JP5513821B2 - 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法 - Google Patents

渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法 Download PDF

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JP5513821B2
JP5513821B2 JP2009216012A JP2009216012A JP5513821B2 JP 5513821 B2 JP5513821 B2 JP 5513821B2 JP 2009216012 A JP2009216012 A JP 2009216012A JP 2009216012 A JP2009216012 A JP 2009216012A JP 5513821 B2 JP5513821 B2 JP 5513821B2
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coil
eddy current
current sensor
sensor
detection
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JP2011064590A (ja
JP2011064590A5 (https=
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弘行 篠崎
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Ebara Corp
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Ebara Corp
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JP2009216012A 2009-09-17 2009-09-17 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法 Active JP5513821B2 (ja)

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JP2009216012A JP5513821B2 (ja) 2009-09-17 2009-09-17 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法

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JP2009216012A JP5513821B2 (ja) 2009-09-17 2009-09-17 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法

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JP2011064590A5 JP2011064590A5 (https=) 2012-10-25
JP5513821B2 true JP5513821B2 (ja) 2014-06-04

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016189999A1 (ja) * 2015-05-22 2017-06-15 三菱電機株式会社 電磁界プローブ
JP6756540B2 (ja) 2016-08-08 2020-09-16 株式会社荏原製作所 めっき装置、めっき装置の制御方法、及び、めっき装置の制御方法をコンピュータに実行させるためのプログラムを格納した記憶媒体
CN106441068A (zh) * 2016-10-31 2017-02-22 天津因科新创科技有限公司 一种用于壁厚检测的脉冲涡流传感器
US11092635B2 (en) 2017-01-27 2021-08-17 Mitsubishi Electric Corporation Electromagnetic field probe
WO2022046400A1 (en) * 2020-08-25 2022-03-03 Corning Incorporated In-situ deposition thickness monitoring
TWI750018B (zh) * 2021-01-25 2021-12-11 日商荏原製作所股份有限公司 鍍覆裝置及基板之膜厚量測方法

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JPS5543420A (en) * 1978-09-25 1980-03-27 Saginomiya Seisakusho Inc Metallic material examination device
JPS60144603A (ja) * 1984-01-07 1985-07-31 Nippon Steel Corp 被覆金属管の被膜厚さ連続測定方法
JPS61159101A (ja) * 1984-10-19 1986-07-18 コルモーゲン　コーポレイション 位置および速度センサ
JPS61151402A (ja) * 1984-12-26 1986-07-10 Nippon Kokan Kk <Nkk> 差動相互誘導型渦流計測用センサ
JPS6290502A (ja) * 1985-06-07 1987-04-25 Nippon Kokan Kk <Nkk> 差分帰還型渦電流距離測定装置
JPH0194201A (ja) * 1987-10-06 1989-04-12 Sumitomo Metal Ind Ltd 溶融スラグ厚さの測定方法及び装置
EP0518635B1 (en) * 1991-06-11 2003-05-21 Newt Holdings Limited Probe
JPH05231809A (ja) * 1992-02-24 1993-09-07 Nippon Denshi Kogyo Kk 起電力形渦電流変位計
JPH09152423A (ja) * 1995-12-01 1997-06-10 Daido Steel Co Ltd 渦流探傷用プローブコイル
US6291992B1 (en) * 1996-07-12 2001-09-18 Shell Oil Company Eddy current inspection technique
JPH10197493A (ja) * 1997-01-14 1998-07-31 Mitsubishi Heavy Ind Ltd 渦電流探傷プローブ
JPH11248684A (ja) * 1998-03-03 1999-09-17 Daido Steel Co Ltd 渦流探傷装置
JP2000337809A (ja) * 1999-05-28 2000-12-08 Nippon Steel Corp 差動型渦流距離計
DE60116757T4 (de) * 2000-05-19 2007-01-18 Applied Materials, Inc., Santa Clara Verfahren und vorrichtung zur "in-situ" überwachung der dicke während des chemisch-mechanischen planiervorganges
US6538435B2 (en) * 2000-08-24 2003-03-25 Shell Oil Company Method for detecting an anomaly in an object of electrically conductive material along first and second direction at inspection points
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JP3587822B2 (ja) * 2001-07-23 2004-11-10 株式会社荏原製作所 渦電流センサ
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JP2005011977A (ja) * 2003-06-18 2005-01-13 Ebara Corp 基板研磨装置および基板研磨方法
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JP4617677B2 (ja) * 2004-02-04 2011-01-26 Ｊｆｅスチール株式会社 層厚測定方法、システム及び層厚測定方法のプログラム
JP5065614B2 (ja) * 2006-04-14 2012-11-07 株式会社アルバック 渦電流式膜厚計
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JP2007298323A (ja) * 2006-04-28 2007-11-15 Non-Destructive Inspection Co Ltd 電磁波パルスによる減肉検出方法及び減肉検出装置

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