JP5543084B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5543084B2 JP5543084B2 JP2008164207A JP2008164207A JP5543084B2 JP 5543084 B2 JP5543084 B2 JP 5543084B2 JP 2008164207 A JP2008164207 A JP 2008164207A JP 2008164207 A JP2008164207 A JP 2008164207A JP 5543084 B2 JP5543084 B2 JP 5543084B2
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Description
以下、本発明の第1の実施形態である半導体装置及びその製造方法について図面を参照して説明する。
また、一次封止体10の上面10aには、二次封止体102が積層されている。二次封止体102は、一次封止体10と同様に例えばエポキシ樹脂等の熱硬化性樹脂からなる。
図2〜図3に示すように、半導体チップ6の主表面6aの電極パッド8と配線基板2の接続パッド3との間にワイヤ19でボンディング行う。ここでワイヤ19は、半導体チップ6の電極パッド8から上方に向かってループ状を形成してなる。次にループ状のワイヤ19の最頂部にフラット部19aを形成する。そして、フラット部19aが埋設するように半導体チップ6を封止材料(一次封止体10、二次封止体102)で封止する。
本実施形態では、配線基板2上にDAF7を介して半導体チップ2を搭載し、半導体チップ6の電極パッド8と配線基板2の接続パッド3とをループ状のワイヤ19でボンディングする。ワイヤ19は、上方に向けてループ状に形成する。これにより、ワイヤ19には最頂部が形成される。次に、封止工程第1段階(フラット部形成工程及び封止工程)として、図2のとおり上部封止金型18(可動部材)の当接面18aをボンディングワイヤ19の最頂部と接触する条件、すなわち半導体チップ6の上面6a(主表面)からの厚さH2(例えばH2=0.08mm)程度の位置に設定した状態で、一次封止体10による一次封止を実施する。上部封止金型18は、特開平10−189631号のような可動用一部金型ではなく平板状の金型全体でよい。第1段階での目的は、上部封止金型18とワイヤ19の最頂部を接触させることでワイヤ19にフラット部19aを形成し、ループ高さを一括にフラットとさせてバラつきを抑えたまま封止することであり、この段階ではワイヤ19のフラット部19aが露出したものが未だありうる状態である。
図5と図6は、第2実施形態である半導体装置の製造方法の封止工程における断面図である。
本実施形態では、封止工程第1段階(フラット部形成工程及び封止工程)として、図5のとおり上部封止金型18に厚さが例えば0.10mm程度の第1離型フィルム191(当接部材)を取り付けた状態で、第1離型フィルム191がボンディングワイヤ19の最頂部と接触する位置、例えば半導体チップ6の主表面6aから上部封止金型18までの間隔H4(例えばH4=0.18mm)程度の位置(第1位置)に上部封止金型18を一度下げる。第1段階での目的は、第1離型フィルム191とワイヤ19の上部ループ部分を接触し押さえ込ませることでワイヤ19を一括にフラットにし、ワイヤ19のループ状の最頂部をフラット部19aに変形させて高さのバラつきを揃えることである。一括にフラットにした後、樹脂封止を行わないまま上部封止金型18及び第1離型フィルム191を一旦元の位置(第2位置)に戻す。
図8と図9は、第3実施形態である半導体装置の製造方法の封止工程における断面図である。
本実施形態では、フラット部形成工程及び封止工程において、図8のように上部封止金型18に2層フィルム300を設置した状態で、ボンディングワイヤ19の上面と接触する条件の位置、すなわち、半導体チップ6の主平面6aから上部封止金型18までの距離H6(例えばH6=0.18mm)程度に上部封止金型18を下げ、ワイヤ19にフラット部19aを形成してループ高さのバラつきを揃えたまま一次封止体10による封止を行う。2層フィルム300は、上側が離型フィルム193(離型部材)であり下側が一次封止体10の構成材料に類似する例えばエポキシ樹脂系材料のような薄い絶縁性フィルム203(当接部材);厚さは0.02mm程度で構成されている。2層フィルム300の層間の接着性は弱いものでよく、フィルム同士が接着されないまま2層の状態に設定されていてもよい。
本実施例の半導体装置の製造に用いる配線母基板は、例えばガラスエポキシ基材からなる基板であり、複数の製品形成領域を有している。製品形成領域はマトリックス配置されており、それぞれの製品形成領域間にはダイシングラインが形成されている。ダイシングラインで切断することにより、製品形成領域は半導体装置の配線基板2となる部位である。
製品形成領域は、半導体装置の配線基板2と同様の構造であり、一面の半導体チップ6の搭載される部位の周囲には複数の接続パッド3が形成されており、他面側には格子状に配置された複数のランド4が形成されている。接続パッド3とそれと対応するランド4とは配線等を介して電気的に接続されている。また、ランド4は、基板作成時に所定の場所に例えば半田ボールからなるバンプ5が形成できるように配置されている。このような配線母基板M1が準備される。配線母基板M1はダイボンディング工程に移行される。
まず、第1実施例と同様にダイボンディング工程とワイヤボンディング工程を実施した後、モールド工程に移行する。本実施例の場合は、図11(a)のとおり厚い離型フィルム191を上部封止金型18に設定した後、離型フィルム191がボンディングワイヤ19の最頂部と接触する位置に上部封止金型18を押下し、チップ上端から離型フィルム下端の間隔=0.08mm程度に設定する。図示しない下部封止金型により前記配線母基板を型閉めしワイヤの一括フラットニング状態を形成し、フラット部19aを設ける(図11(b))。
先ず、第1実施例と同様にダイボンディング工程とワイヤボンディング工程を実施した後、モールド工程に移行する。
Claims (4)
- 半導体チップの主表面の電極パッドと配線基板の接続パッドとの間にワイヤをボンディングする工程と、
ここで該ワイヤは、該半導体チップの該電極パッドから上方に向かってループ状を形成し、
前記ループ状のワイヤにフラット部を形成する工程と、
前記フラット部が埋設するように前記半導体チップを封止材料で封止する工程とを備え、
前記フラット部形成工程は、前記半導体チップの主表面に対向して当接面を有する可動部材を配設し、該可動部材を下降させて該当接面を前記ワイヤの最頂部に当接させて押圧して該ワイヤに前記フラット部を形成する、
前記封止工程は、前記可動部材を前記フラット部から上昇させて前記当接面と前記フラット部との間に形成される空間に封止部材を設けて該フラット部が埋設するようにして前記半導体チップを封止する、ことを特徴とする半導体装置の製造方法。 - 半導体チップの主表面の電極パッドと配線基板の接続パッドとの間にワイヤをボンディングする工程と、
ここで該ワイヤは、該半導体チップの該電極パッドから上方に向かってループ状を形成し、
前記ループ状のワイヤにフラット部を形成する工程と、
前記フラット部が埋設するように前記半導体チップを封止材料で封止する工程とを備え、
前記フラット部形成工程は、前記半導体チップの主表面に対向して当接部材を有する可動部材を配設し、該可動部材を第1位置まで下降させて該当接部材を前記ワイヤの最頂部に当接させて押圧して該ワイヤに前記フラット部を形成する、
前記封止工程は、前記可動部材を前記フラット部から第2位置まで上昇させた後、前記当接部材を取り除いて該当接部材より厚さの薄い封止形成部材を取り付けて、前記可動部材を前記第1位置まで下降させて該封止形成部材と前記フラット部との間に形成された空間に封止部材を設けて該フラット部が埋設するようにして前記半導体チップを封止する、ことを特徴とする半導体装置の製造方法。 - 半導体チップの主表面の電極パッドと配線基板の接続パッドとの間にワイヤをボンディングする工程と、
ここで該ワイヤは、該半導体チップの該電極パッドから上方に向かってループ状を形成し、
前記ループ状のワイヤにフラット部を形成する工程と、
前記フラット部が埋設するように前記半導体チップを封止材料で封止する工程とを備え、
前記フラット部形成工程は、前記半導体チップの主表面に対向して当接部材に取り付けられた離型部材を有する可動部材を配設し、該可動部材を下降させて当接部材を前記ワイヤの最頂部に当接させて押圧して該ワイヤに前記フラット部を形成する、
前記封止工程は、前記当接部材を前記フラット部に当接させた後、前記可動部材を上昇させて前記当接部材を該離型部材から分離させ、該当接部材と前記フラット部との間に形成された空間に封止部材を設けて該フラット部が埋設するようにして前記半導体チップを封止する、ことを特徴とする半導体装置の製造方法。 - 前記当接部材は、絶縁性フィルムであることを特徴とする請求項3記載の半導体装置の製造方法。
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