JP5509742B2 - 圧電アクチュエータ及びこれを用いた光走査装置 - Google Patents

圧電アクチュエータ及びこれを用いた光走査装置 Download PDF

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Publication number
JP5509742B2
JP5509742B2 JP2009205313A JP2009205313A JP5509742B2 JP 5509742 B2 JP5509742 B2 JP 5509742B2 JP 2009205313 A JP2009205313 A JP 2009205313A JP 2009205313 A JP2009205313 A JP 2009205313A JP 5509742 B2 JP5509742 B2 JP 5509742B2
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Prior art keywords
piezoelectric actuator
axis
drive
driving
spring
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JP2009205313A
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Japanese (ja)
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JP2011061881A5 (zh
JP2011061881A (ja
Inventor
司 山田
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Mitsumi Electric Co Ltd
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Mitsumi Electric Co Ltd
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Publication date
Application filed by Mitsumi Electric Co Ltd filed Critical Mitsumi Electric Co Ltd
Priority to JP2009205313A priority Critical patent/JP5509742B2/ja
Priority to CN201080032814.3A priority patent/CN102474204B/zh
Priority to PCT/JP2010/064794 priority patent/WO2011027742A1/ja
Priority to KR1020127001948A priority patent/KR101478205B1/ko
Publication of JP2011061881A publication Critical patent/JP2011061881A/ja
Publication of JP2011061881A5 publication Critical patent/JP2011061881A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2009205313A 2009-09-04 2009-09-04 圧電アクチュエータ及びこれを用いた光走査装置 Active JP5509742B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009205313A JP5509742B2 (ja) 2009-09-04 2009-09-04 圧電アクチュエータ及びこれを用いた光走査装置
CN201080032814.3A CN102474204B (zh) 2009-09-04 2010-08-31 压电致动器以及具有压电致动器的光扫描装置
PCT/JP2010/064794 WO2011027742A1 (ja) 2009-09-04 2010-08-31 圧電アクチュエータ及び圧電アクチュエータを備える光走査装置
KR1020127001948A KR101478205B1 (ko) 2009-09-04 2010-08-31 압전 액츄에이터 및 압전 액츄에이터를 구비한 광주사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009205313A JP5509742B2 (ja) 2009-09-04 2009-09-04 圧電アクチュエータ及びこれを用いた光走査装置

Publications (3)

Publication Number Publication Date
JP2011061881A JP2011061881A (ja) 2011-03-24
JP2011061881A5 JP2011061881A5 (zh) 2012-09-20
JP5509742B2 true JP5509742B2 (ja) 2014-06-04

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Family Applications (1)

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JP2009205313A Active JP5509742B2 (ja) 2009-09-04 2009-09-04 圧電アクチュエータ及びこれを用いた光走査装置

Country Status (4)

Country Link
JP (1) JP5509742B2 (zh)
KR (1) KR101478205B1 (zh)
CN (1) CN102474204B (zh)
WO (1) WO2011027742A1 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5293668B2 (ja) * 2010-03-30 2013-09-18 パナソニック株式会社 光学反射素子
JP5323155B2 (ja) * 2011-09-08 2013-10-23 富士フイルム株式会社 ミラー駆動装置及びその駆動方法並びに製造方法
JP5790384B2 (ja) 2011-09-30 2015-10-07 ミツミ電機株式会社 アクチュエータ及び光走査装置
US9341840B2 (en) 2012-06-13 2016-05-17 Intel Corporation MEMS device
JP6052100B2 (ja) * 2012-09-27 2016-12-27 ミツミ電機株式会社 圧電アクチュエータ及び光走査装置
JP2014126725A (ja) * 2012-12-27 2014-07-07 Funai Electric Co Ltd 走査ミラー装置
KR101449952B1 (ko) * 2013-10-18 2014-10-14 희성전자 주식회사 광 제공 모듈 및 이를 구비하는 디스플레이 장치
JP6289957B2 (ja) * 2014-03-25 2018-03-07 スタンレー電気株式会社 光偏向器
JP6287546B2 (ja) * 2014-04-25 2018-03-07 ミツミ電機株式会社 アクチュエータ及びエアポンプ、理美容機器及びレーザー走査機器
JP6310786B2 (ja) * 2014-06-24 2018-04-11 スタンレー電気株式会社 光偏向器
US9766450B2 (en) * 2014-10-15 2017-09-19 Ricoh Company, Ltd. Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus
JP6648443B2 (ja) * 2014-10-15 2020-02-14 株式会社リコー 光偏向器、２次元画像表示装置、光走査装置及び画像形成装置
WO2017141529A1 (ja) * 2016-02-17 2017-08-24 三菱電機株式会社 ミラー駆動装置、ミラー駆動装置の制御方法およびミラー駆動装置の製造方法
WO2018230065A1 (ja) * 2017-06-13 2018-12-20 三菱電機株式会社 光走査装置および光走査装置の調整方法
EP3608728B1 (fr) * 2018-08-08 2022-02-16 Nivarox-FAR S.A. Spiral thermocompensé coloré et son procédé de fabrication
EP3835846A4 (en) * 2018-08-10 2022-04-27 Hamamatsu Photonics K.K. ACTUATOR DEVICE, AND METHOD FOR MAKING AN ACTUATOR DEVICE
JP7154309B2 (ja) 2018-10-25 2022-10-17 富士フイルム株式会社 マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法
JP7247778B2 (ja) 2019-06-20 2023-03-29 株式会社リコー 光偏向装置、レーザレーダ装置、及び画像形成装置
EP3825748A1 (en) 2019-11-21 2021-05-26 Ricoh Company, Ltd. Light reflection device and mobile object
JP2022175658A (ja) * 2021-05-14 2022-11-25 スタンレー電気株式会社 光偏向器
US20230384581A1 (en) * 2022-05-26 2023-11-30 Microsoft Technology Licensing, Llc Piezoelectrically-actuated resonant scanning mirror

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09159938A (ja) * 1995-12-11 1997-06-20 Fuji Electric Co Ltd マイクロミラー装置
JP4092283B2 (ja) * 2003-11-17 2008-05-28 スタンレー電気株式会社 ２次元光スキャナ及び光学装置
JP2005266074A (ja) * 2004-03-17 2005-09-29 Anritsu Corp 光スキャナ
JP2005268074A (ja) * 2004-03-19 2005-09-29 Takeuchi Kogyo Kk フレキシブルフラットケーブル母材およびフレキシブルフラットケーブル
CN100381863C (zh) * 2005-12-07 2008-04-16 云南省煤炭供销总公司 闪耀光栅数字微镜显示系统
JP4984117B2 (ja) * 2006-07-13 2012-07-25 スタンレー電気株式会社 ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法
JP5239382B2 (ja) * 2008-02-19 2013-07-17 パナソニック株式会社 光学反射素子
CN101478269B (zh) * 2009-02-12 2011-04-06 上海交通大学 带有延伸臂的u型柔性梁复合材料电热微驱动器

Also Published As

Publication number Publication date
WO2011027742A1 (ja) 2011-03-10
KR20120039662A (ko) 2012-04-25
CN102474204A (zh) 2012-05-23
JP2011061881A (ja) 2011-03-24
KR101478205B1 (ko) 2014-12-31
CN102474204B (zh) 2014-11-05

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