JP2010226609A - 振動片および振動子 - Google Patents

振動片および振動子 Download PDF

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Publication number
JP2010226609A
JP2010226609A JP2009073741A JP2009073741A JP2010226609A JP 2010226609 A JP2010226609 A JP 2010226609A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2010226609 A JP2010226609 A JP 2010226609A
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JP
Japan
Prior art keywords
resonator element
arm
vibrating
crystal
vibrating piece
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Withdrawn
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JP2009073741A
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English (en)
Japanese (ja)
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JP2010226609A5 (enrdf_load_stackoverflow
Inventor
Teruo Takizawa
照夫 瀧澤
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2009073741A priority Critical patent/JP2010226609A/ja
Publication of JP2010226609A publication Critical patent/JP2010226609A/ja
Publication of JP2010226609A5 publication Critical patent/JP2010226609A5/ja
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009073741A 2009-03-25 2009-03-25 振動片および振動子 Withdrawn JP2010226609A (ja)

Priority Applications (1)

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JP2009073741A JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

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JP2009073741A JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

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JP2010226609A true JP2010226609A (ja) 2010-10-07
JP2010226609A5 JP2010226609A5 (enrdf_load_stackoverflow) 2012-03-29

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JP2009073741A Withdrawn JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

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JP (1) JP2010226609A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8304967B2 (en) 2009-06-17 2012-11-06 Seiko Epson Corporation Flexural vibration piece, flexural vibrator, and electronic apparatus
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JPH10173477A (ja) * 1996-12-06 1998-06-26 Riken Corp 音叉型圧電振動子
JP2001102904A (ja) * 2000-10-16 2001-04-13 Seiko Epson Corp 水晶振動子
JP2003227719A (ja) * 2001-11-27 2003-08-15 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車
JP2005039671A (ja) * 2003-07-17 2005-02-10 Daishinku Corp 圧電振動片および圧電振動子
JP2005292853A (ja) * 2001-08-08 2005-10-20 Seiko Epson Corp 光学装置、およびプロジェクタ
JP2006086726A (ja) * 2004-09-15 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP2008011348A (ja) * 2006-06-30 2008-01-17 Seiko Epson Corp 圧電振動片
JP2008051999A (ja) * 2006-08-24 2008-03-06 Seiko Epson Corp 光学素子の製造方法及びプロジェクタ
JP2009005022A (ja) * 2007-06-20 2009-01-08 Seiko Epson Corp 音叉型振動子、発振器
JP2009027097A (ja) * 2007-07-23 2009-02-05 Sumitomo Electric Ind Ltd 絶縁コイル及び絶縁コイルの製造方法
JP2009038386A (ja) * 2008-09-12 2009-02-19 Toshiba Corp 回路基板の製造方法
JP2009036917A (ja) * 2007-07-31 2009-02-19 Sharp Corp 液晶表示装置
JP2009059821A (ja) * 2007-08-30 2009-03-19 Toyota Motor Corp 半導体装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JPH10173477A (ja) * 1996-12-06 1998-06-26 Riken Corp 音叉型圧電振動子
JP2001102904A (ja) * 2000-10-16 2001-04-13 Seiko Epson Corp 水晶振動子
JP2005292853A (ja) * 2001-08-08 2005-10-20 Seiko Epson Corp 光学装置、およびプロジェクタ
JP2003227719A (ja) * 2001-11-27 2003-08-15 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車
JP2005039671A (ja) * 2003-07-17 2005-02-10 Daishinku Corp 圧電振動片および圧電振動子
JP2006086726A (ja) * 2004-09-15 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP2008011348A (ja) * 2006-06-30 2008-01-17 Seiko Epson Corp 圧電振動片
JP2008051999A (ja) * 2006-08-24 2008-03-06 Seiko Epson Corp 光学素子の製造方法及びプロジェクタ
JP2009005022A (ja) * 2007-06-20 2009-01-08 Seiko Epson Corp 音叉型振動子、発振器
JP2009027097A (ja) * 2007-07-23 2009-02-05 Sumitomo Electric Ind Ltd 絶縁コイル及び絶縁コイルの製造方法
JP2009036917A (ja) * 2007-07-31 2009-02-19 Sharp Corp 液晶表示装置
JP2009059821A (ja) * 2007-08-30 2009-03-19 Toyota Motor Corp 半導体装置
JP2009038386A (ja) * 2008-09-12 2009-02-19 Toshiba Corp 回路基板の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8304967B2 (en) 2009-06-17 2012-11-06 Seiko Epson Corporation Flexural vibration piece, flexural vibrator, and electronic apparatus
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object

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