JP5585352B2 - リードフレーム、半導体装置及びその製造方法 - Google Patents
リードフレーム、半導体装置及びその製造方法 Download PDFInfo
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- JP5585352B2 JP5585352B2 JP2010218853A JP2010218853A JP5585352B2 JP 5585352 B2 JP5585352 B2 JP 5585352B2 JP 2010218853 A JP2010218853 A JP 2010218853A JP 2010218853 A JP2010218853 A JP 2010218853A JP 5585352 B2 JP5585352 B2 JP 5585352B2
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- Prior art keywords
- lead
- bus bar
- inner lead
- wire
- die stage
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- 239000010931 gold Substances 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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Description
例えば多数の外部接続端子(リード)を持つ樹脂封止パッケージを備える半導体装置を製造する場合、半導体チップの多数の電極(信号系パッドや電源系パッド)とリードフレームの多数のインナーリードとを、それぞれ、多数のワイヤで接続することになる。
また、インナーリードと半導体チップとの間にバスバーを設ける場合、図12に示すように、バスバーにボンディングするワイヤの長さは、インナーリードにボンディングするワイヤの長さより短くなる。例えば、インナーリードに接続されるワイヤの長さが約3mm程度の場合、バスバーに接続されるワイヤの長さは約2mm程度となる。
本実施形態にかかるリードフレームは、半導体装置のパッケージ[ここではQFP(Quad Flat Package)]に用いられるものであって、図2(A)に示すように、同一のパターンを複数個備える金属製のリードフレームである。なお、リードフレームは、例えば銅や鉄などの金属材料からなる。
また、インナーリード5及び吊りリード9を固定するテープ7を備える[図2(B)参照]。
これにより、後述するように、図1(B)に示すように、ワイヤボンディングした場合に、インナーリード5に接続されるワイヤ12とバスバー8に接続されるワイヤ11との距離を離すことができる。
本実施形態では、ダイステージ1をダウンセットして、インナーリード5に対して約0.20mm下がるようにしている。また、吊りリード9を曲げて、その先端部がインナーリード5に対して約0.10mm下がるようにしている。つまり、インナーリード5の先端部に対して、吊りリード9の先端部が約0.10mmだけ下方に位置するようにしている。なお、インナーリード5や吊りリード9の厚さは約0.125mmである。
まず、図4(A)に示すように、吊りリード9及びバスバー8がインナーリード5と同一平面上に位置すると、バスバー8に接続されるワイヤ11とインナーリード5に接続されるワイヤ12との距離が近くなり、樹脂封止工程でワイヤフローによってショートが生じる危険性が高い。特に、多数のワイヤが密集する多ピンQFPではその危険性が高い。
これに対し、ワイヤフローによってショートが生じるのを防止するために、図4(B)に示すように、バスバー8をディプレスすることが考えられる。つまり、吊りリード9にプレス加工を施して、バスバー8をインナーリード5の先端部よりも下方に位置させることで、バスバー8に接続されるワイヤ11とインナーリード5に接続されるワイヤ12との距離を離すことが考えられる。
そこで、本実施形態では、上述のように、図1(B)に示すように、吊りリード9を下方に曲げることで、吊りリード9をインナーリード5に対して傾斜させ、バスバー8のワイヤ接続面8Aの位置を、インナーリード5のワイヤ接続面5Aの位置に対して下方へずらしている。
まず、リードフレームの素材となる金属板をエッチング又はプレス加工することによって、ダイステージ1、インナーリード5、バスバー8及び吊りリード9等を有する形状にパターニングする[図1(A),図2(B)参照]。なお、この段階では、インナーリード5のばたつきを防止するために、インナーリード5はバスバー8まで延びており、櫛状に接続された状態になっている。
次に、インナーリード5のばたつきを防止するために、耐熱性のテープ(例えばポリイミドテープ等)でインナーリードの外側部分(アウターリード側の部分)を固定する[図2(B)参照]。
次に、ダイステージ1を支持するサポートバー2をディプレスし、ダイステージ1を下方へ落とす。つまり、ダイステージ1をダウンセットする[図1(B)参照]。
ここでは、図7に示すように、リードフレームを裏返しにして、吊りリード9を、傾斜部を有する台16の上に載せ、テープ7(図示せず)が貼り付けられている部分の近傍の部分を工具17でたたいて曲げ加工を施す。このような曲げ加工を施された吊りリード9は、塑性変形によって曲がっているものとなる。
次に、本実施形態にかかる半導体装置の製造方法について、図8(A)〜図9(J)を参照しながら説明する。
まず、上述のようにして製造したリードフレームを用意する。つまり、吊りリード9が下方に曲がっており、インナーリード5に対して傾斜しており、バスバー8のワイヤ接続面8Aの位置が、インナーリード5のワイヤ接続面5Aの位置に対してフレーム厚さ方向へずれているリードフレームを用意する[図1(A),図1(B)参照]。
まず、図9(A),図9(B)に示すように、支持台となるヒートコマ14上に、半導体チップ10を搭載したリードフレームを載せる。なお、ヒートコマ14は、インナーリード5とバスバー8及び吊りリード9が同一平面上に位置するように、表面に段差のない形状のものとする。
このようにして、インナーリード5及び吊りリード9の外周がクランパ15によって押さえつけられると、下方へ曲がっている吊りリード9が弾性変形し、吊りリード9及びバスバー8とインナーリード5とが同一平面上に位置するようになる。つまり、インナーリード5及び吊りリード9を押さえつけ、吊りリード9を弾性変形させ、インナーリード5とバスバー8及び吊りリード9とを同一平面上に位置させた状態とする。これにより、後述のワイヤボンディングの際にバスバー8及びインナーリード5の平坦性が確保され、バスバー8及びインナーリード5に対して安定したワイヤボンディングが可能となる。
次に、バスバー8に全てのボンディングワイヤ11を接続した後、図9(G),図9(H)に示すように、インナーリード5のワイヤ接続面5Aと半導体チップ10の電極13(第2電極;例えば信号系パッド13B)とを、ボンディングワイヤ12(第2ボンディングワイヤ)によって接続する。
つまり、上述のように、吊りリード9がインナーリード5に対して傾斜し、インナーリード5に接続されたワイヤ12とバスバー8に接続されたワイヤ11との距離が離れた状態で、モールディングによって樹脂封止を行なう。
このようにして、本実施形態の半導体装置が完成する。
このようにして製造される本実施形態の半導体装置は、以下のような構成を備える。
つまり、本実施形態によれば、ワイヤボンディング工程において安定したワイヤボンディングを行なうことができるとともに、樹脂封止工程においてワイヤフローによるショートの発生を防止することができるという利点がある。
上述の実施形態では、複数のバスバー8を、ダイステージ1の四辺のそれぞれに対向する位置に一つずつ設けられているが、これに限られるものではない。例えば、複数のバスバーを、ダイステージの四辺のそれぞれに対向する位置に複数個ずつ設けても良い。つまり、ダイステージの一辺に対向する位置に複数のバスバーを設けても良い。
例えば、図11(A),図11(B)に示すように、ダイステージ1の一辺に対向する位置に2つのバスバー8X,8Yを設け、2つのバスバー8X,8Yのそれぞれを支持する吊りリード9X,9Yを、異なる大きさで傾斜させ、各バスバー8X,8Yのワイヤ接続面8XA,8YAの位置を、互いにフレーム厚さ方向へずらせば良い。これにより、インナーリード5と半導体チップ10の電極13とを接続するワイヤ12と、バスバー8Xと半導体チップ10の電極13とを接続するワイヤ11Xとの距離が離れる。また、バスバー8Xと半導体チップ10の電極13とを接続するワイヤ11Xと、バスバー8Yと半導体チップ10の電極13とを接続するワイヤ11Yとの距離が離れる。そして、この状態で樹脂封止を行なうことで、ワイヤフローが生じても、隣り合っている、異なる長さのワイヤ11X,11Y,12間でショートが生じるのを防止することができる。ここでは、インナーリード5に対して、一のバスバー8Xが約0.10mmだけ下方に位置するようにし、他のバスバー8Yが約0.15mmだけ下方に位置するようにしている。
2 サポートバー
3 リード
4 ダムバー
5 インナーリード
5A ワイヤ接続面
6 アウターリード
7 テープ
8 バスバー
8A ワイヤ接続面
8X,8Y バスバー
8XA,8YA ワイヤ接続面
9,9X,9Y 吊りリード
9A テープとバスバーとの間の部分
10 半導体チップ
11,11X,11Y,12 ワイヤ
13 電極
13A 電源系パッド
13B 信号系パッド
14 ヒートコマ
15 押さえ治具(クランパ)
16 台
17 工具
18 ダイ付材
19 吸着孔
20 熱硬化性樹脂(モールド樹脂;モールド材;封止材;封止樹脂)
21 樹脂封止パッケージ
Claims (7)
- ダイステージと、
前記ダイステージの周囲に設けられたインナーリードと、
前記ダイステージと前記インナーリードとの間に設けられ、吊りリードに支持されたバスバーと、
前記インナーリード及び前記吊りリードを固定するテープとを備え、
前記吊りリードは前記インナーリードに対して、前記テープと前記バスバーとの間の部分が連続的に傾斜しており、前記バスバーのワイヤ接続面の位置が前記インナーリードのワイヤ接続面の位置に対してフレーム厚さ方向へずれていることを特徴とするリードフレーム。 - 前記ダイステージは、ダウンセットされており、
前記バスバーのワイヤ接続面は、前記インナーリードのワイヤ接続面の反対側の面と前記ダウンセットされたダイステージの表面との間に位置することを特徴とする、請求項1に記載のリードフレーム。 - 前記バスバーとして、前記ダイステージの一辺に対向する位置に複数のバスバーを備え、
前記複数のバスバーのそれぞれを支持する吊りリードは、異なる大きさで傾斜しており、前記各バスバーのワイヤ接続面の位置は、互いにフレーム厚さ方向へずれていることを特徴とする、請求項1又は2に記載のリードフレーム。 - ダイステージと、
前記ダイステージの周囲に設けられたインナーリードと、
前記ダイステージと前記インナーリードとの間に設けられ、吊りリードに支持されたバスバーと、
前記インナーリード及び前記吊りリードを固定するテープと、
前記ダイステージに搭載された半導体チップと、
前記バスバーのワイヤ接続面と前記半導体チップの第1電極とを接続する第1ボンディングワイヤと、
前記インナーリードのワイヤ接続面と前記半導体チップの第2電極とを接続する第2ボンディングワイヤと、
前記半導体チップを封止する封止樹脂とを備え、
前記吊りリードは前記インナーリードに対して、前記テープと前記バスバーとの間の部分が連続的に傾斜しており、前記バスバーのワイヤ接続面の位置が前記インナーリードのワイヤ接続面の位置に対してフレーム厚さ方向へずれていることを特徴とする半導体装置。 - 前記ダイステージは、ダウンセットされており、
前記バスバーのワイヤ接続面は、前記インナーリードのワイヤ接続面の反対側の面と前記ダウンセットされたダイステージの表面との間に位置することを特徴とする、請求項4に記載の半導体装置。 - 前記バスバーとして、前記ダイステージの一辺に対向する位置に複数のバスバーを備え、
前記複数のバスバーのそれぞれを支持する吊りリードは、異なる大きさで傾斜しており、前記各バスバーのワイヤ接続面の位置は、互いにフレーム厚さ方向へずれていることを特徴とする、請求項4又は5に記載の半導体装置。 - ダイステージと、前記ダイステージの周囲に設けられたインナーリードと、前記ダイステージと前記インナーリードとの間に設けられ、吊りリードに支持されたバスバーとを備え、前記吊りリードが前記インナーリードに対して傾斜しており、前記バスバーのワイヤ接続面の位置が前記インナーリードのワイヤ接続面の位置に対してフレーム厚さ方向へずれているリードフレームの前記ダイステージに半導体チップを搭載し、
前記インナーリード及び前記吊りリードを押さえつけ、前記吊りリードを弾性変形させ、前記インナーリードと前記バスバー及び前記吊りリードとを同一平面上に位置させた状態で、前記バスバーのワイヤ接続面と前記半導体チップの第1電極とを第1ボンディングワイヤによって接続するとともに、前記インナーリードのワイヤ接続面と前記半導体チップの第2電極とを第2ボンディングワイヤによって接続し、
前記インナーリード及び前記吊りリードを押さえつけた状態から開放して前記吊りリードが前記インナーリードに対して傾斜している状態に戻して、樹脂封止を行なうことを特徴とする半導体装置の製造方法。
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