JP5515921B2 - 恒温型圧電発振器の製造方法 - Google Patents
恒温型圧電発振器の製造方法 Download PDFInfo
- Publication number
- JP5515921B2 JP5515921B2 JP2010067497A JP2010067497A JP5515921B2 JP 5515921 B2 JP5515921 B2 JP 5515921B2 JP 2010067497 A JP2010067497 A JP 2010067497A JP 2010067497 A JP2010067497 A JP 2010067497A JP 5515921 B2 JP5515921 B2 JP 5515921B2
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- Prior art keywords
- temperature
- frequency
- piezoelectric oscillator
- voltage
- tov
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 12
- 230000010355 oscillation Effects 0.000 claims description 10
- 239000013078 crystal Substances 0.000 description 42
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 238000012890 quintic function Methods 0.000 description 7
- 238000012888 cubic function Methods 0.000 description 6
- 238000012886 linear function Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/04—Constructional details for maintaining temperature constant
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/02—Details
- H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
- H03L1/023—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature by using voltage variable capacitance diodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010067497A JP5515921B2 (ja) | 2010-03-24 | 2010-03-24 | 恒温型圧電発振器の製造方法 |
| US13/026,375 US8482356B2 (en) | 2010-03-24 | 2011-02-14 | Constant-temperature piezoelectric oscillator and method of manufacturing the same |
| CN201110070549.4A CN102201787B (zh) | 2010-03-24 | 2011-03-23 | 恒温型压电振荡器及其制造方法 |
| US13/857,437 US9007134B2 (en) | 2010-03-24 | 2013-04-05 | Constant-temperature piezoelectric oscillator and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010067497A JP5515921B2 (ja) | 2010-03-24 | 2010-03-24 | 恒温型圧電発振器の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011205166A JP2011205166A (ja) | 2011-10-13 |
| JP2011205166A5 JP2011205166A5 (enExample) | 2013-05-09 |
| JP5515921B2 true JP5515921B2 (ja) | 2014-06-11 |
Family
ID=44655721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010067497A Expired - Fee Related JP5515921B2 (ja) | 2010-03-24 | 2010-03-24 | 恒温型圧電発振器の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US8482356B2 (enExample) |
| JP (1) | JP5515921B2 (enExample) |
| CN (1) | CN102201787B (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5515921B2 (ja) * | 2010-03-24 | 2014-06-11 | セイコーエプソン株式会社 | 恒温型圧電発振器の製造方法 |
| JP5966577B2 (ja) * | 2012-05-08 | 2016-08-10 | セイコーエプソン株式会社 | 温度補償回路、回路装置、電子機器及び調整方法 |
| JP6123979B2 (ja) * | 2012-05-23 | 2017-05-10 | セイコーエプソン株式会社 | 発振装置及び電子機器 |
| JP6060011B2 (ja) * | 2013-03-12 | 2017-01-11 | 京セラクリスタルデバイス株式会社 | 発振器 |
| JP2014197751A (ja) * | 2013-03-29 | 2014-10-16 | セイコーエプソン株式会社 | 発振器、電子機器及び移動体 |
| JP6350793B2 (ja) * | 2013-12-25 | 2018-07-04 | セイコーエプソン株式会社 | 発振回路、発振器、電子機器、移動体及び発振器の製造方法 |
| JP6177155B2 (ja) * | 2014-02-10 | 2017-08-09 | ソニーセミコンダクタソリューションズ株式会社 | 発振回路および周波数シンセサイザ |
| CN104506140A (zh) * | 2014-11-04 | 2015-04-08 | 中国科学院上海光学精密机械研究所 | 恒温晶体振荡器高精度频率控制装置及其控制方法 |
| JP2016144128A (ja) * | 2015-02-04 | 2016-08-08 | セイコーエプソン株式会社 | 発振器、電子機器及び移動体 |
| JP2017139682A (ja) * | 2016-02-05 | 2017-08-10 | セイコーエプソン株式会社 | 振動片、振動片の製造方法、発振器、電子機器、移動体、および基地局 |
| US10149193B2 (en) | 2016-06-15 | 2018-12-04 | At&T Intellectual Property I, L.P. | Method and apparatus for dynamically managing network resources |
| US10454836B2 (en) | 2016-11-01 | 2019-10-22 | At&T Intellectual Property I, L.P. | Method and apparatus for dynamically adapting a software defined network |
| US10284730B2 (en) | 2016-11-01 | 2019-05-07 | At&T Intellectual Property I, L.P. | Method and apparatus for adaptive charging and performance in a software defined network |
| US10505870B2 (en) | 2016-11-07 | 2019-12-10 | At&T Intellectual Property I, L.P. | Method and apparatus for a responsive software defined network |
| US10469376B2 (en) | 2016-11-15 | 2019-11-05 | At&T Intellectual Property I, L.P. | Method and apparatus for dynamic network routing in a software defined network |
| KR102610822B1 (ko) * | 2016-11-30 | 2023-12-06 | 삼성전자주식회사 | 오실레이터를 제어하기 위한 회로 및 이를 포함하는 장치 |
| US10039006B2 (en) | 2016-12-05 | 2018-07-31 | At&T Intellectual Property I, L.P. | Method and system providing local data breakout within mobility networks |
| US10264075B2 (en) * | 2017-02-27 | 2019-04-16 | At&T Intellectual Property I, L.P. | Methods, systems, and devices for multiplexing service information from sensor data |
| US10469286B2 (en) | 2017-03-06 | 2019-11-05 | At&T Intellectual Property I, L.P. | Methods, systems, and devices for managing client devices using a virtual anchor manager |
| US10749796B2 (en) | 2017-04-27 | 2020-08-18 | At&T Intellectual Property I, L.P. | Method and apparatus for selecting processing paths in a software defined network |
| US10212289B2 (en) | 2017-04-27 | 2019-02-19 | At&T Intellectual Property I, L.P. | Method and apparatus for managing resources in a software defined network |
| US10673751B2 (en) | 2017-04-27 | 2020-06-02 | At&T Intellectual Property I, L.P. | Method and apparatus for enhancing services in a software defined network |
| US10819606B2 (en) | 2017-04-27 | 2020-10-27 | At&T Intellectual Property I, L.P. | Method and apparatus for selecting processing paths in a converged network |
| US10382903B2 (en) | 2017-05-09 | 2019-08-13 | At&T Intellectual Property I, L.P. | Multi-slicing orchestration system and method for service and/or content delivery |
| US10257668B2 (en) | 2017-05-09 | 2019-04-09 | At&T Intellectual Property I, L.P. | Dynamic network slice-switching and handover system and method |
| US10070344B1 (en) | 2017-07-25 | 2018-09-04 | At&T Intellectual Property I, L.P. | Method and system for managing utilization of slices in a virtual network function environment |
| US10425084B2 (en) * | 2017-10-03 | 2019-09-24 | Murata Manufacturing Co., Ltd. | Oven controlled MEMS oscillator and system and method for calibrating the same |
| US10104548B1 (en) | 2017-12-18 | 2018-10-16 | At&T Intellectual Property I, L.P. | Method and apparatus for dynamic instantiation of virtual service slices for autonomous machines |
| CN110336535A (zh) * | 2019-06-12 | 2019-10-15 | Oppo广东移动通信有限公司 | 一种晶体振荡器校准方法、装置、终端设备及存储介质 |
| DE112020006422T5 (de) * | 2020-03-19 | 2022-11-03 | Murata Manufacturing Co., Ltd. | Kristallschwingelement, kristallschwinger und kristalloszillator |
| CN111490781B (zh) * | 2020-04-22 | 2023-05-26 | 中国科学院国家授时中心 | 一种基于温度变化差驾驭压控晶振的时间保持方法 |
| CN111884589B (zh) * | 2020-08-26 | 2021-11-05 | 硅谷数模(苏州)半导体有限公司 | 频率源的温度补偿参数确定方法和装置 |
| CN113285671B (zh) * | 2021-05-14 | 2023-08-22 | 广东虹勤通讯技术有限公司 | 数字晶体振荡器频率-温度补偿曲线校准的方法及装置 |
| CN114035024B (zh) * | 2021-10-26 | 2023-11-14 | 深圳市兴威帆电子技术有限公司 | 一种实时时钟芯片的测试系统及其方法 |
| CN114594807B (zh) * | 2022-03-07 | 2023-02-28 | 黄山奥仪电器有限公司 | 一种基于vti的恒温控制系统 |
| KR102683305B1 (ko) * | 2022-04-19 | 2024-07-09 | 주식회사 다인이엔지 | 압전소자의 온도 유지 기능이 향상된 압전식 진동기를 포함하는 부품공급장치 |
| CN115001483B (zh) * | 2022-07-15 | 2022-10-28 | 深圳市英特瑞半导体科技有限公司 | 自适应温度变化时钟模块及自适应温度变化方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2007A (en) * | 1841-03-16 | Improvement in the mode of harvesting grain | ||
| JPS6355614A (ja) | 1986-08-27 | 1988-03-10 | Nippon Telegr & Teleph Corp <Ntt> | 情報処理装置タイマ管理方式 |
| JPS6355614U (enExample) * | 1986-09-29 | 1988-04-14 | ||
| JPS6482809A (en) * | 1987-09-25 | 1989-03-28 | Kinseki Ltd | Digital temperature compensated crystal oscillator |
| JPH01248806A (ja) * | 1988-03-30 | 1989-10-04 | Nec Corp | 恒温槽型圧電発振装置 |
| JPH0296406A (ja) * | 1988-09-30 | 1990-04-09 | Nippon Dempa Kogyo Co Ltd | 温度補償水晶発振器 |
| GB2233513A (en) * | 1989-06-09 | 1991-01-09 | Philips Electronic Associated | Oscillators |
| JP3272633B2 (ja) | 1997-04-30 | 2002-04-08 | キンセキ株式会社 | 恒温槽型圧電発振器 |
| WO2004025824A1 (ja) * | 2002-08-28 | 2004-03-25 | Asahi Kasei Microsystems Co., Ltd. | 近似n次関数発生装置及び温度補償水晶発振回路 |
| JP2005124022A (ja) * | 2003-10-20 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 関数発生回路 |
| US7253694B2 (en) | 2004-07-15 | 2007-08-07 | C-Mac Quartz Crystals, Limited | Temperature compensated oven controlled crystal oscillator |
| JP4796414B2 (ja) | 2006-03-14 | 2011-10-19 | 日本電波工業株式会社 | 水晶発振器 |
| CN100527597C (zh) * | 2006-03-28 | 2009-08-12 | 青岛硅盛微电子有限公司 | 高精度温度补偿晶体振荡器 |
| US7482889B2 (en) * | 2006-06-28 | 2009-01-27 | Cts Corporation | Apparatus and method of temperature compensating an ovenized oscillator |
| WO2008010298A1 (en) * | 2006-07-21 | 2008-01-24 | Mitsubishi Electric Corporation | Modulation signal generation circuit, transmission/reception module, and radar device |
| US7466209B2 (en) * | 2007-01-05 | 2008-12-16 | Sirf Technology, Inc. | System and method for providing temperature correction in a crystal oscillator |
| JP2009200888A (ja) * | 2008-02-22 | 2009-09-03 | Seiko Instruments Inc | Mems発振器 |
| JP5515921B2 (ja) * | 2010-03-24 | 2014-06-11 | セイコーエプソン株式会社 | 恒温型圧電発振器の製造方法 |
-
2010
- 2010-03-24 JP JP2010067497A patent/JP5515921B2/ja not_active Expired - Fee Related
-
2011
- 2011-02-14 US US13/026,375 patent/US8482356B2/en not_active Expired - Fee Related
- 2011-03-23 CN CN201110070549.4A patent/CN102201787B/zh not_active Expired - Fee Related
-
2013
- 2013-04-05 US US13/857,437 patent/US9007134B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011205166A (ja) | 2011-10-13 |
| US20140070892A1 (en) | 2014-03-13 |
| US20110234328A1 (en) | 2011-09-29 |
| CN102201787B (zh) | 2015-01-14 |
| US8482356B2 (en) | 2013-07-09 |
| US9007134B2 (en) | 2015-04-14 |
| CN102201787A (zh) | 2011-09-28 |
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