JP5552878B2 - 振動片、振動デバイスおよび電子機器 - Google Patents
振動片、振動デバイスおよび電子機器 Download PDFInfo
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- JP5552878B2 JP5552878B2 JP2010092921A JP2010092921A JP5552878B2 JP 5552878 B2 JP5552878 B2 JP 5552878B2 JP 2010092921 A JP2010092921 A JP 2010092921A JP 2010092921 A JP2010092921 A JP 2010092921A JP 5552878 B2 JP5552878 B2 JP 5552878B2
- Authority
- JP
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- Prior art keywords
- vibrating arm
- piezoelectric
- vibrating
- electrode layer
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010092921A JP5552878B2 (ja) | 2010-04-14 | 2010-04-14 | 振動片、振動デバイスおよび電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010092921A JP5552878B2 (ja) | 2010-04-14 | 2010-04-14 | 振動片、振動デバイスおよび電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011223489A JP2011223489A (ja) | 2011-11-04 |
| JP2011223489A5 JP2011223489A5 (enrdf_load_stackoverflow) | 2013-04-18 |
| JP5552878B2 true JP5552878B2 (ja) | 2014-07-16 |
Family
ID=45039819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010092921A Expired - Fee Related JP5552878B2 (ja) | 2010-04-14 | 2010-04-14 | 振動片、振動デバイスおよび電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5552878B2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11831297B2 (en) | 2018-05-02 | 2023-11-28 | Murata Manufacturing Co., Ltd. | Resonator and resonance device with opening grooves having different widths |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| JP6087527B2 (ja) * | 2012-07-13 | 2017-03-01 | リバーエレテック株式会社 | 音叉型水晶振動子 |
| WO2014185282A1 (ja) | 2013-05-13 | 2014-11-20 | 株式会社村田製作所 | 振動装置 |
| CN105210295B (zh) | 2013-05-13 | 2017-10-03 | 株式会社村田制作所 | 振动装置 |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
| JP6543918B2 (ja) * | 2014-11-14 | 2019-07-17 | セイコーエプソン株式会社 | 慣性センサー |
| WO2021140944A1 (ja) * | 2020-01-10 | 2021-07-15 | 京セラ株式会社 | 圧電共振デバイス |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4533934B2 (ja) * | 2008-01-15 | 2010-09-01 | エプソントヨコム株式会社 | 振動片及び振動子の製造方法 |
| JP5168002B2 (ja) * | 2008-07-22 | 2013-03-21 | セイコーエプソン株式会社 | 振動子及び発振器 |
| JP5444662B2 (ja) * | 2008-08-25 | 2014-03-19 | ソニー株式会社 | 圧電デバイスの製造方法 |
| JP2010081156A (ja) * | 2008-09-25 | 2010-04-08 | Seiko Epson Corp | 圧電薄膜振動片、圧電薄膜振動片の製造方法、圧電薄膜振動子及び発振回路 |
-
2010
- 2010-04-14 JP JP2010092921A patent/JP5552878B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11831297B2 (en) | 2018-05-02 | 2023-11-28 | Murata Manufacturing Co., Ltd. | Resonator and resonance device with opening grooves having different widths |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011223489A (ja) | 2011-11-04 |
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