas-tight from the atmosphere area in the vacuum-tight inner region of the valve housing by means of a sealing shaft passage.
• the shaft passage is dynamically sealed, i. the tightness of the shaft passage is ensured not only in the static state of the shaft but also when moving the shaft.
• the shaft passageway prevents gas communication between the atmosphere area and the interior area and ensures a gas-tight, but relative movement enabling, direct or indirect connection between the static valve housing and the dynamic shaft.
• a valve closure is arranged in the flow path.
• This valve closure is coupled to the shaft, so that the movement generated by the valve drive via the shaft leads to a movement of the valve closure, wherein the valve drive, the shaft, the shaft passage, the valve closure, the valve seat and the valve housing are formed such that the movement interrupting, Enabling or regulating the flowing along the flow path flow of the medium is effected.
• the shaft bushing has a first sealing ring, which consists of a material which expands when exposed to heat, in particular an O-ring made of an elastomer.
• the material may be a fluoroelastomer, for example, one of the materials available under the following names in retail: Viton ® fluoroelastomer such. B. Viton ® A, Viton ® B; Dai-el ® fluoroelastomer such. B. Dai- el® G 902, etc .; Tecnoflon TM or Tecnoflon TM fluoroelastomer.
• the first sealing ring surrounds the shaft gas-tight in the radial direction sealingly concentric.
• the first sealing ring surrounds the shaft like a belt, wherein there is a sealing contact between the inner surface of the first sealing ring and the outer surface of the shaft.
• the acting in relation to the shaft axis in the radial direction pressing force of the first sealing ring is such that the shaft depending on the embodiment of the invention, a rotational movement about the
• the shaft passage also has a bearing surface which is directly or indirectly coupled to the valve housing and surrounds and encloses the shaft.
• the support surface is formed by a shoulder in a hole of the valve housing, wherein the shaft is passed through the hole and the shoulder in the hole surrounds the shaft rings.
• the bearing surface either by a portion of the valve housing or other element, the coupled with the valve housing, for example, a sleeve or sleeve are formed.
• the first sealing ring is gas-tight sealing on the bearing surface and fixes the sealing ring in a direction parallel to the shaft and thus to the shaft axis, ie in the axial direction.
• the support surface in a direction axially of the shaft, so that the sealing ring is axially fixed in a direction parallel to the shaft.
• the support surface extends substantially in a plane to which the shaft axis forms a normal. In other words, in this case the normals of the support surface run parallel to the shaft axis. However, it is also possible that these normals of the support surface extend in directions that are not parallel to the shaft axis, but not perpendicular to the shaft axis.
• the support surface does not necessarily have to form a geometrically exact plane, but in particular can also be an inwardly or outwardly inclined surface of a cone section, which is why in the context of the invention of a support surface is the speech, "substantially" in said plane runs.
• the shaft bushing comprises a support ring which is arranged concentrically around the shaft and in axial opposition to the support surface.
• the support ring consists of a substantially rigid material.
• the support ring is not or only negligibly elastic compared to the first sealing ring and does not or only negligibly expands when exposed to heat compared to the first sealing ring.
• the support ring is preferably made of a metal, an alloy, a
• Ceramic material or other rigid material that hardly tends to thermal expansion compared to an elastomer or other sealant of the first sealing ring.
• the support ring is limited axially movable relative to the support surface, the valve housing and parallel to the shaft axis and thus parallel to the shaft.
• the support ring has on an area facing the bearing surface, an inner conical segment which extends concentrically around the shaft and encloses this.
• the support ring has an inner cone portion, wherein the center axis of the cone portion coincides with the shaft axis.
• the conical segment widens in the direction of the contact surface with a cone opening angle.
• the inner diameter of the support ring increases in the direction of the support surface, in particular continuously. Under the conical segment is generally a portion of the support ring to understand.
• the inner conical segment of the support ring widens in the direction of the support surface, for example, with a cone opening angle of 45 ° to 135 °, in particular 60 ° to 120 °, in particular 80 to 100 °, with the cone opening angle as the inner angle of the virtual
• Cone tip of the cone which is spanned by the conical segment to understand.
• the first sealing ring is at least partially enclosed by the conical segment of the support ring and is clamped between the conical segment and the support surface.
• An elastic spring for example a spiral spring around the shaft, presses the support ring axially in the direction of the bearing surface in such a way that the conical segment presses the first sealing ring elastically yielding onto the bearing surface and the shaft essentially with constant contact pressure.
• the conical segment exerts both a force in the direction radially to the shaft, as well as parallel to the shaft in
• the cone opening angle is thus such that a radial expansion of the first sealing ring caused by heat acting on the first sealing ring causes an axial movement of the supporting ring in the direction away from the bearing surface.
• the elastic spring is in this case designed such that it yields the axial movement of the support ring caused by the radial expansion.
• the first sealing ring is formed in one embodiment of the invention as a first O-ring.
• first O-ring In the axial direction there is a substantially annular, gas-tight contact between the first O-ring and the support surface.
• first O-ring In the radial direction There is a substantially annular, gas-tight contact between the first O-ring and the shaft.
• a supporting, preferably also annular contact Between the first O-ring and the inner conical segment of the support ring is a supporting, preferably also annular contact, so that the first O-ring is supported in an oblique direction to the shaft and in an inclined direction to the support surface.
• the first O-ring thus has around three contact areas, namely a first contact area with the support surface, a second contact area with the shaft and a third contact area with the inner conical segment of the support ring.
• the three contact areas form a triangle, in the corners of which the contact areas are arranged.
• the contact area with the inner conical segment of the support ring is preferably opposite the two other contact areas so that the inner conical segment presses the first O-ring evenly on both the support surface and the shaft.
• the support surface facing portion of the support ring on the inner region and the support ring and the spring are arranged in the atmosphere region.
• the portion of the support ring pointing away from the support surface points to the inner region and the support ring and the spring are arranged in the inner region.
• the valve drive is designed to generate a rotational movement.
• the shaft bushing here is a shaft rotary feedthrough.
• the closing and opening or regulating of the flow path can be effected by a rotational movement of the shaft and the valve closure around the shaft axis.
• the vacuum valve is, for example, a butterfly valve, a butterfly valve, a throttle valve, a shuttle valve, a shutter valve, or a chevron type valve.
• valve drive is designed to produce a linear movement.
• the shaft passage is thus one
• the closing and opening or regulation of the flow path is effected by a linear sliding movement of the shaft and the valve closure along the shaft axis.
• the vacuum valve is for example a slide valve, a transfer valve or a wedge slide.
• a second sealing ring is provided, which is arranged on a side facing away from the support surface portion of the support ring between the example cylindrical inner surface of the support ring and the example cylindrical outer surface of the shaft.
• the lubricant increases the tightness of the first sealing ring and thus the shaft passage and reduces the wear of the first sealing ring during movement of the shaft.
• the heat capacity of the entire shaft passage is increased by the increased heat capacity of the lubricant, so that in the case of a brief increase in temperature inside the valve, the temperature increase of the first sealing ring and thus its thermal expansion is reduced.
• the second sealing ring of the mechanical guide between the support ring and the shaft is used.
• FIG. 1 shows a schematic cross section through a vacuum valve with a shaft passage in an overview view
• Fig. 2 is a schematic cross section through a
• FIG. 1 by means of a schematic cross-section in an overview view, a vacuum valve 1, which is connected to the
• the vacuum valve 1 has a valve housing 2, which separates the inner region 3 of the vacuum valve 1 from the outer atmosphere region 4 in a gastight manner.
• a valve drive 5 is coupled, by means of which a movement in the atmospheric region 4 can be generated. Since a so-called rotary flap valve is shown in FIG. 1, the valve drive 5 is designed to produce a rotational movement, which is illustrated by means of the arrow 9.
• a shaft 6 is coupled to the valve drive 5 and rotatable about the geometric shaft axis 7 thereof.
• the shaft 6 is rotationally symmetrical and straight with respect to the shaft axis 7.
• the shaft 6 is guided gas-tight from the atmosphere region 4 in the inner region 3 through the valve housing 2, so that the movement generated by the valve drive means of the shaft. 6 is guided from the atmosphere area 4 in the inner region 3.
• a valve closure 8 in the form of a rotatable closing flap is arranged in the flow path F, which is coupled to the shaft 6, mounted thereon and guided by the same.
• the interruption, release or regulation of the flow of the medium flowing along the flow path F is effected by the rotating movement, illustrated by the arrow 9.
• the vacuum valve 1 is closed and the flow path F thus interrupted.
• FIG. 2 shows a shaft leadthrough 20, in particular the shaft leadthrough 20 of the embodiment from FIG. 1 or another type of vacuum valve.
• the shaft passage 20 has a first sealing ring 21 in Form of a first O-ring, which consists of a material which expands when exposed to heat, for example an elastomer, and which surrounds the cylindrical outer surface of the shaft 6 in a gas-tight, concentric sealing manner in the radial direction.
• the first sealing ring 21 lies on one
• Support surface 22 which is coupled to the valve housing 2. Under the support surface that surface is to be understood, on which the first sealing ring 21 actually rests.
• the support surface 22 is formed in the valve housing 2.
• the support surface 22 surrounds the shaft 6 and points in a direction axially to the shaft 6.
• the support surface 22 lies in a plane 22a, which perpendicular to the shaft axis 7 is pierced.
• the geometric shaft axis 7 of the shaft 6 thus forms a normal to this plane 22a.
• the first sealing ring 21 is gas-tight in the axial direction sealingly on the support surface 22, that the first sealing ring 21 is axially fixed in a direction parallel to the shaft 6. In the present case, this direction runs to the interior 3.
• the shaft feedthrough 20 comprises a support ring 23, which consists of a rigid material, in particular an alloy, and is arranged concentrically around the shaft 6 and in axial opposition to the support surface 22.
• the support ring 23 is limited axially relative to the support surface 22 and the shaft 6, ie parallel to the shaft axis 7, movable.
• an inner conical segment 24 is formed which extends concentrically around the shaft 6 and encloses this.
• the inner conical segment 24 widens in the direction of the support surface 22 and the inner region 3.
• the first Sealing ring 21 is at least partially enclosed by the inner conical segment 24.
• the inner conical segment 24 of the support shaft 23 which is rotationally symmetrical about the shaft axis 7 expands in the embodiment shown in the direction of the support surface 22 with a cone opening angle ⁇ of 90 °.
• the cone angle of opening ⁇ is to be understood as meaning the inner angle of the apex of the virtual cone 30, which is spanned by the inner conical segment 24.
• the cone opening angle ⁇ is such that a radial expansion of the first sealing ring 21, which is caused by a heat action on the first sealing ring 21, causes an axial movement of the support ring 23 in the direction away from the support surface 22, wherein the elastic Spring 25 is designed such that it yields the caused by the radial expansion axial movement of the support ring 23.
• a second sealing ring 28 is provided, which is arranged on a side facing away from the support surface 22 portion 27 of the support ring 23 radially between an inner groove 31 of the support ring 23 and the outer surface of the shaft 6.
• a lubricant portion 29 is formed, which is formed for receiving a lubricant for producing a sealing grease film between the shaft 6 and the first seal 21.
• This grease film increases the tightness between the first sealing ring 21 and the shaft 6.
• the wear of the first sealing ring 21 is reduced and unwanted material particles are absorbed in the lubricant.
• the shaft passage 20 of the vacuum valve 1 according to the invention shown in FIG. 2 can be used both as a shaft rotary feedthrough and as a shaft slide bushing.
• the valve drive 5 is designed to generate a rotational movement and the closing, opening and regulating of the flow path F can be effected by a rotational movement of the shaft 6 and the valve closure 8 about the shaft axis 7.
• the valve drive 5 is designed to generate a linear movement and the closing, opening and regulating of the flow path F is effected by a linear sliding movement of the shaft 6 and the valve closure 8 along the shaft axis 7.

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• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Combustion & Propulsion (AREA)
• Details Of Valves (AREA)
• Sliding Valves (AREA)

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• 2009
  • 2009-08-27 KR KR1020117007413A patent/KR20110057198A/ko not_active Ceased
  • 2009-08-27 DE DE200911002071 patent/DE112009002071B4/de active Active
  • 2009-08-27 KR KR1020167025333A patent/KR101761245B1/ko active Active
  • 2009-08-27 CN CN2009801388755A patent/CN102171499B/zh active Active
  • 2009-08-27 US US13/062,458 patent/US8727311B2/en active Active
  • 2009-08-27 WO PCT/EP2009/061061 patent/WO2010026100A1/de not_active Ceased
  • 2009-08-27 JP JP2011525508A patent/JP5587315B2/ja active Active

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