JP5479224B2 - 反射屈折光学系及びそれを有する撮像装置 - Google Patents

反射屈折光学系及びそれを有する撮像装置 Download PDF

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Publication number
JP5479224B2
JP5479224B2 JP2010121751A JP2010121751A JP5479224B2 JP 5479224 B2 JP5479224 B2 JP 5479224B2 JP 2010121751 A JP2010121751 A JP 2010121751A JP 2010121751 A JP2010121751 A JP 2010121751A JP 5479224 B2 JP5479224 B2 JP 5479224B2
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JP
Japan
Prior art keywords
optical system
refractive power
image
catadioptric
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010121751A
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English (en)
Japanese (ja)
Other versions
JP2011248122A5 (https=
JP2011248122A (ja
Inventor
悠二 片芝
和彦 梶山
雅之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2010121751A priority Critical patent/JP5479224B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to US13/581,663 priority patent/US9019633B2/en
Priority to CN201180025349.5A priority patent/CN102906619B/zh
Priority to KR1020127030187A priority patent/KR101387823B1/ko
Priority to PCT/JP2011/062039 priority patent/WO2011148999A1/en
Priority to EP11786698.8A priority patent/EP2577377A1/en
Publication of JP2011248122A publication Critical patent/JP2011248122A/ja
Publication of JP2011248122A5 publication Critical patent/JP2011248122A5/ja
Application granted granted Critical
Publication of JP5479224B2 publication Critical patent/JP5479224B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2010121751A 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5479224B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置
CN201180025349.5A CN102906619B (zh) 2010-05-27 2011-05-19 反射折射系统和图像拾取装置
KR1020127030187A KR101387823B1 (ko) 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치
PCT/JP2011/062039 WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
US13/581,663 US9019633B2 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
EP11786698.8A EP2577377A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2011248122A JP2011248122A (ja) 2011-12-08
JP2011248122A5 JP2011248122A5 (https=) 2013-07-04
JP5479224B2 true JP5479224B2 (ja) 2014-04-23

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010121751A Expired - Fee Related JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Country Status (6)

Country Link
US (1) US9019633B2 (https=)
EP (1) EP2577377A1 (https=)
JP (1) JP5479224B2 (https=)
KR (1) KR101387823B1 (https=)
CN (1) CN102906619B (https=)
WO (1) WO2011148999A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
WO2018039361A1 (en) * 2016-08-23 2018-03-01 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Systems and methods for instant total internal reflection fluorescence/structured illumination microscopy
WO2018066313A1 (ja) 2016-10-03 2018-04-12 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2004061959A (ja) * 2002-07-30 2004-02-26 Canon Inc 投射光学系、投射型画像表示装置および画像表示システム
JP2005115127A (ja) 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
KR101171131B1 (ko) * 2004-07-14 2012-08-07 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Also Published As

Publication number Publication date
US20120320187A1 (en) 2012-12-20
CN102906619B (zh) 2015-01-14
WO2011148999A1 (en) 2011-12-01
CN102906619A (zh) 2013-01-30
KR101387823B1 (ko) 2014-04-22
JP2011248122A (ja) 2011-12-08
EP2577377A1 (en) 2013-04-10
KR20130006696A (ko) 2013-01-17
US9019633B2 (en) 2015-04-28

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