JP2013017207A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013017207A5 JP2013017207A5 JP2012184911A JP2012184911A JP2013017207A5 JP 2013017207 A5 JP2013017207 A5 JP 2013017207A5 JP 2012184911 A JP2012184911 A JP 2012184911A JP 2012184911 A JP2012184911 A JP 2012184911A JP 2013017207 A5 JP2013017207 A5 JP 2013017207A5
- Authority
- JP
- Japan
- Prior art keywords
- along
- base
- width
- length
- resonator element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000007767 bonding agent Substances 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012184911A JP5500220B2 (ja) | 2006-08-18 | 2012-08-24 | 振動片、振動子、発振器、及びセンサー |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223319 | 2006-08-18 | ||
| JP2006223319 | 2006-08-18 | ||
| JP2012184911A JP5500220B2 (ja) | 2006-08-18 | 2012-08-24 | 振動片、振動子、発振器、及びセンサー |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007212634A Division JP5115092B2 (ja) | 2006-08-18 | 2007-08-17 | 圧電振動片、圧電デバイス、及び発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013017207A JP2013017207A (ja) | 2013-01-24 |
| JP2013017207A5 true JP2013017207A5 (enrdf_load_stackoverflow) | 2013-09-26 |
| JP5500220B2 JP5500220B2 (ja) | 2014-05-21 |
Family
ID=47689367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012184911A Active JP5500220B2 (ja) | 2006-08-18 | 2012-08-24 | 振動片、振動子、発振器、及びセンサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5500220B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140118792A (ko) | 2013-03-29 | 2014-10-08 | 세이코 엡슨 가부시키가이샤 | 진동 소자, 진동자, 발진기, 전자 기기, 센서, 및 이동체 |
| TWI634742B (zh) | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
| JP6375611B2 (ja) | 2013-11-16 | 2018-08-22 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
| CN109580030B (zh) * | 2019-01-10 | 2020-08-11 | 哈尔滨华凡传感技术有限公司 | 一种具有多枚箭形振臂的高精度谐振式石英温度传感器 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004120802A (ja) * | 2004-01-19 | 2004-04-15 | Seiko Epson Corp | 振動片、振動子、発振器及び電子機器 |
| JP4301200B2 (ja) * | 2004-10-20 | 2009-07-22 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
-
2012
- 2012-08-24 JP JP2012184911A patent/JP5500220B2/ja active Active