JP5574802B2 - 構造体の製造方法 - Google Patents

構造体の製造方法 Download PDF

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Publication number
JP5574802B2
JP5574802B2 JP2010101957A JP2010101957A JP5574802B2 JP 5574802 B2 JP5574802 B2 JP 5574802B2 JP 2010101957 A JP2010101957 A JP 2010101957A JP 2010101957 A JP2010101957 A JP 2010101957A JP 5574802 B2 JP5574802 B2 JP 5574802B2
Authority
JP
Japan
Prior art keywords
mold
layer
photosensitive resin
positive photosensitive
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010101957A
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English (en)
Japanese (ja)
Other versions
JP2011014875A5 (enExample
JP2011014875A (ja
Inventor
環樹 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010101957A priority Critical patent/JP5574802B2/ja
Publication of JP2011014875A publication Critical patent/JP2011014875A/ja
Publication of JP2011014875A5 publication Critical patent/JP2011014875A5/ja
Application granted granted Critical
Publication of JP5574802B2 publication Critical patent/JP5574802B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2010101957A 2009-06-03 2010-04-27 構造体の製造方法 Expired - Fee Related JP5574802B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010101957A JP5574802B2 (ja) 2009-06-03 2010-04-27 構造体の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009134075 2009-06-03
JP2009134075 2009-06-03
JP2010101957A JP5574802B2 (ja) 2009-06-03 2010-04-27 構造体の製造方法

Publications (3)

Publication Number Publication Date
JP2011014875A JP2011014875A (ja) 2011-01-20
JP2011014875A5 JP2011014875A5 (enExample) 2013-06-06
JP5574802B2 true JP5574802B2 (ja) 2014-08-20

Family

ID=43301003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010101957A Expired - Fee Related JP5574802B2 (ja) 2009-06-03 2010-04-27 構造体の製造方法

Country Status (2)

Country Link
US (1) US8647558B2 (enExample)
JP (1) JP5574802B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4942218B2 (ja) * 2008-12-16 2012-05-30 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5443408B2 (ja) * 2011-02-23 2014-03-19 株式会社東芝 半導体装置の製造方法
KR20140078753A (ko) * 2011-10-19 2014-06-25 유니-픽셀 디스플레이스, 인코포레이티드 가요성 기판 상에 미세한 도전성 라인을 형성하기 위해 반투명 원통형 마스터를 사용하는 포토-패터닝
EP3839624B1 (fr) * 2019-12-18 2023-09-13 Nivarox-FAR S.A. Procede de fabrication d'un composant horloger

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04172458A (ja) * 1990-11-06 1992-06-19 Nippon Steel Corp 多層レジスト
US6334960B1 (en) 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
US6841339B2 (en) * 2000-08-09 2005-01-11 Sandia National Laboratories Silicon micro-mold and method for fabrication
JP4105919B2 (ja) * 2001-08-23 2008-06-25 株式会社石川製作所 半導体デバイス製造におけるパターン転写方法
JP3907504B2 (ja) * 2002-03-14 2007-04-18 三菱電機株式会社 半導体装置の製造方法および半導体装置製造用モールド
JP4073343B2 (ja) * 2003-03-20 2008-04-09 株式会社日立製作所 光透過ナノスタンプ方法
JP2004304097A (ja) 2003-04-01 2004-10-28 Sharp Corp パターン形成方法および半導体装置の製造方法
JP2005354017A (ja) 2004-06-10 2005-12-22 Toshio Kubota 光硬化反応制御型インプリント金型およびそれを用いたインプリント加工方法ならびにインプリント加工製品
US7629111B2 (en) 2004-06-28 2009-12-08 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
CN1968815B (zh) 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP2006198779A (ja) * 2005-01-18 2006-08-03 Konica Minolta Holdings Inc 微小孔を貫通形成する装置及び方法並びにインクジェット記録ヘッド用ノズルプレートの製造装置及び製造方法
JP5119579B2 (ja) * 2005-08-01 2013-01-16 凸版印刷株式会社 インプリント用モールド及びその製造方法
KR100643684B1 (ko) * 2005-11-04 2006-11-10 한국과학기술원 폴리머 또는 레지스트 패턴 및 이를 이용한 금속 박막패턴, 금속 패턴, 플라스틱 몰드 및 이들의 형성방법
US8037603B2 (en) 2006-04-27 2011-10-18 Canon Kabushiki Kaisha Ink jet head and producing method therefor
US8376525B2 (en) 2006-09-08 2013-02-19 Canon Kabushiki Kaisha Liquid discharge head and method of manufacturing the same
JP2008168475A (ja) * 2007-01-10 2008-07-24 Yamaha Corp 微細成形モールド
JP4981491B2 (ja) 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
JP2009113462A (ja) * 2007-10-18 2009-05-28 Ricoh Elemex Corp 微細貫通孔構造体の製造装置、微細貫通孔構造体の製造方法、微細貫通孔構造体、液滴吐出ノズル、液滴吐出フィルタ、液滴吐出ヘッド、および液滴吐出装置
JP2009119650A (ja) 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
JP2009220286A (ja) 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
FR2960658B1 (fr) * 2010-05-28 2013-05-24 Commissariat Energie Atomique Lithographie par impression nanometrique

Also Published As

Publication number Publication date
US20100310990A1 (en) 2010-12-09
US8647558B2 (en) 2014-02-11
JP2011014875A (ja) 2011-01-20

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