JP5555306B2 - アニーリング装置 - Google Patents

アニーリング装置 Download PDF

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Publication number
JP5555306B2
JP5555306B2 JP2012275835A JP2012275835A JP5555306B2 JP 5555306 B2 JP5555306 B2 JP 5555306B2 JP 2012275835 A JP2012275835 A JP 2012275835A JP 2012275835 A JP2012275835 A JP 2012275835A JP 5555306 B2 JP5555306 B2 JP 5555306B2
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JP
Japan
Prior art keywords
sealing
lower plate
cooling
pneumatic
plate portion
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JP2012275835A
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English (en)
Japanese (ja)
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JP2013138200A (ja
Inventor
相 熙 梁
基 雄 李
聖 ▲進▼ 金
珍 ▲栄▼ 安
Original Assignee
Ａｐ系統股▲分▼有限公司
サムスン ディスプレー カンパニー リミテッド
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Publication of JP2013138200A publication Critical patent/JP2013138200A/ja
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Publication of JP5555306B2 publication Critical patent/JP5555306B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Recrystallisation Techniques (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP2012275835A 2011-12-20 2012-12-18 アニーリング装置 Active JP5555306B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110138696A KR101288992B1 (ko) 2011-12-20 2011-12-20 어닐링 장치
KR10-2011-0138696 2011-12-20

Publications (2)

Publication Number Publication Date
JP2013138200A JP2013138200A (ja) 2013-07-11
JP5555306B2 true JP5555306B2 (ja) 2014-07-23

Family

ID=48632537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012275835A Active JP5555306B2 (ja) 2011-12-20 2012-12-18 アニーリング装置

Country Status (4)

Country Link
JP (1) JP5555306B2 (ko)
KR (1) KR101288992B1 (ko)
CN (1) CN103172256B (ko)
TW (1) TWI462884B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108878317B (zh) * 2018-06-07 2020-12-11 云谷（固安）科技有限公司 一种激光退火装置和方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59306704D1 (de) * 1992-02-12 1997-07-17 Balzers Hochvakuum Vakuumbearbeitungsanlage
US5291923A (en) * 1992-09-24 1994-03-08 Internatinal Business Machines Corporation Door opening system and method
JP3156920B2 (ja) * 1996-05-15 2001-04-16 日本エー・エス・エム株式会社 半導体処理装置
JPH11111640A (ja) * 1997-09-30 1999-04-23 Sanyo Electric Co Ltd レーザアニール装置
JP2003014125A (ja) * 2001-06-29 2003-01-15 Fuji Kiko:Kk 溶液を有する処理装置の開口部シール構造
KR100633244B1 (ko) * 2004-09-09 2006-10-11 덕양산업주식회사 발포금형의 튜브실링장치
KR100796611B1 (ko) * 2006-11-06 2008-01-22 코닉시스템 주식회사 어닐링 윈도우
JP5540476B2 (ja) * 2008-06-30 2014-07-02 株式会社Ｉｈｉ レーザアニール装置
KR20100098782A (ko) * 2009-03-02 2010-09-10 이연호 주름성형용 측면압착형 금속관파지장치 및 이 측면압착형 금속관파지장치가 설치된 주름금속관 성형장치
KR101089625B1 (ko) * 2009-07-03 2011-12-06 에이피시스템 주식회사 탈산소 모듈을 가지는 레이저 열처리장치

Also Published As

Publication number Publication date
JP2013138200A (ja) 2013-07-11
TW201341323A (zh) 2013-10-16
KR20130071285A (ko) 2013-06-28
CN103172256A (zh) 2013-06-26
TWI462884B (zh) 2014-12-01
CN103172256B (zh) 2015-05-13
KR101288992B1 (ko) 2013-08-16

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