JP5480545B2 - 防振継手 - Google Patents
防振継手 Download PDFInfo
- Publication number
- JP5480545B2 JP5480545B2 JP2009158451A JP2009158451A JP5480545B2 JP 5480545 B2 JP5480545 B2 JP 5480545B2 JP 2009158451 A JP2009158451 A JP 2009158451A JP 2009158451 A JP2009158451 A JP 2009158451A JP 5480545 B2 JP5480545 B2 JP 5480545B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- elastic body
- metal bellows
- decompression container
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002184 metal Substances 0.000 claims description 61
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 230000002093 peripheral effect Effects 0.000 claims description 31
- 229920001971 elastomer Polymers 0.000 claims description 23
- 230000006837 decompression Effects 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000013016 damping Methods 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 10
- 230000008602 contraction Effects 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Description
のであった。
2 真空チャンバの床(減圧容器側)
3 真空ポンプのケーシング(加振源となる機器側)
4 ゴム弾性体(筒状の弾性体)
4b 環状の凹部
41 ゴムシート
5 錘(マス部材の本体部材)
5a 環状の凸部
50 半割部材
6 連結リング(マス部材の連結部材)
10 金属ベローズ
11 フランジ
Claims (5)
- 防振対象物の収容される減圧容器と加振源となる機器との間の配管経路に設けられて、振動の伝達を抑制する防振継手であって、
前記配管経路の少なくとも一部を構成し、両端にそれぞれ前記減圧容器側及び機器側に接続されるフランジが設けられた金属ベローズと、
前記金属ベローズの外周を囲むようにその両端のフランジ間に設けられた筒状の弾性体と、を備え、
前記弾性体が前記減圧容器側及び機器側に分割されていて、その中間位置に配設されたマス部材の内周部が前記金属ベローズの外周部に接続され、
前記マス部材は、
前記弾性体の分割部位を含む外周面を押圧するよう、当該弾性体に外方から嵌め合わされた環状の本体部材と、
前記弾性体の減圧容器側及び機器側の部材間に挟まれていて、内周部が前記金属ベローズの外周のひだに嵌め込まれる一方、外周部が前記本体部材の内周部と接続されて、この本体部材を金属ベローズと連結する連結部材と、
を備えている、ことを特徴とする防振継手。 - 前記マス部材の本体部材は2つの半割部材を突き合わせて締結してなり、この締結力によってその内周面が前記連結部材の外周面に押圧されている、請求項1の防振継手。
- 前記弾性体は、前記減圧容器側及び機器側のそれぞれの端部から筒軸方向の中央に向かって徐々に外径の拡大する鼓状とされ、その最大外径の部位において全周に亘るように凹部が開口しており、
前記マス部材の本体部材の内周には、前記弾性体外周の凹部に嵌め込まれるように全周に亘って凸部が形成されている、請求項2の防振継手。 - 前記弾性体は、その外周の凹部内において減圧容器側及び機器側に分割され、この凹部の底面と略同一面上に前記マス部材の連結部材の外周面が位置して、その本体部材内周の凸部の内周面と当接している、請求項3の防振継手。
- 前記金属ベローズの外周には未加硫のゴムシートが巻き付けられている、請求項1〜4のいずれか1つに記載の防振継手。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009158451A JP5480545B2 (ja) | 2009-07-03 | 2009-07-03 | 防振継手 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009158451A JP5480545B2 (ja) | 2009-07-03 | 2009-07-03 | 防振継手 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011012777A JP2011012777A (ja) | 2011-01-20 |
JP5480545B2 true JP5480545B2 (ja) | 2014-04-23 |
Family
ID=43591876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009158451A Active JP5480545B2 (ja) | 2009-07-03 | 2009-07-03 | 防振継手 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5480545B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012112492A1 (de) * | 2012-12-18 | 2014-06-18 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
DE202015008803U1 (de) | 2015-12-23 | 2017-03-24 | Leybold Gmbh | Verbindungseinrichtung |
GB2587366A (en) * | 2019-09-24 | 2021-03-31 | Edwards Ltd | Vibration damping connector systems |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63501519A (ja) * | 1985-09-24 | 1988-06-09 | ヘリツクス テクノロジ− コ−ポレ−シヨン | 振動絶縁装置を備えたクライオポンプ |
JP2001140975A (ja) * | 1999-11-12 | 2001-05-22 | Tokyo Gas Co Ltd | 防振用配管継手 |
DE10001509A1 (de) * | 2000-01-15 | 2001-07-19 | Leybold Vakuum Gmbh | Vakuumpumpe mit Schwingungsdämpfer |
JP2002295581A (ja) * | 2001-03-28 | 2002-10-09 | Boc Edwards Technologies Ltd | ダンパ、及び真空ポンプ |
JP2002295372A (ja) * | 2001-03-30 | 2002-10-09 | Boc Edwards Technologies Ltd | ダンパ装置、及び真空ポンプ |
JP2005030423A (ja) * | 2003-07-07 | 2005-02-03 | Kazuya Shimizu | 除振装置 |
JP2005098326A (ja) * | 2003-09-22 | 2005-04-14 | Kazuya Shimizu | 除振装置 |
FR2867823B1 (fr) * | 2004-03-22 | 2006-07-14 | Cit Alcatel | Raccord amortisseur pour pompe a vide |
JP2006077714A (ja) * | 2004-09-10 | 2006-03-23 | Boc Edwards Kk | ダンパ及び真空ポンプ |
JP4264957B2 (ja) * | 2005-11-30 | 2009-05-20 | 株式会社昭和螺旋管製作所 | 防振用ベローズ管継手 |
JP3125081U (ja) * | 2006-06-27 | 2006-09-07 | 東亜インダストリー株式会社 | 配管用防振材及び配管用防振材の取付構造 |
WO2009011042A1 (ja) * | 2007-07-18 | 2009-01-22 | Edwards Japan Limited | 防振ダンパ |
-
2009
- 2009-07-03 JP JP2009158451A patent/JP5480545B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011012777A (ja) | 2011-01-20 |
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