JP2010226609A5 - - Google Patents
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- Publication number
- JP2010226609A5 JP2010226609A5 JP2009073741A JP2009073741A JP2010226609A5 JP 2010226609 A5 JP2010226609 A5 JP 2010226609A5 JP 2009073741 A JP2009073741 A JP 2009073741A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2010226609 A5 JP2010226609 A5 JP 2010226609A5
- Authority
- JP
- Japan
- Prior art keywords
- resonator element
- dielectric layer
- arm portion
- base
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005452 bending Methods 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073741A JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073741A JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010226609A JP2010226609A (ja) | 2010-10-07 |
| JP2010226609A5 true JP2010226609A5 (enrdf_load_stackoverflow) | 2012-03-29 |
Family
ID=43043281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009073741A Withdrawn JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010226609A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011004035A (ja) | 2009-06-17 | 2011-01-06 | Seiko Epson Corp | 屈曲振動片および屈曲振動片の製造方法 |
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56136016A (en) * | 1980-03-26 | 1981-10-23 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
| JPH10173477A (ja) * | 1996-12-06 | 1998-06-26 | Riken Corp | 音叉型圧電振動子 |
| JP2001102904A (ja) * | 2000-10-16 | 2001-04-13 | Seiko Epson Corp | 水晶振動子 |
| JP4042766B2 (ja) * | 2001-08-08 | 2008-02-06 | セイコーエプソン株式会社 | 光学装置、およびプロジェクタ |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP4281451B2 (ja) * | 2003-07-17 | 2009-06-17 | 株式会社大真空 | 圧電振動片および圧電振動子 |
| JP2006086726A (ja) * | 2004-09-15 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
| JP4715652B2 (ja) * | 2006-06-30 | 2011-07-06 | セイコーエプソン株式会社 | 圧電振動片 |
| JP2008051999A (ja) * | 2006-08-24 | 2008-03-06 | Seiko Epson Corp | 光学素子の製造方法及びプロジェクタ |
| JP5067033B2 (ja) * | 2007-06-20 | 2012-11-07 | セイコーエプソン株式会社 | 音叉型振動子、発振器 |
| JP2009027097A (ja) * | 2007-07-23 | 2009-02-05 | Sumitomo Electric Ind Ltd | 絶縁コイル及び絶縁コイルの製造方法 |
| JP2009036917A (ja) * | 2007-07-31 | 2009-02-19 | Sharp Corp | 液晶表示装置 |
| JP2009059821A (ja) * | 2007-08-30 | 2009-03-19 | Toyota Motor Corp | 半導体装置 |
| JP4918663B2 (ja) * | 2008-09-12 | 2012-04-18 | 株式会社東芝 | 回路基板の製造方法 |
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2009
- 2009-03-25 JP JP2009073741A patent/JP2010226609A/ja not_active Withdrawn