JP2011223489A5 - - Google Patents

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Publication number
JP2011223489A5
JP2011223489A5 JP2010092921A JP2010092921A JP2011223489A5 JP 2011223489 A5 JP2011223489 A5 JP 2011223489A5 JP 2010092921 A JP2010092921 A JP 2010092921A JP 2010092921 A JP2010092921 A JP 2010092921A JP 2011223489 A5 JP2011223489 A5 JP 2011223489A5
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JP
Japan
Prior art keywords
resonator element
vibrating arm
base
element according
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010092921A
Other languages
English (en)
Japanese (ja)
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JP2011223489A (ja
JP5552878B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2010092921A priority Critical patent/JP5552878B2/ja
Priority claimed from JP2010092921A external-priority patent/JP5552878B2/ja
Publication of JP2011223489A publication Critical patent/JP2011223489A/ja
Publication of JP2011223489A5 publication Critical patent/JP2011223489A5/ja
Application granted granted Critical
Publication of JP5552878B2 publication Critical patent/JP5552878B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010092921A 2010-04-14 2010-04-14 振動片、振動デバイスおよび電子機器 Expired - Fee Related JP5552878B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010092921A JP5552878B2 (ja) 2010-04-14 2010-04-14 振動片、振動デバイスおよび電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010092921A JP5552878B2 (ja) 2010-04-14 2010-04-14 振動片、振動デバイスおよび電子機器

Publications (3)

Publication Number Publication Date
JP2011223489A JP2011223489A (ja) 2011-11-04
JP2011223489A5 true JP2011223489A5 (enrdf_load_stackoverflow) 2013-04-18
JP5552878B2 JP5552878B2 (ja) 2014-07-16

Family

ID=45039819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010092921A Expired - Fee Related JP5552878B2 (ja) 2010-04-14 2010-04-14 振動片、振動デバイスおよび電子機器

Country Status (1)

Country Link
JP (1) JP5552878B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6087527B2 (ja) * 2012-07-13 2017-03-01 リバーエレテック株式会社 音叉型水晶振動子
WO2014185282A1 (ja) 2013-05-13 2014-11-20 株式会社村田製作所 振動装置
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6543918B2 (ja) * 2014-11-14 2019-07-17 セイコーエプソン株式会社 慣性センサー
WO2019211926A1 (ja) 2018-05-02 2019-11-07 株式会社村田製作所 共振子及び共振装置
WO2021140944A1 (ja) * 2020-01-10 2021-07-15 京セラ株式会社 圧電共振デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4533934B2 (ja) * 2008-01-15 2010-09-01 エプソントヨコム株式会社 振動片及び振動子の製造方法
JP5168002B2 (ja) * 2008-07-22 2013-03-21 セイコーエプソン株式会社 振動子及び発振器
JP5444662B2 (ja) * 2008-08-25 2014-03-19 ソニー株式会社 圧電デバイスの製造方法
JP2010081156A (ja) * 2008-09-25 2010-04-08 Seiko Epson Corp 圧電薄膜振動片、圧電薄膜振動片の製造方法、圧電薄膜振動子及び発振回路

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