JP5531436B2 - 炭化珪素半導体素子の製造方法 - Google Patents
炭化珪素半導体素子の製造方法 Download PDFInfo
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- JP5531436B2 JP5531436B2 JP2009087895A JP2009087895A JP5531436B2 JP 5531436 B2 JP5531436 B2 JP 5531436B2 JP 2009087895 A JP2009087895 A JP 2009087895A JP 2009087895 A JP2009087895 A JP 2009087895A JP 5531436 B2 JP5531436 B2 JP 5531436B2
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 176
- 239000004065 semiconductor Substances 0.000 title claims description 175
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 174
- 238000004519 manufacturing process Methods 0.000 title claims description 43
- 238000000034 method Methods 0.000 title claims description 32
- 238000010438 heat treatment Methods 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 41
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000001312 dry etching Methods 0.000 claims description 7
- 238000000635 electron micrograph Methods 0.000 description 59
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 26
- 238000005530 etching Methods 0.000 description 24
- 229910052786 argon Inorganic materials 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 12
- 229910004298 SiO 2 Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000004380 ashing Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910018503 SF6 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L29/70—Bipolar devices
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Description
流量比0.4%で添加し、圧力80Torrおよび温度1700℃で60分間の熱処理を行っている。また、SiC半導体素子の観察には、収束イオンビーム装置(FIB:Forcused Ion Beam)を用いている(以下、図38〜図42においても同様)。上述したSiC半導体素子に熱処理を行ったことにより、トレンチ連結部113の一部に、トレンチが埋まっている部分(以下、トレンチ形成不良とする)115が発生していることが確認できる。
図1は、参考例1にかかる炭化珪素半導体素子の表面を観察した電子顕微鏡写真である。図1に示す炭化珪素(SiC)半導体素子100は、例えばSiC単結晶基板、またはSiC単結晶基板の表面にSiCエピタキシャル膜が積層された基板(以下、SiC基板とする)の表面層に、トレンチ1が設けられている。トレンチ1は、直線形状の隣り合うトレンチ(以下、トレンチ直線部とする)2と、トレンチ直線部2を構成する各トレンチ部のそれぞれの端部を接続する連結部(以下、トレンチ連結部とする)5とで構成されている。SiC基板には、複数のトレンチ1が、トレンチ直線部2にほぼ平行に、例えばストライプ状に設けられている。トレンチ直線部2は、第1トレンチ部に相当する。
図6は、参考例2にかかる炭化珪素半導体素子の表面を観察した電子顕微鏡写真である。また、図7は、図6に示す炭化珪素半導体素子の熱処理前の状態を観察した電子顕微鏡写真である。参考例1において、トレンチ連結部5に、さらに第4連結構成部および第5連結構成部を設けても良い。
図8は、実施の形態1にかかる炭化珪素半導体素子の表面を観察した電子顕微鏡写真である。また、図9は、図8に示す炭化珪素半導体素子の熱処理前の状態を観察した電子顕微鏡写真である。図8および図9に示すSiC半導体素子150の製造方法およびトレンチ形成条件は、参考例1と同様である。参考例1において、トレンチ連結部5に代えて、トレンチ直線部2に垂直な直線形状のトレンチ部(以下、垂直直線部とする)を設けても良い。このとき、トレンチ直線部2と垂直直線部とで形成されるトレンチ1の内側の終端部形状を多角形状とする。また、トレンチ直線部2を構成する各トレンチ部の端部のトレンチ幅を、トレンチ直線部2から垂直直線部にかけて徐々に広くする構成とする。
図10〜図13は、実施の形態2にかかる炭化珪素半導体素子の表面を観察した電子顕微鏡写真である。図10〜図13に示すトレンチ1は、トレンチ直線部2を構成する各トレンチ部(第1直線構成部2aおよび第2直線構成部2b)の間隔(以下、セルピッチとする)を、それぞれ3.8μm、6.5μm、10μmおよび15μmとしている。参考例1において、トレンチ連結部5の形状を、トレンチ直線部2のセルピッチによって異なる多角形状としても良い。
2 トレンチ直線部
2a 直線構成部(第1)
2b 直線構成部(第2)
3 連結構成部(第1)
4a 連結構成部(第2)
4b 連結構成部(第3)
5 トレンチ連結部
100 炭化珪素半導体素子
Claims (9)
- 炭化珪素半導体でできた基体の表面からトレンチを形成する炭化珪素半導体素子の製造方法であって、
前記トレンチを、
隣り合う直線形状の第1トレンチ部の端部同士を、前記第1トレンチ部に垂直な直線形状の第2トレンチ部でつなぎ、前記第1トレンチ部の側壁と前記第2トレンチ部の側壁とのコーナー部を多角形状に形成することを特徴とする炭化珪素半導体素子の製造方法。 - 前記第1トレンチ部のトレンチ幅を、前記第1トレンチ部の端部から前記第2トレンチ部にかけて徐々に広くすることを特徴とする請求項1に記載の炭化珪素半導体素子の製造方法。
- 炭化珪素半導体でできた基体の表面からトレンチを形成する炭化珪素半導体素子の製造方法であって、
前記トレンチを、
隣り合う直線形状の第1トレンチ部の端部同士を、前記第1トレンチ部に対して20度の角度をなす直線形状の第3トレンチ部、前記第1トレンチ部に対して40度の角度をなす直線形状の第4トレンチ部、前記第1トレンチ部に対して60度の角度をなす直線形状の第5トレンチ部および前記第1トレンチ部に対して80度の角度をなす直線形状の第6トレンチ部と、前記第1トレンチ部に垂直な直線形状の第7トレンチ部とでつなぎ、かつ外側に凸の多角形状に形成するトレンチ形成工程を含み、
前記多角形状は、前記第1トレンチ部の端部に前記第3トレンチ部の一方の端部が接続され、前記第3トレンチ部の他方の端部に前記第4トレンチ部の一方の端部が接続され、前記第4トレンチ部の他方の端部に前記第5トレンチ部の一方の端部が接続され、前記第5トレンチ部の他方の端部に前記第6トレンチ部の一方の端部が接続され、前記第6トレンチ部の他方の端部に前記第7トレンチ部の端部が接続されてなることを特徴とする炭化珪素半導体素子の製造方法。 - 前記第1トレンチ部同士の間隔は8〜12μmであることを特徴とする請求項3に記載の炭化珪素半導体素子の製造方法。
- 炭化珪素半導体でできた基体の表面からトレンチを形成する炭化珪素半導体素子の製造方法であって、
前記トレンチを、
隣り合う直線形状の第1トレンチ部の端部同士を、前記第1トレンチ部に対して11.25度の角度をなす直線形状の第8トレンチ部、前記第1トレンチ部に対して22.5度の角度をなす直線形状の第9トレンチ部、前記第1トレンチ部に対して33.75度の角度をなす直線形状の第10トレンチ部、前記第1トレンチ部に対して45度の角度をなす直線形状の第11トレンチ部、前記第1トレンチ部に対して56.25度の角度をなす直線形状の第12トレンチ部、前記第1トレンチ部に対して67.5度の角度をなす直線形状の第13トレンチ部および前記第1トレンチ部に対して78.75度の角度をなす直線形状の第14トレンチ部と、前記第1トレンチ部に垂直な直線形状の第7トレンチ部とでつなぎ、かつ外側に凸の多角形状に形成するトレンチ形成工程を含み、
前記多角形状は、前記第1トレンチ部の端部に前記第8トレンチ部の一方の端部が接続され、前記第8トレンチ部の他方の端部に前記第9トレンチ部の一方の端部が接続され、以降順次前記第9トレンチ部から前記第14トレンチ部まで接続され、前記第14トレンチ部の、前記第13トレンチ部側に対して反対側の端部が前記第7トレンチ部の端部に接続されてなることを特徴とする炭化珪素半導体素子の製造方法。 - 前記第1トレンチ部同士の間隔は12μmより広いことを特徴とする請求項5に記載の炭化珪素半導体素子の製造方法。
- 前記第1トレンチ部の側壁の面方位を、(1−100)面および(−1100)面とすることを特徴とする請求項1〜6のいずれか一つに記載の炭化珪素半導体素子の製造方法。
- 前記トレンチを、ドライエッチングにより形成することを特徴とする請求項1〜7のいずれか一つに記載の炭化珪素半導体素子の製造方法。
- 前記トレンチの形成後、1500℃以上の熱処理を行うことを特徴とする請求項1〜8のいずれか一つに記載の炭化珪素半導体素子の製造方法。
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