WO2011148999A1 - Catadioptric system and image pickup apparatus - Google Patents

Catadioptric system and image pickup apparatus Download PDF

Info

Publication number
WO2011148999A1
WO2011148999A1 PCT/JP2011/062039 JP2011062039W WO2011148999A1 WO 2011148999 A1 WO2011148999 A1 WO 2011148999A1 JP 2011062039 W JP2011062039 W JP 2011062039W WO 2011148999 A1 WO2011148999 A1 WO 2011148999A1
Authority
WO
WIPO (PCT)
Prior art keywords
image
ooe
refractive power
optical
light flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/062039
Other languages
English (en)
French (fr)
Inventor
Yuji Katashiba
Kazuhiko Kajiyama
Masayuki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to CN201180025349.5A priority Critical patent/CN102906619B/zh
Priority to KR1020127030187A priority patent/KR101387823B1/ko
Priority to US13/581,663 priority patent/US9019633B2/en
Priority to EP11786698.8A priority patent/EP2577377A1/en
Publication of WO2011148999A1 publication Critical patent/WO2011148999A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

Definitions

  • Arranging such consecutive four lens surfaces L11R1- L12R2 providing the strong negative combined refractive power between the aperture stop AS and the image pickup element 105 enables provision of an enlarging magnification of 4 times with a short total optical system length of 550mm.
  • the second optical imaging system G2 includes the lens group G22 having the strong negative refractive power and the lens group G23 having the positive refractive power between the aperture stop AS and the lens group G24 having the strong negative refractive power, and includes a lens group configuration of negative, positive, negative and positive refractive powers between the aperture stop AS and the image surface (image pickup element 105) .
  • the light flux further sequentially passes through the lens group G23 (lenses L11-L17) having a strong negative refractive power and the lens group G24 (lenses L18 and L19) having a positive refractive power to form an enlarged image of the sample 103 on the image pickup element 105.
  • placing the two lens groups G22 and G24 having the strong negative refractive powers between the aperture stop AS and the image pickup element 105 can significantly deviate the off-axis light flux away from the optical axis AX. Therefore, this configuration is suitable for achieving a large enlarging magnification with a short total optical system length.
  • sharing the negative refractive power between the aperture stop AS and the image pickup element 105 by the two lens groups G22 and G24 weakens the negative refractive power of each negative lens group, which can easily reduce aberrations of the optical system.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
PCT/JP2011/062039 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus Ceased WO2011148999A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201180025349.5A CN102906619B (zh) 2010-05-27 2011-05-19 反射折射系统和图像拾取装置
KR1020127030187A KR101387823B1 (ko) 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치
US13/581,663 US9019633B2 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
EP11786698.8A EP2577377A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-121751 2010-05-27
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Publications (1)

Publication Number Publication Date
WO2011148999A1 true WO2011148999A1 (en) 2011-12-01

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/062039 Ceased WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus

Country Status (6)

Country Link
US (1) US9019633B2 (https=)
EP (1) EP2577377A1 (https=)
JP (1) JP5479224B2 (https=)
KR (1) KR101387823B1 (https=)
CN (1) CN102906619B (https=)
WO (1) WO2011148999A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
WO2018039361A1 (en) * 2016-08-23 2018-03-01 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Systems and methods for instant total internal reflection fluorescence/structured illumination microscopy
WO2018066313A1 (ja) 2016-10-03 2018-04-12 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2004061959A (ja) * 2002-07-30 2004-02-26 Canon Inc 投射光学系、投射型画像表示装置および画像表示システム
JP2005115127A (ja) 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
KR101171131B1 (ko) * 2004-07-14 2012-08-07 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Also Published As

Publication number Publication date
JP5479224B2 (ja) 2014-04-23
US20120320187A1 (en) 2012-12-20
CN102906619B (zh) 2015-01-14
CN102906619A (zh) 2013-01-30
KR101387823B1 (ko) 2014-04-22
JP2011248122A (ja) 2011-12-08
EP2577377A1 (en) 2013-04-10
KR20130006696A (ko) 2013-01-17
US9019633B2 (en) 2015-04-28

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