JP5519111B2 - テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート - Google Patents
テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート Download PDFInfo
- Publication number
- JP5519111B2 JP5519111B2 JP2008021297A JP2008021297A JP5519111B2 JP 5519111 B2 JP5519111 B2 JP 5519111B2 JP 2008021297 A JP2008021297 A JP 2008021297A JP 2008021297 A JP2008021297 A JP 2008021297A JP 5519111 B2 JP5519111 B2 JP 5519111B2
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- Prior art keywords
- layer
- mtcvd
- thickness
- cvd
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims abstract description 40
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title abstract description 21
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 56
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 239000011248 coating agent Substances 0.000 claims abstract description 30
- 239000011230 binding agent Substances 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 42
- 229910052799 carbon Inorganic materials 0.000 claims description 41
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 13
- 150000001247 metal acetylides Chemical class 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 230000000737 periodic effect Effects 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 3
- OSIVBHBGRFWHOS-UHFFFAOYSA-N dicarboxycarbamic acid Chemical compound OC(=O)N(C(O)=O)C(O)=O OSIVBHBGRFWHOS-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 21
- 238000003754 machining Methods 0.000 abstract description 4
- 239000010936 titanium Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 22
- 230000008569 process Effects 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000000843 powder Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 229910052758 niobium Inorganic materials 0.000 description 5
- 230000006911 nucleation Effects 0.000 description 5
- 238000010899 nucleation Methods 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 229910001018 Cast iron Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000005422 blasting Methods 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910007926 ZrCl Inorganic materials 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000005068 cooling lubricant Substances 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/08—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F2005/001—Cutting tools, earth boring or grinding tool other than table ware
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2204/00—End product comprising different layers, coatings or parts of cermet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Adornments (AREA)
- Cookers (AREA)
- Laminated Bodies (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0700251-2 | 2007-02-01 | ||
| SE0700251A SE532023C2 (sv) | 2007-02-01 | 2007-02-01 | Texturhärdat alfa-aluminiumoxidbelagt skär för metallbearbetning |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013003594A Division JP2013107200A (ja) | 2007-02-01 | 2013-01-11 | テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008246664A JP2008246664A (ja) | 2008-10-16 |
| JP2008246664A5 JP2008246664A5 (enExample) | 2013-11-28 |
| JP5519111B2 true JP5519111B2 (ja) | 2014-06-11 |
Family
ID=39315083
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008021297A Active JP5519111B2 (ja) | 2007-02-01 | 2008-01-31 | テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート |
| JP2013003594A Pending JP2013107200A (ja) | 2007-02-01 | 2013-01-11 | テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013003594A Pending JP2013107200A (ja) | 2007-02-01 | 2013-01-11 | テクスチャーで硬化したアルファ−アルミナを被覆した切削工具インサート |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7923101B2 (enExample) |
| EP (1) | EP1953258B1 (enExample) |
| JP (2) | JP5519111B2 (enExample) |
| KR (1) | KR101521296B1 (enExample) |
| CN (1) | CN101274493B (enExample) |
| AT (1) | ATE503033T1 (enExample) |
| DE (1) | DE602008005651D1 (enExample) |
| SE (1) | SE532023C2 (enExample) |
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| SE532021C2 (sv) * | 2007-09-13 | 2009-09-29 | Seco Tools Ab | CVD belagt hårdmetallskär för frästillämpningar och tillverkningssätt |
| SE533154C2 (sv) * | 2008-12-18 | 2010-07-06 | Seco Tools Ab | Förbättrat belagt skär för grov svarvning |
| SE533972C2 (sv) * | 2009-07-27 | 2011-03-15 | Seco Tools Ab | Finkornigt belagt hårdmetallskärverktygsskär för svarvning i härdat stål och verktygsstål |
| GB0919857D0 (en) * | 2009-11-13 | 2009-12-30 | Element Six Holding Gmbh | Near-nano cemented carbides and process for production thereof |
| JP5555834B2 (ja) * | 2010-03-19 | 2014-07-23 | 国立大学法人東京工業大学 | 耐摩耗性にすぐれたミーリング加工用表面被覆切削工具およびその製造方法 |
| JP5555835B2 (ja) * | 2010-03-19 | 2014-07-23 | 国立大学法人東京工業大学 | 耐摩耗性にすぐれたターニング加工用表面被覆切削工具およびその製造方法 |
| EP2395126A1 (en) * | 2010-06-08 | 2011-12-14 | Seco Tools AB | Textured alumina layer |
| EP2446988A1 (en) | 2010-10-29 | 2012-05-02 | Seco Tools AB | Cutting tool insert with an alpha-alumina layer having a multi-components texture |
| JP5748125B2 (ja) * | 2011-08-31 | 2015-07-15 | 三菱マテリアル株式会社 | 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| DE102011053705A1 (de) * | 2011-09-16 | 2013-03-21 | Walter Ag | Schneideinsatz und Verfahren zu dessen Herstellung |
| JP5838806B2 (ja) * | 2011-12-28 | 2016-01-06 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| JP5831704B2 (ja) * | 2012-03-06 | 2015-12-09 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性、耐欠損性を備える表面被覆切削工具 |
| JP5892472B2 (ja) * | 2012-06-19 | 2016-03-23 | 三菱マテリアル株式会社 | 硬質被覆層が高速断続切削加工ですぐれた耐剥離性、耐チッピング性を発揮する表面被覆切削工具 |
| US9181621B2 (en) | 2013-03-21 | 2015-11-10 | Kennametal Inc. | Coatings for cutting tools |
| WO2014153469A1 (en) | 2013-03-21 | 2014-09-25 | Kennametal Inc. | Coatings for cutting tools |
| US9371580B2 (en) | 2013-03-21 | 2016-06-21 | Kennametal Inc. | Coated body wherein the coating scheme includes a coating layer of TiAl2O3 and method of making the same |
| EP2818573B1 (en) | 2013-06-27 | 2016-02-03 | Sandvik Intellectual Property AB | Coated cutting tool |
| EP2902528B1 (en) | 2014-01-30 | 2016-06-29 | Walter Ag | Alumina coated cutting tool with zigzag alumina grain boundaries |
| EP3099835A1 (en) * | 2014-01-30 | 2016-12-07 | Sandvik Intellectual Property AB | Alumina coated cutting tool |
| CN105506580B (zh) * | 2014-09-25 | 2018-11-20 | 株洲钻石切削刀具股份有限公司 | 表面改性涂层切削刀片及其制备方法 |
| US9719175B2 (en) | 2014-09-30 | 2017-08-01 | Kennametal Inc. | Multilayer structured coatings for cutting tools |
| US9650714B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Nanocomposite refractory coatings and applications thereof |
| US9650712B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Inter-anchored multilayer refractory coatings |
| CN106660139B (zh) | 2015-08-28 | 2020-02-18 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
| US9863064B2 (en) | 2015-10-09 | 2018-01-09 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool |
| WO2017141797A1 (ja) * | 2016-02-18 | 2017-08-24 | 株式会社タンガロイ | 被覆切削工具 |
| EP3472369B1 (en) * | 2016-06-21 | 2020-10-14 | Sandvik Intellectual Property AB | Cvd coated cutting tool |
| JP6241630B1 (ja) * | 2016-07-01 | 2017-12-06 | 株式会社タンガロイ | 被覆切削工具 |
| JP6229911B1 (ja) * | 2016-10-19 | 2017-11-15 | 株式会社タンガロイ | 被覆切削工具 |
| US10865476B2 (en) * | 2017-03-23 | 2020-12-15 | Kennametal Inc. | Control and characterization of texture in CVD α-Al2O3 coatings |
| CN108411279B (zh) * | 2018-03-30 | 2019-07-09 | 华中科技大学 | 一种高速钢刀具保护涂层的制备方法 |
| EP3848485A1 (en) | 2020-01-10 | 2021-07-14 | Sakari Ruppi | Improved alpha alumina layer deposited with controlled textures |
| EP3848484A3 (en) | 2020-01-10 | 2021-09-15 | Sakari Ruppi | Improved alumina layer deposited at low temperature |
| JP7024168B1 (ja) | 2020-06-11 | 2022-02-24 | 住友電工ハードメタル株式会社 | 切削工具 |
| US12427580B2 (en) | 2020-06-11 | 2025-09-30 | Sumitomo Electric Hardmetal Corp. | Cutting tool |
| WO2021250841A1 (ja) | 2020-06-11 | 2021-12-16 | 住友電工ハードメタル株式会社 | 切削工具 |
| CN113584459B (zh) * | 2021-08-03 | 2023-09-22 | 赣州澳克泰工具技术有限公司 | 织构强化的κ-Al2O3涂层工具及其制备方法 |
| CN116837347B (zh) * | 2023-09-01 | 2023-11-21 | 赣州澳克泰工具技术有限公司 | 一种带涂层的切削刀具及其制备方法 |
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| JPS5487719A (en) | 1977-12-23 | 1979-07-12 | Sumitomo Electric Industries | Super hard alloy and method of making same |
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| DE69007885T2 (de) | 1989-07-13 | 1994-07-28 | Seco Tools Ab | Mit mehreren Oxiden beschichteter Karbidkörper und Verfahren zu seiner Herstellung. |
| SE501527C2 (sv) | 1992-12-18 | 1995-03-06 | Sandvik Ab | Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt |
| SE502174C2 (sv) | 1993-12-23 | 1995-09-04 | Sandvik Ab | Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt |
| SE514177C2 (sv) | 1995-07-14 | 2001-01-15 | Sandvik Ab | Belagt hårdmetallskär för intermittent bearbetning i låglegerat stål |
| EP0874919B1 (en) * | 1995-11-30 | 2002-02-13 | Sandvik Aktiebolag | Coated turning insert and method of making it |
| JPH10225804A (ja) * | 1997-02-10 | 1998-08-25 | Mitsubishi Materials Corp | 耐欠損性のすぐれた表面被覆超硬合金製切削工具およびその製造法 |
| JP3678924B2 (ja) | 1998-11-05 | 2005-08-03 | 日立ツール株式会社 | 酸化アルミニウム被覆工具 |
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| SE520253C2 (sv) * | 2000-12-19 | 2003-06-17 | Sandvik Ab | Belagt hårdmetallskär |
| SE522736C2 (sv) | 2001-02-16 | 2004-03-02 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg och metod för att framställa detsamma |
| US6733874B2 (en) * | 2001-08-31 | 2004-05-11 | Mitsubishi Materials Corporation | Surface-coated carbide alloy cutting tool |
| SE525581C2 (sv) * | 2002-05-08 | 2005-03-15 | Seco Tools Ab | Skär belagt med aluminiumoxid framställt med CVD |
| JP2004181554A (ja) * | 2002-07-01 | 2004-07-02 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐熱衝撃性を有する表面被覆サーメット製切削工具 |
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| SE527349C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| SE527346C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| SE526599C2 (sv) * | 2003-06-16 | 2005-10-18 | Seco Tools Ab | CVD-belagt hårdmetallskär |
| JP4512989B2 (ja) * | 2003-12-26 | 2010-07-28 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具 |
| JP2005238437A (ja) * | 2004-01-27 | 2005-09-08 | Mitsubishi Materials Corp | 硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具 |
| JP2005313242A (ja) * | 2004-04-27 | 2005-11-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐熱衝撃性を有する表面被覆サーメット製切削工具 |
| JP2006026814A (ja) * | 2004-07-16 | 2006-02-02 | Tungaloy Corp | 被覆切削チップ |
| SE528431C2 (sv) | 2004-11-05 | 2006-11-14 | Seco Tools Ab | Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta |
| SE528432C2 (sv) | 2004-11-05 | 2006-11-14 | Seco Tools Ab | Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta |
| SE529590C2 (sv) * | 2005-06-27 | 2007-09-25 | Sandvik Intellectual Property | Finkorniga sintrade hårdmetaller innehållande en gradientzon |
| SE529051C2 (sv) | 2005-09-27 | 2007-04-17 | Seco Tools Ab | Skärverktygsskär belagt med aluminiumoxid |
-
2007
- 2007-02-01 SE SE0700251A patent/SE532023C2/sv unknown
-
2008
- 2008-01-29 EP EP08446001A patent/EP1953258B1/en not_active Revoked
- 2008-01-29 US US12/021,839 patent/US7923101B2/en active Active
- 2008-01-29 AT AT08446001T patent/ATE503033T1/de active
- 2008-01-29 DE DE602008005651T patent/DE602008005651D1/de active Active
- 2008-01-31 JP JP2008021297A patent/JP5519111B2/ja active Active
- 2008-02-01 CN CN2008100053569A patent/CN101274493B/zh active Active
- 2008-02-01 KR KR1020080010851A patent/KR101521296B1/ko active Active
-
2013
- 2013-01-11 JP JP2013003594A patent/JP2013107200A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP1953258A1 (en) | 2008-08-06 |
| JP2008246664A (ja) | 2008-10-16 |
| KR101521296B1 (ko) | 2015-05-18 |
| SE0700251L (sv) | 2008-08-02 |
| KR20080072587A (ko) | 2008-08-06 |
| DE602008005651D1 (de) | 2011-05-05 |
| CN101274493B (zh) | 2011-11-30 |
| US7923101B2 (en) | 2011-04-12 |
| JP2013107200A (ja) | 2013-06-06 |
| CN101274493A (zh) | 2008-10-01 |
| SE532023C2 (sv) | 2009-09-29 |
| EP1953258B1 (en) | 2011-03-23 |
| ATE503033T1 (de) | 2011-04-15 |
| US20080187774A1 (en) | 2008-08-07 |
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