JP2010226609A - 振動片および振動子 - Google Patents
振動片および振動子 Download PDFInfo
- Publication number
- JP2010226609A JP2010226609A JP2009073741A JP2009073741A JP2010226609A JP 2010226609 A JP2010226609 A JP 2010226609A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2010226609 A JP2010226609 A JP 2010226609A
- Authority
- JP
- Japan
- Prior art keywords
- resonator element
- arm
- vibrating
- crystal
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 65
- 239000010453 quartz Substances 0.000 claims description 60
- 238000005452 bending Methods 0.000 claims description 44
- 239000010409 thin film Substances 0.000 claims description 44
- 239000000463 material Substances 0.000 claims description 9
- 239000013078 crystal Substances 0.000 abstract description 169
- 230000006835 compression Effects 0.000 abstract description 3
- 238000007906 compression Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 54
- 230000015572 biosynthetic process Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 9
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 9
- 238000012546 transfer Methods 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009073741A JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009073741A JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010226609A true JP2010226609A (ja) | 2010-10-07 |
JP2010226609A5 JP2010226609A5 (enrdf_load_stackoverflow) | 2012-03-29 |
Family
ID=43043281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009073741A Withdrawn JP2010226609A (ja) | 2009-03-25 | 2009-03-25 | 振動片および振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2010226609A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8304967B2 (en) | 2009-06-17 | 2012-11-06 | Seiko Epson Corporation | Flexural vibration piece, flexural vibrator, and electronic apparatus |
US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56136016A (en) * | 1980-03-26 | 1981-10-23 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
JPH10173477A (ja) * | 1996-12-06 | 1998-06-26 | Riken Corp | 音叉型圧電振動子 |
JP2001102904A (ja) * | 2000-10-16 | 2001-04-13 | Seiko Epson Corp | 水晶振動子 |
JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
JP2005039671A (ja) * | 2003-07-17 | 2005-02-10 | Daishinku Corp | 圧電振動片および圧電振動子 |
JP2005292853A (ja) * | 2001-08-08 | 2005-10-20 | Seiko Epson Corp | 光学装置、およびプロジェクタ |
JP2006086726A (ja) * | 2004-09-15 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
JP2008051999A (ja) * | 2006-08-24 | 2008-03-06 | Seiko Epson Corp | 光学素子の製造方法及びプロジェクタ |
JP2009005022A (ja) * | 2007-06-20 | 2009-01-08 | Seiko Epson Corp | 音叉型振動子、発振器 |
JP2009027097A (ja) * | 2007-07-23 | 2009-02-05 | Sumitomo Electric Ind Ltd | 絶縁コイル及び絶縁コイルの製造方法 |
JP2009038386A (ja) * | 2008-09-12 | 2009-02-19 | Toshiba Corp | 回路基板の製造方法 |
JP2009036917A (ja) * | 2007-07-31 | 2009-02-19 | Sharp Corp | 液晶表示装置 |
JP2009059821A (ja) * | 2007-08-30 | 2009-03-19 | Toyota Motor Corp | 半導体装置 |
-
2009
- 2009-03-25 JP JP2009073741A patent/JP2010226609A/ja not_active Withdrawn
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56136016A (en) * | 1980-03-26 | 1981-10-23 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
JPH10173477A (ja) * | 1996-12-06 | 1998-06-26 | Riken Corp | 音叉型圧電振動子 |
JP2001102904A (ja) * | 2000-10-16 | 2001-04-13 | Seiko Epson Corp | 水晶振動子 |
JP2005292853A (ja) * | 2001-08-08 | 2005-10-20 | Seiko Epson Corp | 光学装置、およびプロジェクタ |
JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
JP2005039671A (ja) * | 2003-07-17 | 2005-02-10 | Daishinku Corp | 圧電振動片および圧電振動子 |
JP2006086726A (ja) * | 2004-09-15 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
JP2008051999A (ja) * | 2006-08-24 | 2008-03-06 | Seiko Epson Corp | 光学素子の製造方法及びプロジェクタ |
JP2009005022A (ja) * | 2007-06-20 | 2009-01-08 | Seiko Epson Corp | 音叉型振動子、発振器 |
JP2009027097A (ja) * | 2007-07-23 | 2009-02-05 | Sumitomo Electric Ind Ltd | 絶縁コイル及び絶縁コイルの製造方法 |
JP2009036917A (ja) * | 2007-07-31 | 2009-02-19 | Sharp Corp | 液晶表示装置 |
JP2009059821A (ja) * | 2007-08-30 | 2009-03-19 | Toyota Motor Corp | 半導体装置 |
JP2009038386A (ja) * | 2008-09-12 | 2009-02-19 | Toshiba Corp | 回路基板の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8304967B2 (en) | 2009-06-17 | 2012-11-06 | Seiko Epson Corporation | Flexural vibration piece, flexural vibrator, and electronic apparatus |
US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
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