JP5499852B2 - 振動片、振動子 - Google Patents

振動片、振動子 Download PDF

Info

Publication number
JP5499852B2
JP5499852B2 JP2010089259A JP2010089259A JP5499852B2 JP 5499852 B2 JP5499852 B2 JP 5499852B2 JP 2010089259 A JP2010089259 A JP 2010089259A JP 2010089259 A JP2010089259 A JP 2010089259A JP 5499852 B2 JP5499852 B2 JP 5499852B2
Authority
JP
Japan
Prior art keywords
taper
width
vibrating arm
length
occupancy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010089259A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011223230A (ja
JP2011223230A5 (enExample
Inventor
明法 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010089259A priority Critical patent/JP5499852B2/ja
Priority to TW100111696A priority patent/TWI474618B/zh
Priority to TW104101409A priority patent/TW201524118A/zh
Priority to US13/079,163 priority patent/US8816572B2/en
Priority to KR1020110032042A priority patent/KR20110113144A/ko
Priority to CN201110086238.7A priority patent/CN102215031B/zh
Priority to CN201410645694.4A priority patent/CN104506160B/zh
Priority to CN201410027347.5A priority patent/CN103812471A/zh
Publication of JP2011223230A publication Critical patent/JP2011223230A/ja
Publication of JP2011223230A5 publication Critical patent/JP2011223230A5/ja
Priority to US14/255,421 priority patent/US9252741B2/en
Application granted granted Critical
Publication of JP5499852B2 publication Critical patent/JP5499852B2/ja
Priority to US14/336,190 priority patent/US9257961B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
JP2010089259A 2010-04-08 2010-04-08 振動片、振動子 Expired - Fee Related JP5499852B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2010089259A JP5499852B2 (ja) 2010-04-08 2010-04-08 振動片、振動子
TW100111696A TWI474618B (zh) 2010-04-08 2011-04-01 Vibration plate, vibrator and sensor
TW104101409A TW201524118A (zh) 2010-04-08 2011-04-01 振動片及振動器
US13/079,163 US8816572B2 (en) 2010-04-08 2011-04-04 Resonator element and resonator having a tapered arm next to the base
CN201110086238.7A CN102215031B (zh) 2010-04-08 2011-04-07 振动片以及振子
CN201410645694.4A CN104506160B (zh) 2010-04-08 2011-04-07 振动片、振子以及传感器
KR1020110032042A KR20110113144A (ko) 2010-04-08 2011-04-07 진동편, 진동자
CN201410027347.5A CN103812471A (zh) 2010-04-08 2011-04-07 振动片以及振子
US14/255,421 US9252741B2 (en) 2010-04-08 2014-04-17 Resonator element and resonator having a tapered arm next to the base
US14/336,190 US9257961B2 (en) 2010-04-08 2014-07-21 Resonator element and resonator having a tapered arm next to the base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010089259A JP5499852B2 (ja) 2010-04-08 2010-04-08 振動片、振動子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014049847A Division JP2014112960A (ja) 2014-03-13 2014-03-13 振動片、振動子

Publications (3)

Publication Number Publication Date
JP2011223230A JP2011223230A (ja) 2011-11-04
JP2011223230A5 JP2011223230A5 (enExample) 2013-12-19
JP5499852B2 true JP5499852B2 (ja) 2014-05-21

Family

ID=44746187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010089259A Expired - Fee Related JP5499852B2 (ja) 2010-04-08 2010-04-08 振動片、振動子

Country Status (5)

Country Link
US (3) US8816572B2 (enExample)
JP (1) JP5499852B2 (enExample)
KR (1) KR20110113144A (enExample)
CN (3) CN104506160B (enExample)
TW (2) TW201524118A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5565154B2 (ja) * 2009-09-11 2014-08-06 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
US20110227458A1 (en) * 2010-03-17 2011-09-22 Seiko Epson Corporation Piezoelectric resonator element, piezoelectric device, and electronic apparatus
JP5499852B2 (ja) * 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6160027B2 (ja) * 2012-04-27 2017-07-12 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
JP6340774B2 (ja) * 2013-11-16 2018-06-13 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
JP6450551B2 (ja) * 2014-09-30 2019-01-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6552225B2 (ja) 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
US10170684B2 (en) * 2015-09-30 2019-01-01 Kyocera Corporation Tuning fork type crystal blank, tuning fork type crystal element, and crystal device
CN117767910B (zh) * 2023-12-29 2025-09-12 天津大学 一种音叉型压电振动片及振荡器

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2224159B (en) * 1988-09-09 1992-07-08 Seiko Electronic Components Resonator
TW427059B (en) * 1998-08-07 2001-03-21 Tdk Corp Resonator, piezoelectric resonator and the manufacturing method thereof
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
JP2002319838A (ja) * 2001-02-19 2002-10-31 Seiko Epson Corp 圧電デバイス及びそのパッケージ
JP4281348B2 (ja) * 2002-12-17 2009-06-17 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4356366B2 (ja) 2003-06-10 2009-11-04 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP2005151423A (ja) * 2003-11-19 2005-06-09 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2005184767A (ja) 2003-11-27 2005-07-07 Seiko Epson Corp 音叉型圧電振動片および音叉型圧電振動子の製造方法
JP4409979B2 (ja) 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
KR100712758B1 (ko) * 2004-09-24 2007-04-30 세이코 엡슨 가부시키가이샤 압전 진동편 및 압전 디바이스
JP4591035B2 (ja) * 2004-10-21 2010-12-01 セイコーエプソン株式会社 圧電振動片ならびに圧電デバイスの製造方法
JP4277818B2 (ja) 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4609196B2 (ja) * 2005-06-20 2011-01-12 セイコーエプソン株式会社 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
JP2007258918A (ja) * 2006-03-22 2007-10-04 Epson Toyocom Corp 圧電デバイス
US20080211350A1 (en) * 2006-08-18 2008-09-04 Epson Toyocom Corporation Piezoelectric resonator element and piezoelectric device
JP4985960B2 (ja) 2007-06-07 2012-07-25 セイコーエプソン株式会社 振動片及び振動子
EP2017960B1 (fr) * 2007-07-19 2009-12-30 ETA SA Manufacture Horlogère Suisse Résonateur piézo-électrique ayant des capacités motionnelles optimisées
CN101803188B (zh) * 2007-09-13 2014-07-09 西铁城控股株式会社 水晶振子片及其制造方法
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
US8067880B2 (en) 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP2010157933A (ja) 2008-12-27 2010-07-15 Epson Toyocom Corp 屈曲振動片及び電子部品
JP5454134B2 (ja) 2008-12-27 2014-03-26 セイコーエプソン株式会社 振動片、振動子、センサー及び電子部品
JP5445114B2 (ja) * 2009-03-02 2014-03-19 セイコーエプソン株式会社 振動片および発振器
JP2010252302A (ja) 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010226610A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010226608A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP5499852B2 (ja) * 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP2012120014A (ja) * 2010-12-02 2012-06-21 Seiko Epson Corp 圧電振動素子、その製造方法、圧電振動子及び圧電発振器
JP5912557B2 (ja) * 2011-03-29 2016-04-27 日本電波工業株式会社 音叉型圧電振動片及び圧電デバイス

Also Published As

Publication number Publication date
US8816572B2 (en) 2014-08-26
US20110248600A1 (en) 2011-10-13
JP2011223230A (ja) 2011-11-04
US20140327342A1 (en) 2014-11-06
TW201203855A (en) 2012-01-16
TW201524118A (zh) 2015-06-16
US9252741B2 (en) 2016-02-02
KR20110113144A (ko) 2011-10-14
US9257961B2 (en) 2016-02-09
CN104506160A (zh) 2015-04-08
US20140225480A1 (en) 2014-08-14
TWI474618B (zh) 2015-02-21
CN102215031A (zh) 2011-10-12
CN103812471A (zh) 2014-05-21
CN104506160B (zh) 2017-08-25
CN102215031B (zh) 2014-12-10

Similar Documents

Publication Publication Date Title
JP5499852B2 (ja) 振動片、振動子
JP4324811B2 (ja) 圧電振動子及びその製造方法
JP4985960B2 (ja) 振動片及び振動子
JP4553157B2 (ja) 音叉型圧電振動片及び音叉型圧電振動子
JP2011155628A (ja) 振動片、振動子、発振器、電子機器、および周波数調整方法
JP4407845B2 (ja) 圧電振動子及びその製造方法並びに圧電振動子用の蓋
JP5584500B2 (ja) 圧電フレーム及び圧電デバイス
JP4647677B2 (ja) 圧電デバイス
JP2011082945A (ja) 屈曲振動片、屈曲振動子、および電子デバイス
JP2011234072A (ja) 圧電振動片および圧電デバイス
JP2011199330A (ja) 振動片、振動子、発振器
JP4993080B2 (ja) 音叉型圧電振動片
JP2013098813A (ja) 圧電振動片及び圧電デバイス
JP5796280B2 (ja) 振動片、振動子及び発振器
JP2005123828A (ja) 音叉型圧電振動片及び圧電デバイス
JP2014112960A (ja) 振動片、振動子
JP2008193581A (ja) 圧電振動子及びその製造方法
JP5494175B2 (ja) 圧電振動片及び圧電デバイス
JP5057122B2 (ja) 圧電振動片および圧電振動子
JP5552836B2 (ja) 圧電振動片、圧電振動子及び発振器
JP2009017005A (ja) 圧電振動子及びその製造方法
JP2008008638A (ja) 圧電デバイス
JP2008193400A (ja) 圧電振動子及びその製造方法
JP2008005089A (ja) 輪郭振動片、輪郭振動子

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130304

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20131031

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131106

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131126

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140122

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140212

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140225

R150 Certificate of patent or registration of utility model

Ref document number: 5499852

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees