JP5520431B2 - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法 Download PDFInfo
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- JP5520431B2 JP5520431B2 JP2006222144A JP2006222144A JP5520431B2 JP 5520431 B2 JP5520431 B2 JP 5520431B2 JP 2006222144 A JP2006222144 A JP 2006222144A JP 2006222144 A JP2006222144 A JP 2006222144A JP 5520431 B2 JP5520431 B2 JP 5520431B2
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Description
本実施の形態では、半導体膜の作製方法の一構成に関して図面を用いて説明する。特に、本発明に用いるファイバーレーザーについて詳細に説明する。
本実施の形態では、半導体膜の作製方法の一構成に関して図面を用いて説明する。
本実施の形態では、実施の形態2で説明した構成とは別の構成について説明する。
本実施の形態では、半導体膜の作製方法の一構成に関して図面を用いて説明する。
重ね合わせる構成とする場合は、例えば重ね合わせ率(オーバーラップ率)を10〜50%とすればよい。
本実施の形態では、半導体膜の作製方法の一構成に関して図面を用いて説明する。
本実施の形態では、実施の形態5で説明した光学系とは別の構成について説明する。
本実施の形態では、実施の形態5、6で説明した光学系とは別の構成について説明する。
例えば、ゲート電極16を2層構造とする場合、第1の導電膜を20〜100nmの厚さに形成し、第2の導電膜を100〜400nmの厚さに形成する。第1の導電膜と第2の導電膜の組み合わせの例としては、窒化タンタル膜とタングステン膜、窒化タングステン膜とタングステン膜、窒化モリブデン膜とモリブデン膜等が挙げられる。タングステンや窒化タンタルは耐熱性が高いため、第1の導電膜と第2の導電膜を形成した後に、熱活性化を目的とした加熱処理を行うことができる。
102 励起光コンバイナー
103 ファイバーブラッググレーティング
104 レーザー媒質をコアにドープした光ファイバー(アクティブゲインファイバー)
105 ファイバーブラッググレーティング
106 出力ポート
107 ファイバーケーブル
Claims (1)
- レーザー光を半導体膜に照射する半導体装置の作製方法であって、
複数のファイバーレーザーの射出口を一定の間隔に配置し、
前記複数のファイバーレーザーの射出口と前記半導体膜との間にスリットを配置し、
前記配置された複数の射出口から射出される複数のレーザー光を、前記スリット及びシリンドリカルレンズを通して、複数の線状レーザー光に成形し、
前記複数の線状レーザー光を半導体膜に照射することにより、前記半導体膜を結晶化または活性化する半導体装置の作製方法であって、
前記スリットは前記線状レーザー光の長軸方向の光を遮断することを特徴とする半導体装置の作製方法。
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JP5460108B2 (ja) | 2008-04-18 | 2014-04-02 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
JP2010118409A (ja) * | 2008-11-11 | 2010-05-27 | Ulvac Japan Ltd | レーザアニール装置及びレーザアニール方法 |
DE102013103422B4 (de) * | 2013-04-05 | 2022-01-05 | Focuslight Technologies Inc. | Vorrichtung zur Erzeugung von Laserstrahlung mit einer linienförmigen Intensitätsverteilung |
US20200321363A1 (en) * | 2016-05-11 | 2020-10-08 | Ipg Photonics Corporation | Process and system for measuring morphological characteristics of fiber laser annealed polycrystalline silicon films for flat panel display |
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JPH07168040A (ja) * | 1993-12-14 | 1995-07-04 | Nippon Steel Corp | 半導体レーザー集光装置 |
JPH09179309A (ja) * | 1995-12-26 | 1997-07-11 | Sony Corp | 露光照明装置 |
JP2002280324A (ja) * | 2001-03-16 | 2002-09-27 | Sony Corp | レーザ装置 |
JP2003059858A (ja) * | 2001-08-09 | 2003-02-28 | Sony Corp | レーザアニール装置及び薄膜トランジスタの製造方法 |
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